• Applied Chemistry for Engineering
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• v.24 no.6
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• pp.611-615
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• 2013

Vanadium oxide ($VO_2$) and tungsten-doped vanadium oxide (W-$VO_2$) powder, well known as thermochromic materials, were prepared from vanadium pentoxide ($V_2O_5$) and oxalic acid dihydrate by hydrothermal and calcination process. The crystal structure and thermochromic property of samples were analyzed using FE-SEM, XRD, XPS, DSC, and UV-Vis-NIR spectroscopy. With increasing the doping amount of W, the phase transition temperature of W-$VO_2$ sample decreased from $70^{\circ}C$ to $42^{\circ}C$. When heating W-$VO_2$ sample above the phase transition temperature, the UV-Vis-NIR spectrum was not changed in the visible range and shifted towards a low transparency in the full name (NIR) region.

• Journal of the Korean Vacuum Society
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• v.7 no.4
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• pp.306-313
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• 1998

The electrochromic $WO_3$thin films were prepared by using the electron-beam evaporatin technique. Flms prepared at a vacuum pressure of $10^{-4}$ mbar were found to be most stable during repeated potential cycles. The chemical stability of the film in aqueous solutions was also affected by the vacuum pressure during evaporation. The redox current and the optical properties of the degraded films were affected by the thickness of the film. The 5,000$\AA$-thick films were found to be most stable, undergoing the least degradation during the repeated coloring and bleaching cycles. The origin of the mechanism dominating the degradation during the repeated coloring and bleaching cycles was the accumulation of lithium in the film, which results in decreasing redox current. Tungsten oxide films with titanium content of about 10-15 mol% was found to be most stable, undergoing the least degradation during the repeated cycles. The origin of the mechanism dominating the least degradation during the repeated cycles was the reduction of lithium ion trapping sites in the films, which results in a increased durability.

• Journal of Powder Materials
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• v.11 no.3
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• pp.253-258
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• 2004

We report a carbothermal reduction process for massive synthesis of monolithic W$_{18}$O$_{49}$ phase from tungsten oxide in the presence of carbon source. Carbon black powder was used as a carbon source and added to WO$_3$ by 40 weight percent. Bundles of W$_{18}$O$_{49}$ rods were formed over the temperature range of 80$0^{\circ}C$$^{\circ}C$ to 90$0^{\circ}C$. Pure W$_{18}$O$_{49}$ bundles could be separated from the mixture of W$_{18}$O$_{49}$ and residual carbon black powder. Field emission character of W$_{18}$O$_{49}$ phase was determined using the extracted W$_{18}$O$_{49}$ rods. Flat lamp fabricated from the W$_{18}$O$_{49}$ rods showed the turn-on field of 9.3 V/${\mu}m$.

• Nuclear Engineering and Technology
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• v.56 no.1
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• pp.247-256
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• 2024

The glass series modified by tungsten oxide was created using the compounds (75-x) B₂O₃- 10SrCO₃- 8TeO₂- 7ZnO - xWO₃, where x = 0, 1, 5, 10, 22, 27, 34, and 40% mole percentage. A UV-visible spectrophotometer and thermogravimetric-differential thermal analysis (TG-DTA) methods were employed to characterize the specimen's optical and phase transition attributes, respectively. The mass-attenuation coefficient (AC) of all created glasses from BSTZW0 to BSTZ7 was estimated using Geant4 code from 0.05 to 3 MeV and compared to the XCOM software results, with a relative difference of less than 2% between the two results. The increase of WO₃ percentage lead to an increase in the Linear-AC at each studied energy, and this is mainly due to the fact that the higher the percentage of WO₃ in the glass increases its density which causes an increase in the Linear-AC, so an energy of 0.06 MeV, as an example, the values of the Linear-AC was 4.009, 4.509, 5.442, 6812, 8.564, 9.856, 10.999 and 11.628 cm^-1 form BSTZW0 too BSTZW7, respectively. The Half-VL (value layer), Mean-FP (free path), Tenth-VL, and Radiation attenuation performance (RAP) were also calculated for the current BSTZW-glass samples and revealed that BSTZW7 had the best gamma ray attenuation performance at all discussed energies when compared to other studied glass samples.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.13 no.7
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• pp.568-574
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• 2000

We have been optimized tungsten(W) plug CMP(chemical mechanical polishing) characteristics using two different kinds of component of slurry and two different kinds of pad which have different hardness. The comparison of oxide film roughness on around W plug after polishing has been carried out. And W plug recess for consumable sets and dishing effect at dense area according to the rate of over-polishing has been investigated. Also the analysis of residue on surface after cleaning have been performed. As a experimental result we have concluded that the consumable set of slurry A and hard pad was good for W plug CMP process. After decreasing the rate of chemical reaction of silica slurry and adding two step buffering we could reduce the expanding of W plug void however we are still recognizing to need a more development for those kinds of CMP consumables.

• Transactions on Electrical and Electronic Materials
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• v.17 no.4
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• pp.189-195
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• 2016

Micro Hotplate (MHP) is the key component in micro-sensors, particularly gas sensors. Indeed, in metal oxide gas sensors MOX, micro-heater is used as a hotplate in order to control the temperature of the sensing layer which should be in the requisite temperature range over the heater area, so as to detect the resistive changes as a function of varying concentration of different gases. Hence, their design is a very important aspect. In this paper, we have presented the design and simulation results of a meander micro heater based on three different materials - platinum, titanium and tungsten. The dielectric membrane size is 1.4 mm × 1.6 mm with a thickness of 1.4 μm. Above the membrane, a meander heating film was deposed with a thickness of 100 nm. In order to optimize the geometry, a comparative study by simulating two different heater thicknesses, then two inter track widths has also been presented. Power consumption and temperature distribution were determined in the micro heater´s structure over a supply voltage of 5, 6, and 7 V.

• Journal of the Korean Electrochemical Society
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• v.1 no.1
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• pp.33-39
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• 1998

To AC impedance study was performed in this study on the interfacial reaction between organic electrolyte and amorphous tungsten oxides thin film, cathodically coloring oxide, prepared by e-beam evaporation method in the 1 M $LiClO_4/PC$ organic solution. The electrochemical reactions at the interface were analyzed by the transient method and the complex impedance spectroscopy. The impedance spectrums showed that the electro-chemical intercalation of lithium cations was consisted of the following three steps; the first step, the charge transfer reaction of lithium cation at the interface between amorphous tungsten oxides thin film and the organic electrolyte, the second step, the adsorption of lithium atom on the surface of amorphous tungsten oxides thin film, and then the third step, the absorption and the diffusion of lithium atom into amorphous tungsten oxides thin layer. The bleaching and the coloring characteristics of amorphous tungsten oxides thin film were explained in terms of thermodynamic and kinetic variables, the simulated $R_{ct},\;C_{dl},\;D$ and $\sigma_{Li}$ by CNLS fitting method. Especially it was found that the limiting values of electrochromic reaction were the molar ratio of lithium, y=0.167 and the electrode potential, E=2.245 V (vs. Li).

• Journal of the Korean institute of surface engineering
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• v.30 no.4
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• pp.223-230
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• 1997

Tungsten oxide and nickel oxide thin films were deposited onto ITO(Indium Tin Oxide) transparent glass by the E-beam evaporation and were used as a cathode and an anode for the EC(Electrochromic) smart window, respectively. Stoichiometric structures of the deposited films were investigated by the implementation of XPS(X-ray Photoelectron Spectroscopy) analysis and the results were $WO_{2.42}$ and $NiO_{0.44}$. This oxygen deficincy might affect affect the transparency of the thin films. The electrolyte for the EC smart windows was PAN-$LiCIO_4$ conducting polymer. EC(Ethylene Carbonate)and PC(Propylene Carbonate) were added as plasticizer to enhance ion conductivity. When the weight ratio of the EC : PC was 3 : 1, transmission difference and cycle life performance were tested. Polymer EC windows showed 40% $\Delta$T at 1.5V operating volage for 3,200 cycles. Structural degradation was observed by the SIMS(Secondary Ion Mass Spectroscopy) analysis and it was confirmed that structural degradation of polymer caused by the solvent evaporation was the main cause to degrade EC smart windows.

• Journal of Korean Society of Occupational and Environmental Hygiene
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• v.25 no.3
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• pp.294-300
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• 2015

Objectives: The aim of this study is to identify physicochemical properties such as chemical composition, size, shape and crystal structure of powder byproducts generated from a metallization process and its 1st scrubber in the semiconductor industry. Methods: Powder samples were collected from inner chambers during maintenance of the W-plug process equipment (using tungsten hexafluoride as a precursor material) and its 1st scrubber. The chemical composition, size and shape of the powder particles were determined by field emission scanning electron microscopy (SEM) and transmission electron microscopy (TEM) equipped with an energy dispersive spectroscope (EDS). The crystal structure of the powders was analyzed by X-ray diffraction (XRD). Results: From the SEM-EDS and TEM-EDS analyses, O and W were mainly detected, which indicates the powder byproducts are tungsten trioxide ($WO_3$), whereas Al, F and Ti were detected as low peaks. The powder particles were spherical and nearly spherical, and the particle size collected from the process equipment and its 1st scrubber showed 10-20 nm (agglomerates: 55-90 nm) and 16-20 nm (agglomerates: 80-120 nm) as primary particles, respectively. The XRD patterns of the yellow powder byproducts exhibit five peaks at $23.8^{\circ}$ $33.9^{\circ}$ $41.74^{\circ}$ $48.86^{\circ}$ and $54.78^{\circ}$ which correspond to the (200), (220), (222), (400), and (420) planes of cubic $WO_3$. Conclusions: We elucidated the physicochemical characteristics of the powder byproducts collected from W-plug process equipment and its 1st scrubber. This study should provide useful information for the development of alternative strategies to improve the working environment and workers' health.

• Journal of Biomedical Engineering Research
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• v.19 no.4
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• pp.333-339
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• 1998

The effect of heat treatment conditions on the properties of tungsten(W) embolization coils has been evaluated. The W embolization coils were fabricated by coiling the primary W coil with a diameter of 30.mm on a alumina rod mandrel with a diameter of 2.92mm. The secondary coils were then heat treated at 475$^{\circ}C$and 600$^{\circ}C$ for various heat treatment time ranging from 5 minutes to 36hours. The pitch distance, diameter and shape retention capability of the W embolization coils were characterized after the heat treatment. The pitch distance of the W embolization coils increased with the heat treatment time. The diameter of W emboliazation coils decreased continuously with heat treatment time. The shape retention capability of the W embolization coils increased with the heat treatment time due to an increase in elasticity by formation of tungsten oxide film on W coil surface during the heat treatment. The heat treatment condition of W embolization Col at 600$^{\circ}C$ for 20 minute was considered desirable based on the optimization of the shape retention capability, pitch distance and secondary coil diameter after heat treatment.