• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.11a
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• pp.364-365
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• 2006

Transverse some wave was generated by T type waveguide for single wafer cleaning application T type megasonic waveguide was analyzed by acoustic pressure measurements and particle removal efficiency. Compared to conventional longitudinal waves, not like longitudinal waves, transverse waves showed changes of direction and phase which increased the cleaning efficiency.

• Journal of the Korea Institute of Military Science and Technology
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• v.6 no.4
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• pp.124-131
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• 2003

When a secondary gaseous flow is injected vertically into a supersonic flow through circular nozzle, a complicated structure of flow field is produced around the injection area. The interaction between the two streams produces a strong bow shock wane on the upstream side of the side-jet. The results show that bow shock wave and turbulent boundary layer interaction induces the boundary layer separation in front of the side-jet. This study is to analyze the structure of flow fields and distribution of surface pressure on the flat plate according to total pressure ratio using a supersonic cold-flow system and also to study the control force of affected side-jet. The nozzle of main flow was designed to have Mach 2.88 at the exit. The injector has a sonic nozzle with 4mm diameter at the exit of the side-jet. In experiments, The oil flow visualization using a silicone oil and ink was conducted in order to analyze the structure of flow fields around the side-jet. The flow fields are visualized using the schlieren method. In this study, a computational fluid dynamic solution is also compared with experimental results.