• Tribology and Lubricants
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• v.18 no.4
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• pp.249-254
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• 2002

Adhesive contact characteristics of torus-shaped bumps were analyzed using the finite element technique considering the adhesive force. Analyses focused on the effect of rim and bump radii on the adhesive contact behavior such as the jump-to-contact behavior, adhesion hysteresis, pull-off forces, contact region and pressure, and surface and subsurface stresses. Analysis results in the absence of adhesive force were also included to examine the effect of adhesive force. The applicability of torus-shaped bumps to the MEMS structure for reduction of friction is discussed.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2002.05a
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• pp.179-184
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• 2002

Adhesive contact characteristics of torus-shaped bumps, which are commonly used to reduce friction and stiction in hard disks, are analyzed to examine the applicability to the MEMS structure. The analysis is conducted with the finite element technique considering the adhesive force. Torus-shaped bumps of various rim and bump radii are analyzed. The jump-to-contact behavior, adhesion hysterisis, pull-off forces, contact region and pressure, and surface and subsurface stresses are presented and discussed. Analysis results in the absence of adhesive force are also presented to identify the effect of adhesive force.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.28 no.8 s.227
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• pp.1087-1092
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• 2004

Adhesion and friction forces influence adversely on performance and durability of MEMS. It has been reported that the adhesion and friction forces can be reduced with the introduction of micro surface bumps into the contacting interfaces. In this study experiments were conducted to investigate comparatively the effect of hemispherical and torus micro bumps on the adhesion and friction forces. It is confirmed that micro bumps reduce the adhesion and friction forces, and their effect is more pronounced with the bumps of smaller outer boundary radius. Moreover, the results shows that the torus bumps exhibit more rapid decrease of the adhesion and friction forces with the decrease in the outer boundary radius of bump than the hemispherical bumps. When the magnitude of adhesion force is same, the torus bumps generate smaller friction force than the hemispherical bumps. The usage of hemispherical and torus bumps to reduce the adhesion and friction forces in MEMS is discussed.