• Proceedings of the KSME Conference
• /
• 2000.04b
• /
• pp.555-560
• /
• 2000

An experimental study on pumping characteristics of various turbo-type drag pumps is purformed. The inlet pressures are measured for various outlet pressures of the test pump. The maximum compression ratios for nitrogen are 100,000(Disk-type drag pump+ turbo molecular pump), 10000(Helical-type drag pump+turbo molecular pump), 850 (Helical-type drag pump), 100(disk-type drag pump).

• Proceedings of the KSME Conference
• /
• 2002.08a
• /
• pp.577-580
• /
• 2002

In this paper, the pumping performance of the disk-type drag pump which works in the outlet pressure range from 4 to 0.001 Torr is studied experimentally. The pumping characteristics of various drag pumps are performed. The inlet pressures are measured for various outlet pressures of the test pump. The flow-meter method is adopted to calculate the pumping speed. Compression ratios and pumping speeds for the nitrogen gas are measured. The present experimental data show the leak-limited value of the compression ratio in the molecular transition region. The rotational speed of the pump is 24,000rpm. The inlet pressures are measured for various outlet pressures of the test pump. The ultimate Pressures for zero throughput are measured for three-stage, two-stage and single-stage disk-type, respectively.

• Proceedings of the KSME Conference
• /
• 2007.05b
• /
• pp.2725-2730
• /
• 2007

Turbo-type molecular drag pumps ( MDPs ) are used in the liquid crystal display ( LCD ), semiconductor and other thin film industries. Siegbahn ( disk-type ) molecular drag pumps are used as high-pressure stages in the hybrid-type turbomolecular pumps, where they can operate in the viscous, the transition and the free molecular flow regime. In this study is performed to investigate the pumping characteristics of three-stage disk-type molecular drag pump ( DTDP ) in the molecular transition flow region. The experiments are measured using five vacuum pressure gauges in the positions for rotors of DTDP. The test is performed with nitrogen gas ( $N_2$ ).