• Journal of Mechanical Science and Technology
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• v.20 no.1
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• pp.76-84
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• 2006

Arrayed ultrasonic sensors based on the piezoelectric thin film (lead-zirconate-titanate: Pb($Zr_{0.52}Ti_{0.48})O_{3}$) having composite membrane structure are fabricated. Different thermal and elastic characteristics of each layer generate the residual stress during the high temperature deposition processes, accomplished diaphragm is consequently bowing. We present the membrane deflection effects originated from the residual stress on the resonant frequencies of the sensor chips. The resonant frequencies ($f_r$) measured of each sensor structures are located in the range of $87.6{\sim}111\;kHz$, these are larger $30{\sim}40\;kHz$ than the resultant frequencies of FEM. The primary factors of $f_r$ deviations from the ideal FEM results are the membrane deflections, and the influence of stiffness variations are not so large on that. Membrane deflections have the effect of total thickness increase which sensitively change the $f_r$ to the positive direction. Stress generations of the membrane are also numerically predicted for considering the effect of stiffness variations on the $f_r$.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.28 no.2
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• pp.92-98
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• 2015

The magnetoelectric characteristics on layered Ni-PZT-Ni, Co, Fe composites by epoxy bonding for magnetic field sensor were investigated in the low-frequency range. The ME coefficient of Ni-PZT-Ni, Ni-PZT-Co and Ni-PZT-Fe composites reaches a maximum of $200mV/cm{\cdot}Oe$ at $H_{dc}=110$ Oe, $106mV/cm{\cdot}Oe$ at $H_{dc}=90$ Oe and $87mV/cm{\cdot}Oe$ at $H_{dc}=160$ Oe, respectively. A trend of ME charateristics on Ni-PZT-Co, Ni-PZT-Fe composites was similar to that of Ni-PZT-Ni composites. The ME output voltage shows linearly proportional to ac field $H_{ac}$ and is about 0~150 mV at $H_{ac}$=0~7 Oe and f=110 Hz in the typical Ni-PZT-Ni sample. The frequency shift effect due to the load resistance $R_L$ shows that the frequency range for magnetic field sensor application can be modulated with appropriate load resistance $R_L$. This sample will allow for a low-magnetic ac field sensor in the low-frequency (near f=110 Hz).

• Journal of the Korea Academia-Industrial cooperation Society
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• v.20 no.6
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• pp.604-609
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• 2019

In this study, we fabricated a capacitive humidity sensor with interdigitated (IDT) electrodes using a thermosetting polyimide as a humidifying material. First, the number of electrodes, thickness, and spacing of the polyimide film were optimized, and a mask was designed and fabricated. The sensor was fabricated on a silicon substrate using semiconductor processing equipment. The area of the sensor was $1.56{\times}1.66mm^2$, and the width of the electrode and the gap between the electrodes were each $3{\mu}m$. The number of electrodes was 166, and the length of an electrode was 1.294 mm for the sensitivity of the sensor. The sensor was then packaged on a PCB for measurement. The sensor was inserted into a chamber environment with a temperature of $25^{\circ}C$ and connected to an LCR meter to measure the change in capacitance at relative humidity (RH) of 20% to 90%, 1 V, and 20 kHz. The results showed a sensitivity of 26fF/%RH, linearity of < ${\pm}2%RH$, and hysteresis of < ${\pm}2.5%RH$.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2022.10a
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• pp.466-468
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• 2022

3D reconstruction is important issue in many applications such as Augmented Reality (AR), eXtended Reality (XR), and Metaverse. For 3D reconstruction, depth map can be acquired by stereo camera and time-of-flight (ToF) sensor. We used both sensors complementarily to improve the accuracy of 3D information of the data. First, we applied general multi-camera calibration technique which uses both color and depth information. Next, the depth map of the two sensors are fused by 3D registration and reprojection approach. The fused data is compared with the ground truth data which is reconstructed using RTC360 sensor. We used Geomagic Wrap to analysis the average RMSE of the two data. The proposed procedure was implemented and tested with real-world data.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.28 no.6
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• pp.384-389
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• 2015

In this paper, we fabricated ceramic body and sapphire wafer in order to develop a hydraulic pressure sensor with high sensitivity and high temperature stability. The sapphire wafer was adopted with a membrane of capacitance ceramic pressure sensor. The capacitance value of the sensor for the finite element analysis(FEM) showed a linear pressure characteristics. Membrane was processed with a diameter of 32.4 mm and a thickness of 1 mm by using alumina powders. Ceramic body was processed with a diameter 32.4 mm and a thickness 5 mm. The capacitance pressure sensor was made with high heat treatment of the ceramic body and the sapphire wafer. Initially capacitance of the pressure sensor was 50 pF and a capacitance of 110 pF was measured from 5 bar pressure. Output voltage of 5 V was appeared at 5 bar pressure.

• The Transactions of the Korean Institute of Electrical Engineers P
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• v.55 no.1
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• pp.26-30
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• 2006

For the purpose of developing capacitive humidity sensor having interdigital electrodes, interdigital electrode was modeled and simulated to obtain capacitance and sensitivity as a function of geometric parameters like the structural gap and thickness. For the development of ASIC, switched capacitor signal processing circuits for capacitive humidity sensor were designed and simulated by Cadence using $0.25{\mu}m$ CMOS process parameters. The signal processing circuits are composed of amplifier for voltage gain control, and clock generator for sensor driving and switch control. The characteristics of the fabricated sensors are; 1) sensitivity is 9fF/%R.H., 2) temperature coefficient of offset(TCO) is $0.4%R.H./^{\circ}C$, 3) nonlinearity is 1.2%FS, 4) hysteresis is 1.5%FS in humidity range of $3%R.H.{\sim}98%R.H.$. The response time is 50 seconds in adsorption and 70 seconds in desorption. Fabricated process used in this capacitive humidity sensor having interdigital electrode are just as similar as conventional IC process technology. Therefore this can be easily mass produced with low cost, simple circuit and utilized in many applications for both industrial and environmental measurement and control system, such as monitoring system of environment, automobile, displayer, IC process room, and laboratory etc.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.50 no.3
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• pp.144-148
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• 2001

For the purpose of developing capacitive humidity sensor having interdigit electrodes, interdigit electrode was modeled and simulated to obtain capacitance and sensitivity as a function of geometric parameters like the structural gap and thichness. For the development of ASIC, switched capacitor signal conditioning circuits for capacitive humidity sensor were designed and simulated by cadence using 0.25um CMOS process parameters. The signal conditioning circuits are composed of amplifier for voltage gain control, and clock generator for sensor driving and switch control The characteristics of the fabricated sensors are; 1) sensitivity is 9fF/%R.H., 2) temperature coefficient of offset(TCO) is 0.4%R.H./$^{\circ}C$, 3) nonlinearity is 1.2%FS, 4) hysteresis is 1.5%FS in humidity range of 3%R.H. ${\sim}$ 98%R.H.. The response time is 50 seconds in adsorption and 70 seconds in desorption. Fabricated process used in this capacitive humidity sensor having interdigit electrode are just as similar as conventional IC process technology. Therefore this can be easily mass produced with low cost, simple circuit and utilized in many applications for both industrial and environmental measurement and control system, such as monitoring system of environment, automobile, displayer, IC process room, and laboratory etc..

• Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference
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• 2006.05a
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• pp.74-77
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• 2006

A scanned Fabry-Perot(F-P) filter and a Multi-Channel Wavelength Locker(MCWL) were used to interrogate fiber Bragg grating sensor array. When the F-P filter scans over the MCWL which works as a multi-reference the temporal peaks profiles correspond to the locking wavelengths. To solve the linearity, stability, and accuracy problems caused by the nonlinear response of F-P filter, a polynomial fitting algerian was used to calculate the relationship between the peak locations and the wavelengths in all the scanning range. Then from the reflected peaks locations and the best fitting line, the Bragg wavelengths can be obtained. The measurement linearity was greatly enhanced with wavelength resolution of about 4 pm in 10Hz scanning frequency.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2014.05a
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• pp.391-394
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• 2014

In this paper, we introduce a method of determining the absolute position of the rotor for the vector control of Hall sensor type multi-pole BLDC motor using the DSP(TMS320F28335), and implement an algorithm to complement the problems of the conventional method. The switching method of the inverter for providing desired sinusoidal current to each phase of a motor, we adopt Space-Vector pulse width modulation method. In order to increase the speed range, Field-Weakness control method are used. In order to verify the proposed algorithm, we compare the value of Iqe, Ide and phase currents with the values before compensated.

• The Journal of Korea Institute of Information, Electronics, and Communication Technology
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• v.14 no.4
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• pp.338-347
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• 2021

In this paper, the beta-ray sensor circuit used in the true random number generator was designed using DB HiTek's 0.18㎛ CMOS process. The CSA circuit proposed a circuit having a function of selecting a PMOS feedback resistor and an NMOS feedback resistor, and a function of selecting a feedback capacitor of 50fF and 100fF. And for the pulse shaper circuit, a CR-RC2 pulse shaper circuit using a non-inverting amplifier was used. Since the OPAMP circuit used in this paper uses single power instead of dual power, we proposed a circuit in which the resistor of the CR circuit and one node of the capacitor of the RC circuit are connected to VCOM instead of GND. And since the output signal of the pulse shaper does not increase monotonically, even if the output signal of the comparator circuit generates multiple consecutive pulses, the monostable multivibrator circuit is used to prevent signal distortion. In addition, the CSA input terminal, VIN, and the beta-ray sensor output terminal are placed on the top and bottom of the silicon chip to reduce capacitive coupling noise between PCB traces.