• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.13 no.12
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• pp.1051-1057
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• 2000

A traveling-wave CPW(coplanar waveguide) electrode with abruptly broken input/output-taper for LiNbO$_3$optical modulator was designed and fabricated. The electrical characteristics of traveling-wave electrode on z-cut LiNbO$_3$crystal with SiO$_2$buffer layers were measured by network analyzer. To confirm the possibility of the electro-optic modulator electrode, detailed calculations of the impedance, microwave effective index and attenuation constants are presented as a function of the microwave electrode thickness, but the buffer layer thickness is fixed as 1${\mu}{\textrm}{m}$. These characteristics are discussed from the viewpoint of the device optimization and are expected to be design guides for the LiNbO$_3$modulator’s electrodes.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.39 no.7
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• pp.37-45
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• 2002

In this paper, the microwave characteristics of traveling-wave electroabsorption coplanar waveguide modulator have been analyzed and optimized precisely by using the 3-dimensional finite-difference time-domain method (FDTD). Microwave characteristics are affected by the thickness of intrinsic layer, the width of meas, and the distance between signal electrode and ground electrode on traveling-wave type structure. In case that intrinsic layers are composed of InAsP/InGaP (1.3Q), the optimized distance between signal electrode and ground electrode, the optimized intrinsic region thickness and the width of waveguide are founded to be $3{\mu}m,\;039{\mu}m\;and\;2{\mu}m$, respectively, to minimize microwave loss and to obtain velocity and impedance matched structure. By using the FDTD, we could design the traveling-wave electroabsorption modulator more precisely.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.19 no.9
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• pp.1782-1792
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• 1994

Ti : $LiNbO_3$ traveling-wave phase optical modulators at wavelength 1.3㎛ have been designed and fabricated, focusing on the optical waveguide and asymmetric coplanar electrode structure. To improve the phase-mismatch of traveling-wave ACPS electrode, the characteristic impedance, effective microwave index, and electrode loss have been presented as a function of geometric parameters including electrode and buffer layer thickness. Low-loss channel optical waveguides on $LiNbO_3$ were fabricated by the Ti diffusion method with $O_2$ water-vapor environment. $2.5{\mu}m$ thick electrode was successfully fabricated by double-spin image reversal process. Modulation bandwidth was limited by a resonance at 2.9 GHz and modulation bandwidth up to 2.5GHz was approxirnately measured.

• Proceedings of the Optical Society of Korea Conference
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• 1989.02a
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• pp.165-168
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• 1989

A finite-element method is developed to calculate the impedance of arbitrarily shaped electrodes on traveling-wave modulators. This method employs the divergence theorem to obtain the total charge on an electrode from the node potential values. By using this method, the impedance of multi strip-line electrodes on anisotropic inhomogeneous dielectric media was analysed and the effect of non-zero electrode thickness was calculated.

• Journal of the Korean Institute of Telematics and Electronics A
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• v.32A no.2
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• pp.96-110
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• 1995

Traveling-wave electrodes for the high-speed Ti:LiNbO$_{3}$ modulators are designed. For a solution to the problems of 1) phase-velocity mismatching between the optical wave and the Modulating M/W, 2) M/W electrode characteristic impedance mismateching, we assume devices with 1$\mu$m thick SiO$_{2}$ buffer layer between the electrode and the Ti:LiNbO$_{3}$ substrate. The electrode analyses are performed by the FEM using the second-order triangular elements. The optimum design parameters to satisfy the phase-velocity matching and the characteristic impedance matching are sought for. By use of the analyses' results, a Mach-Zehnder optical modulator with a CPW electrode is designed as an example. the band-width estimation is also illustrated.

• Electrical & Electronic Materials
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• v.9 no.1
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• pp.51-58
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• 1996

This report describes thick traveling-wave electrode formation and microwave transmission characteristics of the fabricated electrodes. Effective refractive indices of the microwave in the 5 micron CPW type traveling-wave electrodes is around 2.45 according to the results of time domain S parameter measurements. The bandwidth of the electrodes is about 10 GHz and could be extended to 15 GHz through optimization of the process. The developed process technique that enables plating of micropatterns upto 20 micron can be applied to broadband optical intensity modulators.

• Journal of the Korean Institute of Telematics and Electronics A
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• v.29A no.8
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• pp.41-48
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• 1992

The characteristics of traveling-wave electrodes for high-frequency electroptic integrated devices are described from the view point of improvement of phase-matching based on the conformal mapping method. Specific calculations of the characteristic impedance, effective microwave index, and eletrode loss for asymmetric coplanar strip(ACPS) and coplanar waveguide(CPW) electrode structures are presented as a function of the geometric electrode parameters including the electrode thickness and buffer layer thickness. 5-10(x10S0-6Tm) thick Au-ACPS electrodes were successfully fabricated by electroplating and ECR etcher. The improvement of modulation bandwidth can be theoretically observed from the combination of electrode and buffer layer thickness.

• Journal of the Korean Vacuum Society
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• v.6 no.S1
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• pp.89-95
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• 1997

A new type of piexoelectric membrane traveling wave motor has been designed and forbricated. The small motor is composed by the stator which is the combination of annular/circular membrane and metal elastic base using as the common electrode at some time and the rotor which is placed on the metal elastic body. Thus the motor structure is simple and easy to fabricate. The material of a piezoelectric membrane is fabricated by sol-gel method or wear-down method. A piezoelectric traveling wave motor has been fabricated with the stator diameter 8mm The total thickness of the stator is 350$\mu$m. Under the alternative excitation voltage 10-12V the revolving speed of the rotor is more than 100RPM.

• Proceedings of the Optical Society of Korea Conference
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• 2002.11a
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• pp.188-189
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• 2002

• Journal of the Korea Institute of Military Science and Technology
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• v.24 no.6
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• pp.610-618
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• 2021

In this paper, a photonic-based microwave system technology is described, and a traveling-wave electro-optic modulator is designed and manufactured as a key component. The fabricated modulator is composed of a metal diffusion waveguide for optical transmission and a planar waveguide electrode on lithium niobate substrate for microwave transmission. The electro-optic response bandwidth of I and Q channels in a fabricated dual parallel Mach-Zehnder modulator were measured for 27.67 and 28.11 GHz, respectively. Photonic four times up-converted X-band frequency and linear frequency modulated signal were confirmed using the fabricated electro-optic modulator by S-band input signal. The confirmed broadband signal can be applied to a microwave system for surveillance and high-resolution ISAR imaging.