• 제목/요약/키워드: Time-strip

검색결과 362건 처리시간 0.033초

PLVA 방법을 활용한 PR Stripper의 성능 향상과 HDI-PR 표면의 내력 변화 연구 (Improvement of PR Stripper Efficient and Change of Surface Hardness for HDI-PR Used by PLVA Method)

  • 김수인;이창우
    • 한국진공학회지
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    • 제17권6호
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    • pp.544-548
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    • 2008
  • 반도체 공정에서 가장 많은 시간과 비용을 차지하는 공정 중 하나는 Photoresist strip 공정이다. 따라서 보다 빠르게 PR의 strip 공정을 단축하기 위한 연구가 계속 진행중에 있다. 하지만 기존 사용중인 strip용액을 대체하기 위한 물질을 찾는 것은 많은 비용을 수반한다. 본 연구에서는 PR의 strip 시간을 최대한 단축시키고 PR strip 잔여물의 빠른 제거를 위하여 기존 공정에서 사용 중인 strip 약액을 플라즈마에 의하여 활성화하는 방법(Plasma Liquid-Vapor Activation: PLVA)으로 PR strip 시간을 최대한 줄이는 방법에 대한 연구를 진행하였으며, 활성화된 strip용액이 더욱 빠른 strip율 성능을 나타내는 것을 확인하였다. 또한 PR strip에서 이온에 의한 영향을 받은 HDI-PR (high dose implanted photoresist)은 기존 strip용액으로 제거가 불가능하였다. 하지만 본 연구에서 제시한 PLVA 방법으로 활성화된 용액에서는 그 가능성을 확인하였고, 이러한 PLVA방법에 대한 물리적 연구를 위하여 HDI-PR 표면 내력의 변화를 측정하였다. 그 결과 PLVA 처리 전 후 HDI-PR의 표면 내력에 큰 변화를 확인하였다.

고층건물 콘크리트 슬래브에서 분리대의 효과 (Effect of Separation Strip on the Concrete Slabs in High Rise Building)

  • 김한수;조석희
    • 한국전산구조공학회:학술대회논문집
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    • 한국전산구조공학회 2000년도 봄 학술발표회논문집
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    • pp.238-245
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    • 2000
  • Separation strips are temporary joints to prevent crack due to stress induced by shrinkage. In this study, an analysis procedure considering separation strip is proposed to decide proper casting time of separation strip and cracking stresses of the example building slabs are calculated using this procedure. The result of the example high rise building shows that the percentage of cracking stress to the modulus of fracture is 43.4% when closing of separation strip are 30 days after placing the slab, so it is enough time for the separation strip in each floor to absorb the effects of shrinkage.

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압연되는 스트립의 접촉 및 가공 응력에 대한 유한 요소 해석 (Finite Element Analysis on Contact and Work Stress of Rolled Strip)

  • 조재웅;한문식
    • 한국공작기계학회논문집
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    • 제17권2호
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    • pp.23-29
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    • 2008
  • This study analyzes the rolled circular rod strip with radius of loom and length of 350cm by using finite element analysis. The material strength and its durability of the rolled strip can be predicted through this study. As the penetration tolerance by contact decreases, the contact rigidity of strip increases. As the contact rigidity becomes the highest at the elapsed time of 1.2 second, the contact stress becomes the lowest. On the contrary, von-Mises stress becomes highest at this time. The total deformation on strip increases from the upper part of strip at the position near to rotating roll to the lower part of strip at the position near to fixing roll.

열간 압연공정의 선단부 통판성 안정화 제어 (Mass-flow Stabilization Control of a Strip Head Part in Hot Rolling Process)

  • 황이철;박철재;백운보
    • 제어로봇시스템학회논문지
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    • 제15권3호
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    • pp.330-336
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    • 2009
  • This paper studies on the new control algorithm for the mass-flow stabilization in strip head part of a hot strip mill. A new strip tension model in the strip head part is derived using the current deviation of two neighboring stands. The current deviation means a difference between a measured current and a lock-on current, where the lock-on current is set up when a strip tension or a looper angle reaches each target value or time is about 0.4sec, respectively. On the basis of the tension calculation model, a mill velocity of a backward stand is controlled to stabilize a strip mass-flow by PI control algorithm. Therefore, the mass-flow control for strip head part is executed from a metal-in time into a foreward stand till the looper works normally. It is known by the results of a computer simulation and an experiment that the proposed control algorithm is very effective in stabilizing the mass flow of the strip head part.

역최적제어(ILQ)를 이용한 열간압연시스템의 루퍼 장력제어기 설계 및 견실성 연구 (A Study on the Design of a Looper Strip Controller and its Robustness for Hot Strip Mills Using ILQ Control)

  • 황이철;김성배
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2001년도 춘계학술대회논문집B
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    • pp.93-98
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    • 2001
  • This paper studies on the design of an ILQ(Inverse Linear Quadratic optimal control) looper control system for hot strip mills. The looper which is placed between each stand plays an important role in controlling strip width by regulating strip tension variation generated from the velocity difference of main work rolls. The mathematical model for looper is firstly obtained by Taylor's linearization of nonlinear differential equations, where it is given as a linear and time invariant state-space equation. Secondly, a looper servo controller is designed by ILQ control algorithm, which is an inverse problem of LQ(Linear Quadratic optimal control) control. By tunning control gain arbitration parameters and time constants, it is shown that the ILQ looper servo controller has the performance that makes well to follow desired trajectories of both strip tension and looper angle.

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압연 공정에서 꼬임 발생 메커니즘에 대한 기초 연구 (Fundamental Study on Mechanism of Strip Pinching in Rolling)

  • 이창우;신기현;홍완기;정동택
    • 한국정밀공학회지
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    • 제21권12호
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    • pp.127-132
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    • 2004
  • It is very important to find out causes of strip pinching for the high quality of products and fer the stable operation of rolling system. We have examined the strip pinching from three points of view to find out the causes of strip pinching in rolling system: strip shape, rolling operation conditions, and behavior of strip. Wedge, off center, and difference of rolling force through CMD(Cross machine direction) are found to possibly provide major initial causes of strip pinching. Generally strip pinching occurred in the tail of strip. Thus, computer simulations by using a FEM code were also carried out to find out the initial mechanism of strip pinching depending upon the force and geometric boundary conditions at the time of strip tail rolling. The strong compression force effect due to the sudden release of strip tail from the work roll and non-uniform strip tail shape (ex. Fish tail) across the CMD were found to provide possible major causes of strip pinching.

권취기에서의 단차 회피 제어 감시 시스템 (Development of the QOC Monitoring System in Downcoiler)

  • 최용준;황원호;이영진;이민철
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2003년도 춘계학술대회 논문집
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    • pp.955-958
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    • 2003
  • Strip top mark is one of the major problem areas in hot strip coiling operation. The key for good coiling is having a precise detection instrument of strip head end and an understanding of QOC(quick open control) control algorithm and mechanism. Therefore, this study aims at developing QOC monitoring system that is useful for avoiding strip top mark at coiling process. In this study, strip movement between mandrel and unit roll(wrapper roll) was thoroughly studied using high speed camera. The monitoring system was developed to calculate QOC open time and to estimate optimal open time values for good coiling operation. Its performance has been proven by extensive field tests on downcoiler of #2 Hot Strip Mill Line in Pohang Works.

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실시간 분산 열연 두께제어 시스템의 설계 및 현장적용 (A Real-time Distributed AGC System for a Hot Strip Mill)

  • 이호훈
    • 대한기계학회논문집A
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    • 제23권6호
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    • pp.922-930
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    • 1999
  • This paper describes a new 14-CPU real-time distributed automatic gauge control (AGC) system for POSCO's No. 2 Hot Strip Mill at Pohang Works. The new AGC system has adopted gaugemeter AGC, Monitor AGC, and roll gap disturbance compensators. The computer system for the new AGC system has been developed based on VMEbus computer systems and a commercial real-time operating system. A VMEbus computer system is also used for the position servo control of hydraulic cylinders. All the application programs and input/output signals have been reasonably distributed over the control computer systems for the maximum reliability and effectiveness of the system. The new AGC system has been successfully used for the No. 2 Hot Strip Mill.

백운산 지역에서 벌채지내 운재로의 회복에 관한 연구 (A Study on the Restoration on the Strip Roads Mt. Baekun Area)

  • 박재현
    • 한국환경복원기술학회지
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    • 제10권2호
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    • pp.34-43
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    • 2007
  • To investigate the restoration procedure on soil physical properties and vegetation at the surface of strip road affected by timber harvesting operation. This study was carried out at strip roads constructed between 1989 and 1994 in Mt. Baekun, Kwangyang, Chollanam-Do. Soil hardness of the surface layer was improved with change of time after strip road construction, but that of 7.6~15 cm depth from the surface was not improved. According to linear regression analysis, it was estimated 16.6 years in 0~7.5 cm and 16.9 years in 7.6~15 cm soil depth to be restored to natural forest lands. The amount of surface soil erosion was 0.045$m^3$/km/yr on strip roads constructed in 1989 and 1990, and road constructed in 1994 showed the highest value (4.5$m^3$/km/yr). Vegetation coverage rates of road surface were 96.7% in strip roads constructed in 1990. Those of cutslope and fillslope were highest in roads constructed in 1990. The results indicated that strip roads were restored with change of time after road construction.

사상 압연 공정에서 꼬임 발생 메커니즘에 대한 기초 연구 (Fundamental Study on Pinching Mechanism in Hot Strip Mill)

  • 신기현;권순오;이창우;안영세;정동택;홍완기
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2003년도 춘계학술대회 논문집
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    • pp.1091-1096
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    • 2003
  • It is very important to find out causes of strip pinching for the high quality of products and for the stable operation of hot roiling system. We have examined the strip pinching from three points of view to find out the causes of strip pinching in hot rolling system: strip shape, rolling operation conditions, and behavior of strip. Wedge, off center, and difference of rolling force through CMD are found to possibly provide major initial causes of strip pinching. Generally strip pinching occurred in the tail of strip. Thus, computer simulations by using a FEM code were also carried out to find out the initial mechanism of strip pinching depending upon the force and geometric boundary conditions at the time of strip tail rolling. The strong compression force effect due to the sudden release of strip tail from the work roll and non-uniform strip tail shape (ex. Tongue tail) across the CMD were found to provide possible major causes of strip pinching.

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