• 자원리싸이클링
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• 제29권1호
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• pp.25-34
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• 2020

전기화학적 미소수정진동자저울은 전극표면에서 발생하는 나노그램 수준의 질량변화를 실시간 측정할 수 있는 장비이다. 역압전효과를 가진 수정진동자 양면에 형성된 금속전극에 교대로 전계를 가하면 진동자의 두께에 따라 특정 공진주파수를 나타낸다. 공진주파수는 전극표면에서 발생하는 질량변화에 반응하며, 전극표면의 금속이 용해될 때는 증가하고 석출될 때는 반대로 감소한다. 공진주파수와 질량변화의 상관관계는 Sauerbrey 식으로 나타내고 이를 이용하여 금속의 침출반응때 발생하는 질량변화를 실시간으로 측정할 수 있다. 특히 용해 후 침출액에서 침전, 휘발, 기타 화합물 형성 등 부반응으로 실험 후 발광분광분석이나 원자흡광분석 등이 용이하지 않은 금속의 침출 반응기구 및 속도 연구에 매우 효과적이다. 그러나 수정진동자의 공진주파수는 질량변화 외에도 용액의 점도, 수압, 온도, 스트레스, 그리고 표면거칠기 등에도 영향을 받으므로 실험 시 이들 영향에 대한 고려가 필요하다. 전기화학적 미소수정진동자저울의 응용 예로서 염소를 이용한 백금의 침출 시 용해속도를 실시간 측정하고 이로부터 활성화에너지를 구하는 일련의 과정을 소개하였다. 침출에 사용된 백금시료는 수정진동자 양면에 형성된 1000 Å두께의 백금전극 중 침출액에 노출된 한쪽 면을 활용하였으며, 전해생성된 염소를 염산 침출액에 주입하여 침출 시 용존 염소농도를 조절하였다. 실험결과로부터 염소에 의한 백금의 용해반응은 활성화에너지가 83.5 kJ/mol로 화학반응율속임을 확인하였다.

• 한국공작기계학회논문집
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• 제13권5호
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• pp.7-15
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• 2004

The purpose of this study was to present the method to choose the optimum machining condition for the wire EDM. This was completed by examining the ever-changing quality of the material and by improving the function of the wire electric discharge machine. Precision metal mold products and the unmanned wire electric discharge machining system were used and then applied in industrial fields. This experiment uses the wire electric discharge machine with brass wire electrode of 0.25mm. To measure the precision of the machining surface, average values are obtained from 3 samples of measures of center-line average roughness by using a third dimension gauge and a stylus surface roughness gauge.

• 반도체디스플레이기술학회지
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• 제18권2호
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• pp.17-22
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• 2019

The method of electrical discharge machining (EDM), one of the processing methods based on non-traditional manufacturing procedures, is gaining increased popularity, since it does not require cutting tools and allows machining involving hard, brittle, thin and complex geometry. This present investigation details the determination of optimum process parameter to attain the better machining performance in EDM of AISI 4340 steel with graphite as a tool electrode. The experimental combinations are planned and analyzed by Taguchi's design of experiments approach. To predict the optimal condition, the experiments are conducted by using Taguchi's L27 orthogonal array. The influence of process variables such as discharge current, pulse on and pulse off time, voltage and spark speed were investigated to control the various desired performance measures such as surface roughness. Analysis of Variance (ANOVA) has to be performed to know the magnitude of each factor. Investigations indicate that the surface roughness is strongly depend on pulsed current.

• 한국정밀공학회지
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• 제19권12호
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• pp.134-141
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• 2002

The ER fluid can be one of efficient materials in ultraprecision polishing for optics, ceramics and semiconductors because of electrically controllable apparent viscosity. To finish small 3 dimensional structures such as the aspherical surface in optical elements, the possible arrangement of a tool, workpiece and auxiliary electrode is described. We examined the influence of the addition of a few abrasive particles on the performance of the ER fluid by measuring yield stress, and observed the behavior of abrasive particles in the ER fluid by a CCD camera, which is also theoretically predicted from the electromechanical principles of particles. On the basis of the above results, the steady flow analysis around the rotating micro tool is worked out considering the non-uniform electric field. Finally, Pyrex glass is polished using the mixture of the ER fluid and abrasive particles, and the effect of the electric field strength is evaluated.

• 반도체디스플레이기술학회지
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• 제19권4호
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• pp.28-33
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• 2020

Plasma etching process employs high density plasma to create surface chemistry and physical reactions, by which to remove material. Plasma chamber includes silicon-based materials such as a focus ring and gas distribution plate. Focus ring needs to be replaced after a short period. For this reason, there is a need to find materials resistant to erosion by plasma. The developed chemical vapor deposition processing to produce silicon carbide parts with high purity has also supported its widespread use in the plasma etch process. Silicon carbide maintains mechanical strength at high temperature, it have been use to chamber parts for plasma. Recently, besides the structural aspects of silicon carbide, its electrical conductivity and possibly its enhanced life time under high density plasma with less generation of contamination particles are drawing attention for use in applications such as upper electrode or focus rings, which have been made of silicon for a long time. However, especially for high purity silicon carbide focus ring, which has usually been made by the chemical vapor deposition method, there has been no study about quality improvement. The goal of this study is to reduce surface roughness and depth of damage by diamond tool grit size and tool dressing of diamond tools for precise dimensional assurance of focus rings.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2004년도 춘계학술대회 논문집
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• pp.27-33
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• 2004

Electro-theological fluid is recently used for the micro polishing of 3-dimensional micro-aspherical lens. It's also used for polishing small area defects on the wide flat wafer. Since ER fluid shows a behavior of viscosity changing under certain electric fields. micro polishing efficiency may be enhanced for certain cases. In this paper, a perfluorinated carbonyl fluoride oil based ER fluids was used to improve surface polishing rate and submicron-scale accuracy. As the polishing electrodes, micro size cylindrical tools had been used for maximizing the electric field. An experimental device, which was applied for micro polishing a number of wafers of 4inches in size and other workpiece. was made on a precision polishing system. It consisted of a steel electrode. a wafer fixture. l0㎃ current and DC 5㎸ power supply unit, and a controller unit. From the Experiments. the ER fluid is applicable for micro polishing of small parts.

• 한국공작기계학회논문집
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• 제15권1호
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• pp.23-31
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• 2006

The present works concerns a side flushing device for the improvement of the conventional Electric-Discharge Machining(EDM) process. In the EDM process, chips are usually generated as the workpiece is removed, and deposited between the electrode and the workpiece. This sediment degrades the surface finish of the machined product as well as the processing efficiency. In the present study, a flushing device with additional side injection equipments is proposed in order to remove the deposited chips effectively. Through numerical simulations, the validity of the proposed device is verified, and the influence of process parameters is investigated. Experiments have been also carried out in the die sinking EDM process. It was observed that the process efficiency and the surface finish are improved by virtue of the proposed flushing device.

• 한국정밀공학회지
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• 제19권3호
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• pp.80-87
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• 2002

Tungsten carbide microshaft is used as micro-punch, electrode of MEDM (micro-electro-discharge machining), and micro-tool because it has high hardness and high rigidity. In this study, the tungsten carbide microshaft was fabricated using electrochemical machining. Concentration of material removal at the sharp edge and metal corrosion layer affect the shape of the microshaft. Control of microshaft shape was possib1e through conditioning the machining voltage and electrolyte concentration. By applying periodic voltage, material removal rate increased and surface roughness improved. The fabricated microshaft in $H_2 SO_4$ electrolyte maintained sharper end edge and better surface finish than those fabricated by other electrolytes.

• 한국정밀공학회지
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• 제3권3호
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• pp.13-21
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• 1986

Turning property of metal is affected by the cutting condition, tool geome- try and cutting material. But the turning property of welded material is not welknown. Welded structures usually contain nonhomogeneity, defects and resi- dual stresses due to differential contraction between welded metal and base metal. In this paper, authors conducted the experimental test on the turning property, by changing turning condition and welding electrodes of the welded specimens. The results obtained in these experimental tests are as follows; (1) Within the limit of this experimental test, the cutting force of the weld zone is bigger than that of base metal, and this phenomena is caused by the different mechanical property of the weld zone. The range of the variation of cutting force in the weld zone is caused by the nonhomogeneity of the weld zone, respectively. (2) The surface roughness follows the general characteristic of the effect of cutting condition on the surface roughness and the surface roughness of the weld zone shows coarse surface comparing with that of the base metal. (3) The specimen welded by the electrode E4301, shows worse cutting property than that of E4361 and E4313.

• 한국기계가공학회지
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• 제16권3호
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• pp.38-44
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• 2017

The technology of electrical discharge tap machining may be appropriate for making thread out of highly brittle material. Especially, it is very difficult to machine tap with the traditional method if the brittle material has been hardened by quenching. In this study, the shape of electrical discharge blind hole tap machining was analyzed by discharge time, discharge current, and the flushing hole condition after quenched the tool steel of STD11 has discharged the tap shape with a screw-shaped copper(Cu) electrode. An experimental design was planned and analyzed by Taguchi robust experimental design. The result showed that the shape of the blind hole discharge tap was influenced by the flushing hole, discharge time, and discharge current. The most important factor of the processing conditions was found to be the discharge current. When blind hole EDM with a copper electrode with a flushing hole was conducted, the discharged shape was found to be smooth and the angle of the discharged tapped thread was also found to be close to the thread angle of $60^{\circ}$. As the values of discharge time and discharge current increased, the EDMed surface coarsened due to the increase of the single discharge energy and the shape of the thread collapsing.