• Title/Summary/Keyword: Tungsten deposition

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Electrodeposition and characterization of Ni-W-Si3N4 alloy composite coatings

  • Choi, Jinhyuk;Gyawali, Gobinda;Lee, Soo Wohn
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2015.05a
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    • pp.171-172
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    • 2015
  • $Ni-W-Si_3N_4$ alloy composite coatings were prepared by pulse electro-deposition method using nickel sulfate bath with different contents of tungsten source, $Na_2WO_4.2H_2O$, and dispersed $Si_3N_4$ nano-particles. The structure and micro-structure of coatings was separately analyzed by X-ray diffraction (XRD) and scanning electron microscope (SEM). Results indicated that nano $Si_3N_4$ and W content in alloy had remarkable effect on micro-structure, micro-hardness and scratch resistant properties. Tungsten content in Ni-W and $Ni-W-Si_3N_4$ alloy ranged from 7 to 14 at.%. Scratch test results suggest that as compared to Ni-W only, $Ni-W-Si_3N_4$ prepared from Ni/W molar ratio of 1:1.5 dispersed with 20 g/L $Si_3N_4$ has shown the best result among different samples.

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Effects of TiN bufer on field emission properties of conical-type tungsten tips with carbon nanotubes coated (원뿔형 CNT-W 팁의 TiN 완충막 유무에 따른 전계방출 특성)

  • Kim, Young-Kwang;Yun, Sung-Jun;Kim, Won;Kim, Jong-Pil;Park, Chang-Kyun;Park, Jin-Seok
    • Proceedings of the KIEE Conference
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    • 2007.07a
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    • pp.1271-1272
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    • 2007
  • Experimental results regarding to the structural properties of carbon nanotubes (CNTs) and the field-emission characteristics of CNT-coated tungsten (W) tips are presented. CNTs are successfully grown on conical-type W-tips by inductively coupled plasma-chemical vapor deposition (ICP-CVD) with or without inserting a TiN-buffer layer prior to the formation of Ni catalysts. For all the CNTs grown, their nanostructures, morphologies, and crystalline structures are analyzed by FESEM, HRTEM, and Raman spectroscopy. Furthermore, the emission properties of CNT-based field-emitters are characterized to estimate the maximum current density and the threshold voltage. The results obtained in this study indicate that the emission current level of the CNT-emitter without using a TiN buffer is desirable for the application of micro-focused x-ray systems.

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Field-emission Properties and Long-term Stability of Tip-type Carbon Nanotubes Coated with Gallium-incorporated Zinc Oxide Films (갈륨이 첨가된 산화아연막의 코팅에 따른 미세팁 구조 탄소나노튜브의 전계방출 특성 및 장시간 안정성)

  • Kim, Jong-Pil;Noh, Young-Rok;Jo, Kyoung-Chul;Lee, Sang-Yeol;Park, Jin-Seok
    • Journal of the Semiconductor & Display Technology
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    • v.8 no.4
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    • pp.65-69
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    • 2009
  • Carbon nanotubes (CNTs) were coated with undoped zinc oxide (ZnO) or 5 wt% gallium-incorporated ZnO (GZO) using various deposition conditions. The CNTs were directly grown on conical-type tungsten substrates at $700^{\circ}C$ using inductively coupled plasma-chemical vapor deposition. The pulsed laser deposition technique was used to deposit the ZnO and GZO thin films with very low stress. Field-emission scanning electron microscopy and high-resolution transmission electron microscopy were used to monitor the variations in the morphology and microstructure of CNTs prior to and after ZnO or GZO coating. The formation of ZnO and GZO films on CNTs was confirmed using energy-dispersive x-ray spectroscopy. In comparison to the as-grown (uncoated) CNT emitter, the CNT emitter that was coated with a thin (10 nm) GZO film showed remarkably improved field emission characteristics, such as the emission current of $325\;{\mu}A$ at 1 kV and the threshold field of $1.96\;V/{\mu}m$ at $0.1\;{\mu}A$, and it also exhibited the highly stable operation of emission current up to 40 h.

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Microscopic Study of Sangdong Tungsten Ore Deposit, Korea (상동중석광상(上東重石鑛床)의 현미경적(顯微鏡的) 연구(硏究))

  • Lee, Dai Sung;Kim, Suh-Woon
    • Economic and Environmental Geology
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    • v.2 no.1
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    • pp.1-12
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    • 1969
  • In the Sangdong Mine area, Taebaegsan series (Pre-Cambrian) and Chosun System (Cambro-ordovician) are widely distributed. The Chosun System consists of Yangdug Series (Jangsan Quartzite and Myobong Slate) and The Great Limestone Series (Pungchon Limestone, Shesong Shale, Hwajeol Formation and Dongjeom Quartzite). The mineralized zone containing the main ore body of the Sangdong Mine was developed in the Myobong Slate formation. The result of the field and microscopic study on the mineral paragenesis and it's wall rock alteration in the tungsten ore deposit shows the following features. The orogenic movements of the Post-Chosun System in the Hambaeg Geosyncline are closely related to the tungsten ore deposition in the area, the ore minerals are composed mainly of scheelite, powelite molybdenite and sulfide minerals, and gangue minerals are hornblende, diopside, garnet, quartz, phlogopite, tremolite, biotite, muscovite, fluorite, etc., main ore body was enriched by scheelite bearing quartz vein filling into interstices of formerly mineralized zones, and the minor faults, faults of N $60^{\circ}-70^{\circ}W$, $45^{\circ}-60^{\circ}NE$ and joints, which were formed at the end of the mineralization and the slate. Country rock of the ore body was altered into the following several zones from the outside to the inside; lowgrade recrystalline aureole, silicified sericite zone, and diopside-hornblende zone. Under the microscopic observation of 195 samples taken from throughout ore body can be classified into 10 different groups by their mineral paragenesis as shown in table 2. The garnet-diopside group is primary skarn and it shows gradational change to the groups of later stage by the successive processes of metasomatism. From the stage of quartz-bearing group, the dissemination of scheelite is seen. The crystallization of scheelite in the bed started with the quartz deposition and continued to the last stage when quartz vein intruded into the main ore body. In the field and the under ground investigation a durable limestone bed in thickeness about 20 meters and their remnants in ore body are observed and under microscope calcite remnants are recognized. Hence it is posturated that the ore material moved up through the faults, shear zones or feather cracks and was assimilated with the interbeded limestone, after that the body was affected by the successive differentiated ore solution by gradational increasing in $SiO_2$, $K_2O$ and $H_2O$. Evidently this ore deposit shows the features resulted from pyrometasomatic processes.

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Macroscopic Wear Behavior of C/C and C/C-SiC Composites Coated with Hafnium Carbide

  • Lee, Kee Sung;Sihn, Ihn Cheol;Lim, Byung-Joo;Lim, Kwang Hyun
    • Journal of the Korean Ceramic Society
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    • v.52 no.6
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    • pp.429-434
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    • 2015
  • This study investigates the macroscopic wear behaviors of C/C and C/C-SiC composites coated with hafnium carbide (HfC). To improve the wear resistance of C/C composites, low-pressure chemical vapor deposition (LPCVD) was used to obtain HfC coating. The CVD coatings were deposited at various deposition temperatures of 1300, 1400, and $1500^{\circ}C$. The effect of the substrate material (the C/C substrate, the C/C-CVR substrate, or the C/C-SiC substrate deposited by LSI) was also studied to improve the wear resistance. The experiment used the ball-on-disk method, with a tungsten carbide (WC) ball utilized as an indenter to evaluate the wear behavior. The HfC coatings were found to effectively improve the wear resistance of C/C and C/C-SiC composites, compared with the case of a non-coated C/C composite. The former showed lower friction coefficients and almost no wear loss during the wear test because of the presence of hard coatings. The wear scar width was relatively narrower for the C/C and C/C-SiC composites with hafnium coatings. Wear behavior was found to critically depend on the deposition temperature and the material. Thus, the HfC-coated C/C-SiC composites fabricated at deposition temperatures of $1500^{\circ}C$ showed the best wear resistance, a lower friction coefficient, and almost no loss during the wear test.

음극 아크 증착으로 형성된 AlTiN 코팅막의 특성 평가

  • Kim, Seong-Hwan;Yang, Ji-Hun;Song, Min-A;Jeong, Jae-Hun;Jeong, Jae-In
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.298.2-298.2
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    • 2016
  • 가공이 까다로운 소재를 가공하기 위한 공구에 적용하기 위해서 Al의 함량이 높은 AlTiN 소재가 개발되어 적용되고 있으며, 이 소재는 공구의 수명향상을 위한 표면처리 소재로 각광을 받고 있다. 본 연구에서는 음극 아크 증착 시 거대입자가 박막에 증착되어 결함을 만들기 때문에 그 밀도를 낮추기 위해서 음극 아크 증착을 이용하여 공정 변화에 따른 AlTiN 박막의 표면형상을 관찰하고 특성을 평가하였다. 또한 빗각 증착을 적용하여 제작한 AlTiN 박막의 특성을 평가하였다. Al-25 at.%Ti 합금타겟을 음극 아크 소스에 장착하여 AlTiN 박막을 코팅하였다. 시편은 스테인리스 강판(SUS304)과 초경(tungsten carbide; WC)을 사용하였다. 음극 아크 소스에 인가되는 전류가 낮을수록 AlTiN 박막 표면에 거대입자의 밀도가 낮아졌으며, 기판 전압과 공정압력이 높을수록 AlTiN 박막의 표면에 존재하는 거대입자의 밀도가 낮아지는 경향을 보였다. 이를 통하여 거대입자밀도를 낮추는 기초공정을 도출하였다. AlTiN 박막 제작 시 빗각을 적용한 결과 $60^{\circ}$의 빗각을 적용한 다층 박막에서 약 33 GPa의 경도를 보였다. 본 연구를 통해 음극 아크 증착을 이용하여 거대입자의 밀도가 낮은 박막을 제작할 수 있는 공정을 도출하였고, 빗각증착을 적용하면 경도가 향상되는 결과를 확인하였다. 이를 통해 절삭공구 등과 같이 고경도의 코팅물성 유지를 위한 코팅분야에 응용이 가능할 것으로 판단된다.

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On the Genesis of Ulsan Iron-Tungsten Deposits (울산(蔚山) 철(鐵)·중석(重石) 광상(鑛床)의 성인(成因))

  • Park, Ki Hwa;Park, Hee-In
    • Economic and Environmental Geology
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    • v.13 no.2
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    • pp.104-116
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    • 1980
  • The Ulsan mine is one of the largest contact metasomatic magnetite and scheelite deposits in the southeastern part of Korea. Mineralization at the Ulsan mine is localized along the contact between upper Cretaceous volcanic rocks and age unknown limestone which were intruded by 58 m.y. -old biotite-horndlende granite. General zonal sequence of skarn toward crystalline limestone from limestone-volcanics contact is grandite, grandite-salite and salite zones. On the otherhand volcanics origin skarns exhibits zonal sequences toward hornfels from boundary with limestone is garnet, garnet-epidote, and epidote zone. Compositions of garnets and clinopyro xenes are determined by the X-ray diffraction and reflective indecies. Local brecciation of these early skarns were followed by formation of the later skarn as zoned patches, breccia fillings and cross-cutting veins. Paragenetic sequence of late skarn minerals which is exhibited in the zoned patches and veins is an overlapping progression with time from andradite through hedenbergite or actinolite, quartz to calcite deposition. Magnetite metallization followed early formed skarns and pyrite pyrrhoite, sphalerite, galena, tennantite, scheelite and arsenopyrite deposition were simultaneously with hedenbergite, quartz and calcite of late skarn. Filling temperatures of fluid inclusions in calcites range from $160^{\circ}$ to $280^{\circ}C$.

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The electrochromic properties of tungsten oxide thin films coated by a sol-gel spin coating under different reactive temperature (솔-젤 스핀 코팅에 의해 증착된 텅스텐 산화물 박막의 반응 온도에 따른 전기변색특성 연구)

  • 심희상;나윤채;조인화;성영은
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2003.11a
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    • pp.128-128
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    • 2003
  • Electrochromism (EC) is defined as a phenomenon in which a change in color takes place in the presence of an applied voltage. Because of their low power consumption, high coloration efficiency, EC devices have a variety of potential applications in smart windows, mirror, and optical switching devices. An EC devices generally consist of a transparent conducting layer, electrochromic cathodic and anodic coloring materials and an ion conducting electrolyte. EC has been widely studied in transition metal oxides(e.g., WO$_3$, NiO, V$_2$O$\sub$5/) Among these materials, WO$_3$ is a most interesting material for cathodic coloration materials due to its lush coloration efficiency (CE), large dynamic range, cyclic reversibility, and low cost material. WO$_3$ films have been prepared by a variety of methods including vacuum evaporation, chemical vapor deposition, electrodeposition process, sol-gel synthesis, sputtering, and laser ablation. Sol-gel process is widely used for oxide film at low temperature in atmosphere and requires lower capital investment to deposit large area coating compared to vacuum deposition process.

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Chemiresistive Sensor Based on One-Dimensional WO3 Nanostructures as Non-Invasive Disease Monitors

  • Moon, Hi Gyu;Han, Soo Deok;Kim, Chulki;Park, Hyung-Ho;Yoon, Seok-Jin
    • Journal of Sensor Science and Technology
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    • v.23 no.5
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    • pp.291-294
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    • 2014
  • In this study, a chemiresistive sensor based on one-dimensional $WO_3$ nanostructures is presented for application in non-invasive medical diagnostics. $WO_3$ nanostructures were used as an active gas sensing layer and were deposited onto a $SiO_2/Si$substrate using Pt interdigitated electrodes (IDEs). The IDE spacing was $5{\mu}m$ and deposition was performed using RF sputter with glancing angle deposition mode. Pt IDEs fabricated by photolithography and dry etching. In comparison with thin film sensor, sensing performance of nanostructure sensor showed an enhanced response of more than 20 times when exposed to 50 ppm acetone at $400^{\circ}C$. Such a remarkable faster response can pave the way for a new generation of exhaled breath analyzers based on chemiresistive sensors which are less expensive, more reliable, and less complicated to be manufactured. Moreover, presented sensor technology has the potential of being used as a personalized medical diagnostics tool in the near future.

Effects of various Pretreatments on the Nucleation of CVD Tungsten (전처리가 CVD 텅스텐의 핵 생성에 미치는 영향)

  • Kim, Eui-Song;Lee, Chong-Mu;Lee, Jong-Gil
    • Korean Journal of Materials Research
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    • v.2 no.6
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    • pp.443-451
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    • 1992
  • Effects of various pretreatments on the nucleation of CVD-W deposited on the reactively sputter-deposited TiN was investigated. Incubation period of nucleation and deposition rate decreased by the pretreatment of Ar rf-sputter etching for the depth below 300k, but they increased for the etchig depth over 200A. The preteatment of Ar ion implantation decreased the incubation period of nucleation, but increased deposition rate. Also Si$H_4$flushing pretreatment decreased the incubation period of nucleation slightly due to the absorption of Si by TiN surface.

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