• 대한전기학회:학술대회논문집
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• 대한전기학회 2001년도 하계학술대회 논문집 C
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• pp.1732-1734
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• 2001

The purpose of this experiment was to develope Triggered Vacuum Switch(TVS) and to improve understanding of the high current vacuum arc phenomena in the TVS. The TVS has an array of rods of alternate polarity in which a fixed gap spacing is maintained between the rods. The cross section of each rod has trapezoidal shape. Breakdown of the TVS produced high current vacuum arc plasma. A spectroscopic measurement was performed over 20 kA peak current in the center of electrodes, in the vicinity of cathode, and outside electrodes. The electrode material tested was Fe. Measured Fe spectrum range was from 200 nm to 900 nm. Measurement result showed that over 90 percent of the charge states were FeII and the others were FeI and FeIII. The electron temperature was determined from the relative line intensity ratio methode of FeII system by assuming the local thermal equilibrium(LTE). The electron temperature at the center of electrodes was measured as 1.5 eV at 26 kA peak current. The electron temperature varied with its peak current. Intensity of spectrums is the highest in the vicinity of the cathode. Further we will also present study result of the diode phenomena in the TVS.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2002년도 하계학술대회 논문집 C
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• pp.1823-1826
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• 2002

The purpose of this experiment was to develope Triggered Vacuum Switch (TVS) for the high voltage and high current. The TVS has an array of rods of alternate polarity in which a fixed gap spacing is maintained between the rods. The cross section of each rod has trapezoidal shape. It consists of electrode, ceramic chamber, getter and trigger. Currently, triggered vacuum switch (TVS) with seal-off has been designed and fabricated at PAL. An experimentation and trigger devices for TVS were designed for testing characteristics of electricity. For making the prototype of TVS, it is developed of fabrication process and fined of electrode material. The fabrication of the TVS is a lot of process which have manufacturing of part, chemical clean, ceramic brazing and metal welding. The fabricated TVS is tested of leak for vacuum, hold-off voltage and conditioning of trigger system. The TVS has pinch-off after it is removed of gas in the TVS and activated of getter in degassing furnace. The prototype TVS tested about 20 kV, 75 kA, 83 ${\mu}s$ with 100 kJ capacitor bank and inductance 5 ${\mu}H$. This paper describes the results of tests and the characteristics of the switch.

• 센서학회지
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• 제8권5호
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• pp.368-376
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• 1999

본 논문에서는 머리빗형 액튜에이터의 제작 공정 중에서 RIE 식각 공정시 발생하는 식각의 비등방도의 변화에 의해서 머리빗형 액튜에이터의 스프링 상수, 공진 주파수, 정전 구동력 과리고 진동자 변위 등에서 발생하는 동작 특성이 설계 값으로부터 변화되는 것을 예측하였다. 이를 위해 $6\;{\mu}m$ 두께의 폴리실리콘에 대한 RIE 식각 실험을 수행하여 RF power, $Cl_2$ 유량 그리고 챔버내 압력에 따른 비등방도를 측정하였다. 실험 결과에서 RF Power, $Cl_2$ 유량, 그리고 챔버내 압력이 증가할수록 비등방도 감소하였다. 이러한 비등방도 감소에 따른 머리빗형 구조물의 동작 특성을 세 가지 다른 지지빔의 경우에 대해 예측하였는데 세 가지는 fixed-fixed, crab-leg, 그리고 double crab-leg 구조이다. 비등방도가 감소함에 따라 즉, 지지빔의 단면이 직사각형이 아니고 사다리꼴이 되면서, 머리빗형 액튜에이더의 스프링 상수, 공진 주파수, 그리고 정전 구동력은 감소하였지만 질량체의 변위는 증가하였다. 그리고 세 가지 구조물 중에서 double crab-leg 지지빔을 갖는 머리빗형 액튜에이터의 특성이 비등방도에 의해 가장 큰 영향을 받는 것으로 나타났다.