• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 추계학술대회 논문집
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• pp.404-405
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• 2007

Tin-doped indium thin film is outstanding material among transparent Conductive Oxide (TCO) materials. ITO thin films show a low electrical resistance(<$10^{-4}\;[{\Omega}{\cdot}m]$) and high transmittance(>80%) in the visible range. ITO thin films usually have been deposited on the glass substrate. In order to apply flexible display, the substrate should have the ability to bend and be deposited without substrate heat. Also properties of ITO thin film depend on what kind of substrate. In this study, we prepared ITO thin film on the polycarbonate (PC) substrate by using Facing Target Sputtering (FTS) system. Before deposition of ITO thin film, PC substrate took plasma surface treatment. The electrical and surface properties of as-deposited thin films were investigated by Hall Effect measurement, UV/VIS spectrometer and the surface property of substrate is investigated by Contact angle measurement.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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• pp.430-431
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• 2005

In this work, the ITO thin films were prepared by FTS (Facing Targets Sputtering) system under different sputtering conditions which were varying $O_2$ gas flow and input current. As a function of sputtering conditions, electrical and optical properties of prepared ITO thin films were measured. The electrical characteristics, surface roughness and transmittance of the ITO thin films were evaluated by Hall Effect Measurement, AFM, and UV-VIS spectrometer respectively. In addition, I-V properties of OLED cells were measured by 4156A(HP).

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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• pp.434-435
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• 2005

In this work, the ITO thin films were prepared by FTS (Facing Targets Sputtering) system under different sputtering conditions which were varying $O_2$ gas flow, input current and working gas pressure. As a function of sputtering conditions, electrical and optical properties of prepared ITO thin films were measured. The electrical characteristics, surface roughness and transmittance of the ITO thin films were evaluated by Hall Effect Measurement, AFM, and UV-VIS spectrometer respectively. In addition, I-V properties of OLED cells were measured by 4156A(HP).

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 하계학술대회 논문집 Vol.7
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• pp.420-421
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• 2006

The ITO thin films were prepared by FTS (Facing Targets Sputtering) system on polycarbonate(PC) substrate. The ITO thin films were deposited with a film thickness of 100nm at room temperature. As a function of sputtering conditions, electrical and optical properties of prepared ITO thin films were measured. The electrical and optical characteristics of the ITO thin films were evaluated by Hall Effect Measurement(EGK) and UV-VIS spectrometer(HP), respectively. From the results, the ITO thin film was deposited with a resistivity $8{\times}10^{-4}[{\Omega}-cm]$ and transmittance over 80%.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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• pp.300.1-300.1
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• 2013

반사방지막 코팅(Anti-reflection coating)은 태양전지(Solar cell), 발광다이오드(LED) 등의 반사율을 낮추어 효율을 증대시키기 위하여 사용되고 있다. 본 실험에서는 유리 기판 위에 실리콘 타겟을 이용한 Reactive magnetron sputtering 장비를 활용하여, 50~100 mTorr의 높은 공정 압력(High pressure)에서 증착하여 SiO2 반사방지막 코팅층을 형성하였다. Ellipsometer를 이용하여 SiO2 박막층의 굴절률(Refractive index)을 측정한 결과, 공정 압력에 따라 SiO2 박막이 다양한 굴절률을 가지는 것을 확인할 수 있었다. 또한, UV-Vis spectrometer를 이용하여, 450~600 nm 파장에서의 반사율(Reflectance)과 투과율(Transmittance)을 측정하여 비교, 분석하였다. 나아가 증착된 SiO2 반사방지막을 비정질 실리콘 박막 태양전지에 적용하여 효율 향상 효과를 실험하였다. 이를 활용하여 낮은 굴절률을 갖는 반사방지용 SiO2 코팅층을 형성하여 태양전지의 광 변환 효율을 상승 시킬 수 있고, 발광다이오드의 광 추출 효율을 증가시킬 있을 것으로 여겨진다.

• Transactions on Electrical and Electronic Materials
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• 제13권2호
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• pp.102-105
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• 2012

The structural, electrical, and optical properties of layer-by-layer ZnO nanoparticles deposited using sol-gel spin coating technique were studied and now presented. Thicknesses of the thin films were varied by increasing the number of deposited layers. As part of our characterization process, XRD and FE-SEM were used to characterize the structural properties, current-voltage measurements for the electrical properties, and UV-Vis spectra and photoluminescence spectra for the optical properties of the ZnO thin films. ZnO thin films with thicknesses ranging from 14.2 nm to 62.7 nm were used in this work. Film with thickness of 42.7 nm gave the lowest resistivity among all, $1.39{\times}10^{-2}{\Omega}{\cdot}cm$. Photoluminescence spectra showed two peaks which were in the UV emission centered at 380 nm, and visible emission centered at 590 nm. Optical transmittance spectra of the samples indicated that all films were transparent (>88%) in the visible-NIR range. The optical band gap energy was estimated to be 3.21~3.26 eV, with band gap increased with the thin film thickness.

• 폴리머
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• 제37권4호
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• pp.431-436
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• 2013

폴리카보네이트(PC) 필름에 이온 조사량과 에너지를 변화시켜 가면서 여러 종류의 이온을 조사하였다. 광 투과 특성과 화학적 조성은 각각 UV-VIS와 FTIR(ATR) spectroscopy를 이용해서 얻었다. 400 nm에서 이러한 UV-A 차단율은 에너지와 이온 조사량에 따라서 10에서 100%까지 자유롭게 조절할 수 있었다. 이온 조사된 PC 필름의 표면 전기 저항은 $10^6-10^{13}{\Omega}/cm^2$까지 전도도의 변화를 보인다. 이온 조사된 필름의 접촉각은 모재 필름의 접촉각보다 감소하였다. 폴리머 표면 형태는 atomic force microscopy(AFM)에 의해서 관찰되었다. 예상대로 더 무거운 Xe 이온 조사 후에 폴리머 필름의 파괴가 더 많았다. 그러나 Ar 이온 조사 후에 폴리머 필름의 표면 거칠기가 더 나타났다. 이것은 Xe 이온 조사의 경우 사용가능한 자유체적의 감소와 관련되어 폴리머 필름 표면층의 강력한 채움으로써 설명될 수 있다.

• 한국세라믹학회지
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• 제41권6호
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• pp.476-480
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• 2004

펄스 do 마그네트론 스퍼터링법에 의해 유리 기판 위에 AZO(Al-doped ZnO) 박막을 제조하여 박막의 구조적, 전기적 및 광학적 특성을 조사하였다. 본 연구를 위해 l.0 at% Al이 도핑 된 ZnO세라믹 타켓을 사용하였다. XRD 분석을 통하여 30KHz의 펄스 주파수가 인가되었을 때 c축 배향성이 가장 우수하게 나타났고, 표면 형상 분석을 통하여 매우 치밀한 박막이 성장되었음을 알 수 있었다. 증착율은 펄스 주파수가 증가함에 따라 선형적으로 감소하였고, 30KHz의 펼스 주파수가 인가되었을 때 비저항은 8.67${\times}$$10^{-4}$ $\Omega$-cm의 가장 낮은 비저항을 나타내었으며, UV-vis. 투과율 측정결과, 평균 85% 이상의 높은 투과도를 나타내었다. 이러한 낮은 비저항 및 높은 광 투과도로 볼 때 AZO 박막은 투명 전도성 산화물 박막으로의 응용 가능성을 나타내었다.

• 센서학회지
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• 제21권6호
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• pp.395-401
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• 2012

The bond strength of three types of $TiO_2$ coatings onto fluorine-doped $SnO_2$ (FTO) glass was investigated with the aid of a tape test according to ASTM D 3359-95. Transmittance was then measured using an UV-vis spectrophotometer in the wavelength range of 300 nm to 800 nm to evaluate the extent of adhesion of $TiO_2$ nanorods/nanoparticles on FTO glass. A sharp interface between the coating layer and the substrate was observed for single $TiO_2$ coating ($TiO_2$ nanorods/FTO glass), which may be detrimental to the bonding strength. In multicoating sample ($TiO_2$ nanorod/$TiO_2$ nanoparticle/$TiO_2$ nanoparticle/FTO glass), the tape test was not performed due to severe peeling-off prior to the test. On the other hand, the dual coating sample ($TiO_2$ nanorod/$TiO_2$ nanoparticle/FTO glass) showed minimum variation of transmittance (4%) after the test, suggesting that the topcoat adheres well with the FTO substrate due to the presence of the $TiO_2$ nanoparticle buffer layer. The use of a $TiO_2$ nanorod electrode layer with good adhesion may be attributed to the excellent dye sensitized solar cell performance.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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• pp.316-316
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• 2008

Using an evaporation method, $SiO_2$ was deposited as a buffer layer between a flexible PET substrate and a ITO film deposited by DC magnetron sputtering and electro-optical properties were investigated with thickness variance of $SiO_2$ layers. After coating a $SiO_2$ layer and a ITO film, the ITO/$SiO_2$/PET was heated up to $200^{\circ}C$ and the resistivity and the transmittance were measured by hall effect measurement system and UV/VIS/NIR spectroscopy. As a result of depositing a $SiO_2$ buffer layer, the resistivity increased and the transmittance and adhesion property were enhanced than ITO films with no buffer layers and the resistivity was lowered as $SiO_2$ thickness increased from 50 $\AA$ to 100 $\AA$. It was found that the transmittance was independent of annealing temperature variance in $150^{\circ}C{\sim}200^{\circ}C$ and the resistivity decreased as the temperature increased and especially decreasing rate of the resistivity was higher as the buffer layer thickness was thinner. So under optimized depositing of $SiO_2$ buffer layers and post-annealing of ITO/$SiO_2$/PET, ITO films with enhanced adhesion, electro-optical properties can obtained.