• 한국정밀공학회지
• /
• 제19권5호
• /
• pp.64-71
• /
• 2002

A new model utilizing a transfer function was proposed in the previous paper fur analizing motion errors of hydrostatic tables. Validity of the proposed method was theoretically verified as the calculated motion errors were compared with the results by conventional multi pad method. In this paper, relationship between form error of rail and motion errors of hydrostatic table is analized theoretically in order to comprehand so-called ‘averaging effect of oil film’. Experiments on the motion errors of hydrostatic table is conducted with 3 different rails, and the results are compared with the results calculated by Transfer Function Method. The results show good agreement. From the results, it is verified that TFM is very effective to analize the motion errors of hydrostatic table.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2001년도 춘계학술대회 논문집
• /
• pp.454-458
• /
• 2001

A new model utilizing a transfer function was proposed in the previous paper for analizing motion errors of hydrostatic tables. Validity of the proposed method was theoretically verified as the calculated motion errors were compared with the results by conventional multi pad method. In this paper, relationship between form error of rail and motion errors of hydrostatic table is analized theoretically in order to comprehand so-called 'averaging effect of oil film'. Experiments on the motion errors of hydrostatic table is conducted with 3 different rails, and the results are compared with the results calculated by Transfer Function Method. The results show good agreement. From the results, it is verified that TFM is very effective to analize the motion errors of hydrostatic table.

• 한국정밀공학회지
• /
• 제21권7호
• /
• pp.185-194
• /
• 2004

In order to analyze the motion errors of the aerostatic stage, it is necessary to consider the influence of the moment variation occurred inside the pads. In this paper, a motion error analysis method utilizing the transfer functions on the reaction force and moment is proposed, and general characteristics of the transfer functions are discussed. Calculated motion errors by the proposed method show good agreement with the ones calculated by Multi fad Method, which is considered the entire table as an analysis object. Also, by the introduction of the transfer function of motion errors, which represent the relationship between the spatial frequency components of the rail form error and motion errors, motional characteristics of the porous aerostatic stage can be generalized. In detail, the influence of the spatial frequencies is analyzed qualitatively, and the patterns of the insensitive frequencies which almost do not affect the linear motion error or angular motion error according to the rail length ratio and the number of the pad are verified. The relationship between the moment variation occurred inside the pads and the motion errors is also verified together.

• International Journal of Precision Engineering and Manufacturing
• /
• 제4권2호
• /
• pp.64-70
• /
• 2003

A new method using a transfer function is introduced in the present paper for analyzing the motion errors of hydrostatic bearing tables. The relationship between film reaction force in a single-side hydrostatic pad and the form error of guide rail is derived at various spatial frequencies by finite element analysis, and it is expressed as a transfer function. This transfer function clarifies so called 'the averaging effect of an oil film' quantitively. It is found that the amplitude of film force is reduced as the spatial frequency increases or the relative width of the pocket is reduced. The motion errors of a multi pad type table are estimated using a transfer function, the form errors of a guide rail and the geometric relationship between the pads. The method is named as the Transfer Function Method (TFM). The motion errors calculated by the TFM show good agreement with the motion errors calculated by the Multi Pad Method considering the entire table as an analysis object. From the results, it is confirmed that the proposed TFM is very effective to analyze the motion errors of hydrostatic tables.

• 한국정밀공학회지
• /
• 제19권5호
• /
• pp.56-63
• /
• 2002

A new model utilizing a transfer function is introduced in the present paper for analizing motion errors of hydrostatic tables. Relationship between film reaction force in a single hydrostatic pad and form error of a guide rail is derived at various spacial frequencies by finite element analysis, and it is expressed as a transfer function. This transfer function clarifies so called averaging effect of the oil film quantitively. For example, it is found that the amplitide of the film reaction farce is reduced as the spacial frequency increases or relative width of the pocket is reduced. Motion errors of a multiple pad table is estimated from transfer function, geomatric relationship between each pads and form errors of a guide rail, which is named as Transfer Function Method(TFM). Calculated motion errors by TFM show good agreement with motion errors calculated by Multi Pad Method, which is considered entire table as an analysis object. From the results, it is confirmed that the proposed TFM is very effective to analyze the motion errors of hydrostatic tables.

• 한국정밀공학회지
• /
• 제19권6호
• /
• pp.77-85
• /
• 2002

An analysis method which calculates corrective machining information for improving the motion accuracy of linear motion guide Is proposed in this paper. The method is composed of two algorithms. One is the algorithm fur prediction of the motion errors from rail form error. The other is the algorithm for prediction of rail form error from the motion errors of table. Transfer function is utilized in each algorithm, which represents the ratio of bearing reaction force variation to unit magnitude of spatial frequencies of raid from error. As the corrective machining information is acquired from the measured motion errors of table, the method has a merit not to measure rail form error directly. Validity of the method is verified both theoretically and experimentally. By applying the method, linear motion error of test equipment is reduced from 5.97$\mu$m to 0.58$\mu$m, and reduced from 32.78arcsec to 6.21 arcsec in case of angular motion error. From the results, it is confirmed that the method is very effective to improve the motion accuracy of linear motion guide.

• 연구논문집
• /
• 통권34호
• /
• pp.101-112
• /
• 2004

In order to analyze the motion errors of the aerostatic stage, it is necessary to consider the influence of the moment variation occurredinside the pads. In this paper, a motion error anaysis method utilizing the transfer functions on the reaction force and moment is proposed, and general characteristics of the transfer functions are discussed. Calculated motion errors by the proposed method show good agreement with the ones calculated by Multi Pad Method, which is considered the entire table as an analysis object. Also, by the introduction of the transfer function of motion errors, which represent the relationship between the spatial frequency components of the rail form error and motion errors, motional characteristics of the porous aerostatic stage can be generalized. In detail, the influence of the spatial frequencies is analyzed quantatively, and the patterns of the insensitive frequencies which almost do not affect the linear motion error or angular motion error according to the rail length ratio and the number of the pad are verified. The relationship between the moment variation occurred inside the pads and the motion errors is also verified together.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2013년도 춘계학술대회 논문집
• /
• pp.113-114
• /
• 2013

• International Journal of Precision Engineering and Manufacturing
• /
• 제4권2호
• /
• pp.57-63
• /
• 2003

A new method using a transfer function was proposed in the previous paper for analyzing motion errors of hydrostatic tables. The calculated motion errors by the new method, named as the transfer (unction method (TFM), were compared with the results by the conventional multi pad method, and the validity of the proposed method was theoretically verified. In this paper, the relationship between rail form error and motion errors of a hydrostatic table is examined theoretically in order to comprehand so-called 'the averaging effect of an oil film', and the characteristics of the motion errors in a hydrostatic table is tested. The tested hydrostatic table has three single-side pads in the vertical direction and three pairs of double-sides pads in the horizontal direction. The motion errors are tested for three rails which have different form errors. The experimental results are compared with the theoretical results calculated by the TFM, and both results show good agreement. From the results, it is shown that the TFM is very effective to analyze the motion errors of hydrostatic tables.

• 한국공작기계학회:학술대회논문집
• /
• 한국공작기계학회 2001년도 춘계학술대회 논문집(한국공작기계학회)
• /
• pp.9-14
• /
• 2001

A new model utilizing a transfer function is introduced in the present paper for analizing motion errors of hydrostatic tables. Relationship between film reaction force in a single hydrostatic pad and form error of a guide rail is derived at various spacial frequencies by finite element analysis, and it is expressed as a transfer function. This transfer function clarifies so called averaging effect of the oil film quantitively. For example, it is found that the amplitide of the film reaction force is reduced as the spacial frequency increases or relative width of the pocket is reduced. Motion errors of a multiple pad table is estimated from transfer function, geometric relationship between each pads and form errors of a guide rail, which is named as Transfer Function Method. Calculated motion errors by TFM show good agreement with motion errors calculated by Multi Pad Method, which is considered entire table as an analysis object. From the results, it is confirmed that the proposed TFM is very effective to analyze the motion errors of hydrostatic tables.