• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.06a
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• pp.151-151
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• 2007

최근에 에피 성장된 ZnO는 UV-LED, 화학적-바이오센서와 투명전도 전극에 많은 관심을 받고 있다. 고 품질의 ZnO는 Metal-organic chemical vapor deposition(MOCVD), Pulsed laser deposition(PLD), molecular beam epitaxy(MBE), 그리고 마그네트론 스퍼터링법에 의해 성장이 이루어지고 있다. 대부분의 ZnO는 사파이어, 싫리콘과 같은 이종 기판 위에 성장되고 있으며, Heteroepitaxy로 성장된 ZnO 박막은 기판과 박막사이의 격자상수, 열팽창계수 차이로 인해 높은 결함 밀도를 보이고 있다. 이러한 문제점은 광전자 소자 응용에 있어 여러 가지 문제점을 야기 시킨다. 이와 같은 문제점을 해결하기 위해 박막과 기판사이에 저온 버퍼층을 사용하거나 같은 물질의 버퍼층을 사용하여 결할 밀도를 감소시키고, 높은 결정성을 가진 ZnO 박막을 성장시킨 결과들이 많이 보고되어지고 있다. 본 연구에서는 마그네트론 스퍼터링 법으로 저온 버퍼층 성장 없이 성장온도 만을 달리 하여 고품질의 ZnO 박막을 성장시켰다. ZnO 박막은 c-sapphire 기판위에 ZnO(99.9999%)의 타겟을 사용하여 $600{\sim}800^{\circ}C$ 온도에서 성장시켰고, 스퍼터링 가스로는 아르곤과 산소를 2:1 비율로 혼합하여 15mtorr의 압력에서 성장하였다. 이렇게 성장시킨 ZnO 박막은 Transmission Electron Microscopy (TEM), High-Resolution X-ray Diffraction (HRXRD), Low-temperature PL, 그리고 Atomic Force Microscopy (AFM)로 특성을 분석 하였다. ZnO 박막은 HRXRD (002) 면의 $\omega$-rocking curve운석 결과, $0.083^{\circ}$의 작은 FEHM을 얻었고, (102) 면의 $\varphi$-sacn을 통해 온도가 증가함에 따라 향상된 6-fold을 확인함으로새 에피성장됨을 알 수 있었다. 또한 TEM분석을 통해 $800^{\circ}C$에서 성장된 박막은 $6.7{\times}10^9/cm^2$의 전위밀도를 얻을 수 있었다.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.205-205
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• 2010

투명 전극(transparent conducting oxide, TCO)은 높은 전기전도도 및 낮은 비저항 ($10^{-4}{\sim}10^{-3}\;{\Omega}cm$)과 가시광영역에서의 우수한 광투과도(> 80%) 특성을 가지며, 주로 디스플레이, 태양전지, 가스 센서 소자 등에 쓰인다. 투명전극으로 쓰이는 대표적인 물질로서는 ITO, ZnO, $SnO_2$ 등이 있으며, ITO는 전기적 특성이 우수하여 널리 사용되고 있으나 가격이 비싸고 화학적으로 불안정하고, ZnO는 ITO에 비해 가격이 저렴하지만 고온에서 불안정한 특성을 가지고 있다. 반면, $SnO_2$는 ITO와 ZnO에 비해 전기적 특성은 떨어지지만, 우수한 열적, 화학적 안정성 및 높은 내마모성을 가지고 제조단가가 저렴하여 TCO 재료로 많은 연구가 진행되고 있다. TCO 박막을 증착시키는 방법으로 CVD, ion plating, sputtering, spray pyrolysis 등이 있으며, 이 중 sputtering 방법은 균일한 입자로 균질의 박막을 입힐 수 있고 우수한 재현성과 낮은 온도에서도 증착이 가능하여 박막 제조 방법으로 널리 이용되고 있다. 본 연구에서는 $SnO_2$ 박막을 실리콘 (100) 및 글라스 (Eagle 2000) 기판 위에 RF magnetron sputtering 방법을 사용하여 제작하였다. 박막 증착을 위해 99.99%의 2 인치 un-doped $SnO_2$ 타겟을 사용하였고, 기판은 20 rpm 으로 회전시켜 균일한 박막이 형성될 수 있도록 하였으며, 초기 진공도는 $1{\times}10^{-6}\;Torr$가 되도록 하였다. 증착 변수로 기판-타겟간 거리, RF 파워, $O_2/(Ar+O_2)$ 비, 공정압력, 기판 온도 등을 각각 변화 시키며 $SnO_2$ 박막을 증착하였다. 증착된 박막의 구조적 및 광학적 특성을 분석하기위해 FE-SEM, AFM, XRD, UV/VIS spectrophotometer, Photoluminescence 등을 사용하였다.

• Journal of Adhesion and Interface
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• v.24 no.4
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• pp.136-142
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• 2023

In this study, TEOS was used as a silica source, and a triblock copolymer (P123) was used as a template to produce mesoporous silica with a well-ordered hexagonal mesopore array through a self-assembly method and hydrothermal process under acidic condition. (Surfactant-extracted SBA-15). Surfactant-extracted SBA-15 showed the particle shape of a short rod with a size of approximately 980 nm. The surface area and pore diameter were 730 m²g^-1 and 70.8 Å, respectively. Meanwhile, aminosilane (3-aminopropyltriethoxysilane, APTES) was grafted into the mesopores using a post-synthesis method. Mesoporous silica (APTES-SBA-15) modified with aminosilane had a well-ordered pore structure (p6mm) and well-maintained the particle shape of short rods. The surface area and pore diameter of APTES-SBA-15 decreased to 350 m²g^-1 and 60.7 Å, respectively. APTES-modified mesoporous silica was treated with a solution of rare earth metal ions (Eu³⁺, Tb³⁺) to synthesize a mesoporous silica material in which rare earth metal complexes were introduced into the mesopores. (Eu/APTES-SBA-15, Tb/APTES-SBA-15) These materials exhibited characteristic photoluminescence spectra by λ_ex=250 nm. (⁵D₄→⁷F₅ (543.5 nm), ⁵D₄→⁷F₄ (583.5 nm), ⁵D₄→⁷F₃ (620.2 nm) transitions for Tb/APTES-SBA-15; ⁵D₀→⁷F₀ (577.7 nm), ⁵D₀→⁷F₁ (592.0 nm), ⁵D₀→⁷F₂ (614.9 nm), ⁵D₀→⁷F₃ (650.3 nm) and ⁵D₀→⁷F₄ (698.5 nm) transitions for Eu/APTES-SBA-15)

• Korean Journal of Remote Sensing
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• v.36 no.2_1
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• pp.155-165
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• 2020

In this present study, the sensitivity of O₄ Air Mass Factor (AMF) to Aerosol Peak Height (APH) has been investigated using radiative transfer model according to various parameters(wavelength (340 nm and 477 nm), aerosol type (smoke, dust, sulfate), aerosol optical depth (AOD), surface reflectance, solar zenith angle, and viewing zenith angle). In general, it was found that O₄ AMF at 477 nm is more sensitive to APH than that at 340 nm and is stably retrieved with low spectral fitting error in Differential Optical Absorption Spectroscopy (DOAS) analysis. In high AOD condition, sensitivity of O₄ AMF on APH tends to increase. O₄ AMF at 340 nm decreased with increasing solar zenith angle. This dependency isthought to be induced by the decrease in length of the light path where O₄ absorption occurs due to the shielding effect caused by Rayleigh and Mie scattering at high solar zenith angles above 40°. At 477 nm, as the solar zenith angle increased, multiple scattering caused by Rayleigh and Mie scattering partly leads to the increase of O₄ AMF in nonlinear function. Based on synthetic radiance, APHs have been retrieved using O₄ AMF. Additionally, the effect of AOD uncertainty on APH retrieval error has been investigated. Among three aerosol types, APH retrieval for sulfate type is found to have the largest APH retrieval error due to uncertainty of AOD. In the case of dust aerosol, it was found that the influence of AOD uncertainty is negligible. It indicates that aerosol types affect APH retrieval error since absorption scattering characteristics of each aerosol type are various.

• Korean Journal of Remote Sensing
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• v.36 no.3
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• pp.461-474
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• 2020

Korea launched Geostationary Environmental Monitoring Satellite (GEMS), a UV/visible spectrometer that measure pollution gases on 18 February 2020. Because satellite retrieval is an ill-posed inverse solving process, the validation with ground-based measurements or other satellite measurements is essential to obtain reliable products. For this purpose, satellite-based OMI and OMPS total column ozone (TCO), and ground-based Pandora TCO in Busan and Seoul were selected for future GEMS validation. First of all, the goal of this study is to validate the ground ozone data using characteristics that satellite data provide coherent ozone measurements on a global basis, although satellite data have a larger error than the ground-based measurements. In the cross validation between Pandora and OMI TCO, we have found abnormal deviation in ozone time series from Pandora #29 observed in Seoul. This shows that it is possible to perform inverse validation of ground data using satellite data. Then OMPS TCO was compared with verified Pandora TCO. Both data shows a correlation coefficient of 0.97, an RMSE of less than 2 DU and the OMPS-Pandora relative mean difference of >4%. The result also shows the OMPS-Pandora relative mean difference with SZA, TCO, cross-track position and season have insignificant dependence on those variables.In addition, we showed that appropriate thresholds depending on the spatial resolution of each satellite sensor are required to eliminate the impact of the cloud on Pandora TCO.

• Journal of the Korean Society of Radiology
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• v.15 no.3
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• pp.391-399
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• 2021

Eu²⁺ doped polyphosphate NaSr(PO₃)₃ blue-emitting phosphors were synthesized by the conventional solid state method in a reductive atmosphere. The phase formation of NaSr(PO₃)₃ phosphors were characterized by using the X-ray powder diffraction (XRD) measurement. The photoluminescence emission and excitation spectra of the NaSr(PO₃)₃:Eu²⁺ phosphor, and decay curves were measured. Under the near-UV excitation, the phosphor exhibits a band emission around 420 nm assigned to the 4f⁶5d→f7(8S^7/2) transition of Eu²⁺. The temperature dependent emission spectra and decay curves were measured to elevate the thermal properties of the Eu²⁺ doped phosphors. The as-prepared NaSr(PO₃)₃:Eu²⁺ phosphors show a strong temperature dependent performance, which can serve as a promising temperature sensor.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.8 no.2
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• pp.193-204
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• 1998

The single crystal of the $LiTaO_3$has large electro-optic effects, so it is applied to optical switch, acousto-optic deflector, and optical memory device as hologram using photorefractive effect. In this study, optic-grade undoped $LiTaO_3$and Fe:LiTaO$LiTaO_3$single crystals were grown by the Czochralski method and optical transmission and absorption spectrums were measured in the wavelength of UV-VIS range. The curie temperature was determined with DSC and by measuring capacitance for the grown undoped crystal and ceramic powder samples of various Li/Ta ratio. In case of having a 48.6 mol% $Li_2O$ as a starting Li/Ta ratio, the results of concentration variations were below 0.01 mol% $Li_2O$ all over the crystal, so it was confirmed that $LiTaO_3$single crystals were grown under congruent melting composition having optical homogeneity. The curie temperature of the Fe:$LiTaO_3$crystal was increased with increased with increased doped Fe concentrations;by the ratio of $7.5^{\circ}C$ increase per Fe 0.1 wt%. Also, the optical transmittance was about 78 %, which was sufficient for optical device.