• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2004년도 춘계학술대회 논문집
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• pp.513-517
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• 2004

The nature of the signals collected by an SEM(Scanning Electron Microscope) in order to form images are all dependent on the detector used to collect them, and the quality of an acquired image is strongly influenced by detector performance. Therefore, the development of detector with high performance is very important in pulling up the resolution of SEM. In this article, electron beam-specimen interactions, the detection principle of secondary electrons and backscattered electrons, and the structure of a conventional detector are described. The structure of an experimental apparatus for the future study on our hopeful novel electron detector is presented as well.

• 한국정밀공학회지
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• 제17권7호
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• pp.217-225
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• 2000

Scanning Acoustic Microscope (SAM) is used as an important nondestructive test tool in semiconductor reliability evaluation and failure analysis. However, inspections of chip attach adhesive interface fer thin chip has proven difficulty as the reflected signals from the chip top and bottom are superimposed. In this paper, in order to overcome this difficulty, a new signal processing method based on the deconvolution technique combined with the wavelet transform is proposed. The wavelet transform complements a disability of deconvolution technique of which performance largely decreases when the waveform of target signal is not identical to that of reference signal. Performances of the proposed method are demonstrated by through computer simulations using model signal and experiments for the fabricated semiconductor samples, and satisfactory results are obtained.

• 한국정밀공학회지
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• 제15권3호
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• pp.99-106
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• 1998

Recently, scientists introduced a new type of microscope capable of investigating nonconducting surfaces in an atomic scale, which is called AFM (Atomic Force Microscope). It was an innovative attempt to overcome the limitation of STM (Scanning Tunnelling Microscope) which has been able to obtain the image of conducting surfaces. Surfaces of samples are imaged with atomic resolution. The AFM is an imaging tool or a profiler with unprecedented 3-D resolution for various surface types. The AFM technology, however, leaves a lot of room for improvement due to its delicate and fragile probing mechanism. One of the room for improvements is gap control between probe tip and sample surface. Distance between probe tip and sample surface must be kept in below one Angtrom in order to measure the sample surface in Angstrom resolution. In this paper, AFM system modeling, experimental system identification and control scheme based on system identification are performed and finally sample surface is measured by home-built AFM with such a control scheme.

• 한국공작기계학회논문집
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• 제14권6호
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• pp.22-30
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• 2005

This paper proposes a measurement method for the surface shape of micro-parts by using an atomic force microscope(AFM). To this end, two techniques are presented: First, the measurement range is expanded by using an image matching method based on correlation coefficients. To account for the inaccuracy of the coarse stage implemented in AFM, the image matching technique is applied to two neighboring images intentionally overlapped with each other. Second, a method to measure the shape of relatively large specimen is proposed that utilizes the inherent trigger mechanism due to the atomic force. The proposed methods are proved effective through a series of experiments.

• Tribology and Lubricants
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• 제16권5호
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• pp.389-394
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• 2000

Scanning Probe Microscope (SPM) such as Scanning Tunneling Microscope (STM) and Atomic Force Microscope (AEM) was shown to be the powerful tool for nano-scale characterization of material surfaces. Using this technique, surface morphology of the cyclically deformed Cu or Cu-Al single crystal was observed. The surface became proportionately rough as the number of cycles increased, but after some number of cycles no further change was observed. Slip steps with the heights of 100 to 200 nm and the widths of 1000 to 2000 nm were prevailing at the stage. The slipped distance of one slip system at the surface was not uniform, and formation of the extrusions or intrusions was assumed to occur such place. By comparing the morphological change caused by crystallographic orientation, strain amplitude, number of cycles or stacking fault energy, some interesting results which help to clarify the basic mechanism of fatigue damage were obtained. Furthermore, applicability of the scanning tunneling microscopy to fatigue damage is discussed.

• 한국정보통신학회:학술대회논문집
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• 한국해양정보통신학회 2010년도 추계학술대회
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• pp.776-779
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• 2010

본 논문은 CSAM의 게이트 피크 검출장치를 단일 칩 기반으로의 구현을 제안한다. 게이트 피크 검출장치의 구현은 VHDL을 이용한다. 제안된 방법은 초음파 현미경 뿐만 아니라 게이트 피크 검출을 이용하는 모든 시스템에 적용과 통합이 가능하며 기존의 방법과 비교하여 면적과 응용면에서 효율의 차별화를 제시한다.

• 열처리공학회지
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• 제32권3호
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• pp.118-123
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• 2019

The aim of this study investigates the feasibility of scanning acoustic microscope (SAM) with high frequency transducer for material degradation. The test specimen was prepared by artificial heat treatment of Co-base superalloy. The high frequency 200 MHz acoustic lens was used to generate the leaky surface acoustic wave (LSAW) on the test specimens. The matrix precipitates coarsened with thermal aging time, and then grow up to several tens of micrometers. The velocity of LSAW decreased with increasing aging time. Also, it has a good correlation between LSAW and hardness. Consequently, V(z) curve methods of SAM using high frequency transducer is useful tool to evaluate the heat treatment effects on microstructure.

• Journal of the Korean Wood Science and Technology
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• 제52권3호
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• pp.276-288
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• 2024

This study was conducted to reproduce the woodworking process of Baekje wooden storage facilities. Green timber of Quercus spp. was processed using ancient woodworking tools, and the tool-trace formed in this process were compared with the tool-trace of actual excavated artifacts. In the tool-trace analysis, the length and shape of the tool-trace were objectively recorded using a 3D Scan, and that were difficult to confirm with photograph were confirmed through stereoscopic microscope. As a result, there were two types of adze's tool-trace. One of them is minute straight Blade-top trace line when trimming the wood surface and the other is Plucked trace that appear when strongly chop at the wood. When a chisel bat was not used, a long and wide continuous shape blade trace was produced. And when the chisel head was struck with the chisel bat, a straight blade-top trace was regularly observed. Saw-trace was identified in several layers with fine straight stripes. Through this, it was found that the tool-trace of the woodworking tools, which is estimated to have been used in each process, and the tool-trace remaining in the Baekje wooden storage facility coincide.

• 대한기계학회논문집A
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• 제24권4호
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• pp.955-962
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• 2000

Scanning Probe Microscope (SPM) such as Scanning Tunneling Microscope (STM) and Atomic Force Microscope (AFM) was shown to be the powerful tool for nano-scale characterization of a fracture surface . AFM was used to study cross sectional profiles and dimensions of fatigue striations in 2017-T351 aluminum alloy. Their widths (SW) and heights (SH) were measured from the cross sectional profiles of three-dimension AFM images. The following results that will be helpful to understand the fatigue crack growth mechanism were obtained. (1) Coincidence of the crack growth rate with the striation width was found down to the growth rate of 10-5 mm/cycle. (2) The relation of SH=0.085(SW)1.2 was obtained. (3) The ratio of the striation height to its width SH/SW did not depend on the stress intensity factor range K and the stress ratio R. (4) Not only the SW but also the SH changed linearly with the crack tip opening displacement (CTOD) when plotted in log-log scale. From these results, the applicability of the AFM to nano-fractography is discussed.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2001년도 추계학술대회(한국공작기계학회)
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• pp.225-230
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• 2001

Small diameter drilling which take high precision in cutting work is needed more small hole and high speed working. Especially, small hole deep drilling is one of the most important machining types and its necessity and importance become more and more increasing in the whole field of industry. This paper shows the limit depths with small diameter drills using experimental analysis. The results are gained by tool dynamometer and Labview system and obtained during small diameter twist drilling system on SM45C steel for different machining conditions. The machine and tools are the CNC machining center and twist drill of diameter 1.5mm. And additionally, tool microscope show the relationship between shapes of chips and breakage shapes of small diameter drills.