• Journal of the Semiconductor & Display Technology
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• v.22 no.4
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• pp.131-135
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• 2023

Neural network-based time series models called time series neural networks (TSNNs) are trained by the error backpropagation algorithm and used to predict process shifts of parameters such as gas flow, RF power, and chamber pressure in reactive ion etching (RIE). The training data consists of process conditions, as well as principal components (PCs) of optical emission spectroscopy (OES) data collected in-situ. Data are generated during the etching of benzocyclobutene (BCB) in a SF₆/O₂ plasma. Combinations of baseline and faulty responses for each process parameter are simulated, and a moving average of TSNN predictions successfully identifies process shifts in the recipe parameters for various degrees of faults.

• Journal of Hydrogen and New Energy
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• v.23 no.2
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• pp.173-182
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• 2012

Effects of temperature, pressure, and gas residence time on methane combustion characteristics of mass produced oxygen carrier particle (OCN706-1100) were investigated in a pressurized fluidized bed reactor using methane and air as reactants for reduction and oxidation, respectively. The oxygen carrier showed high fuel conversion, high $CO_2$ selectivity, and low CO concentration at reduction condition and very low NO emission at oxidation condition. Moreover OCN706-1100 particle showed good regeneration ability during successive reduction-oxidation cyclic tests up to the 10th cycle. Fuel conversion and $CO_2$ selectivity decreased and CO emission increased as temperature increased. These results can be explained by trend of calculated equilibrium CO concentration. However, $CO_2$ selectivity increased as pressure increased and fuel conversion increased as gas residence time increased.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.06a
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• pp.521-522
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• 2006

In this paper, hybrid air-water discharges were used to develop an optimal condition for providing a high level of water decomposition for hydrogen yield. Electrical and optical phenomena accompanying the discharges were investigated along with feeding gases, flow rates, and point-to-plane electrode gap distance. The primary focus of this experiment was put on the optical emission of the near UV range, with the energy threshold sufficient for water dissociation and excitation. The $OH(A^{2+},'=0\;X^2,"=0$) band's optical emission intensity indicated the presence of plasma chemical reactions involving hydrogen formation. In the gaseous atmosphere saturated with water vapor the OH(A-X) band intensity was relatively high compared to the liquid and transient phases although the optical emission strongly depended on the flow rate and type of feeding gas. In the gaseous phase discharge phenomenon for Ar carrier gas transformed into a gliding arc via the flow rate growth. OH(A-X) band's intensity increased according to the flow rate or residence time of He feeding gas. Reciprocal tendency was acquired for $N_2$ and Ar carrier gases. The peak value of OH(A-X) intensity was observed in the proximity of the water surface, however in the cases of Ar and $N_2$ with 0.5 SLM flow rate peaks shifted to the region below the water surface. Rotational temperature ($T_{rot}$) was estimated to be in the range of 900-3600 K, according to the carrier gas and flow rate, which corresponds to the arc-like-streamer discharge.

• International Journal of Automotive Technology
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• v.8 no.6
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• pp.697-704
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• 2007

Recently, a variable valve timing system has been widely adopted in internal combustion engine in order to improve the fuel economy and torque at low engine speed. In addition, it is known that varying valve timing according to the various engine operations could reduce exhaust gas, especially NOx, because of residual gas by valve overlap. In this study, to improve the low exhaust gas and fuel economy at part load condition, the residual gas and back flow of exhaust gas due to valve overlap were calculated computationally. Moreover, the characteristics of engine performances and NOx formations were investigated with the experiment of combination of intake and exhaust valve timing condition. Under these various valve operating conditions, the effects of both the positive valve overlap and negative valve overlap(valve underlap) were examined simultaneously. Finally, the characteristics of cyclic THC emission were analyzed by using Fast Response FID(FR-FID) in the cylinder, intake port and exhaust port positions. Besides, the effect of the different gradients of the valve timing change on engine performance was investigated and an optimum control strategy was suggested.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.52 no.10
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• pp.476-480
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• 2003

In this paper, we have performed 3-dimensional time-resolving measurement of the Ne light emitted from the cell of plasma display panel(PDP) as a function of the pressure using the scanned point detecting system. From the temporal behavior results, we could analyze the discharge behavior of panel with Ne-Xe(4%) mixing gas and 300 torr, 400 torr and 500 torr pressure. At the top view of panel, the discharge of 300 torr panel starts at the 634 ns and ends at the 722 ns. The emission duration time is about 90 ns. The discharge of 400 torr panel starts at the 682 ns and ends at the 786 ns. the emission duration time is about 100 ns. Also, the discharge of 500 torr panel starts at the 770 ns and ends at the 826 ns. the emission duration time is about 56 ns. The discharge moves from inner edge of cathode electrode to outer cathode electrode forming arc type. In the side view of 300 torr, 400 torr and 500 torr an emission shows that the light is detected up to 180${\mu}{\textrm}{m}$, 150${\mu}{\textrm}{m}$ and 70${\mu}{\textrm}{m}$ height of barrier rib and the emission distribution of the 300 torr is wider than 400 torr, 500 torr.

• Proceedings of the Korean Institute of Intelligent Systems Conference
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• 1998.06a
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• pp.83-86
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• 1998

In this paper, a fuzzy model based on the Polynomial Neural Network(PNN) structure is proposed to estimate the emission pattern for air pollutant in power plants. the new algorithm uses PNN algorithm based on Group Mehtod of Data Handling (GMDH) algorithm and fuzzy reasoning in order to identify the premise structure and parameter of fuzzy implications rules, and the least square method in order to identify the optimal consequence parameters. Both time series data for the gas furnace and data for the NOx emission process of gas turbine power plants are used for the purpose of evaluating the performance of the fuzzy model. The simulation results show that the proposed technique can produce the optimal fuzzy model with higher accuracy and feasibility than other works achieved previously.

• Journal of Urban Science
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• v.9 no.1
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• pp.69-73
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• 2020

Sudokwon landfill("Sudokwon" means regions of Seoul, Kyunggi and Incheon metropolitan cities in Korea), the world's largest sanitary landfill, has been systematically managing statistics on the incoming and dumping wastes and satisfactorily controlling pollutants including leachate and LFG. According to our long time experience of LFG field monitoring, the emission of GHG from landfill estimated by the IPCC Guideline showed much difference with our results. C&D waste has high concentration of sulfate compared to other wastes. Increased C&D waste of dumping waste had changed the COD/sulfate ratio in the landfill, which caused the increase of H₂S gas and the decrease of CH₄ gas. But the IPCC estimation method does not consider the effects of sulfate. In addition to that, the oxidation factor of the cover soil is set to the default values of 0.1 but the measured values by the field monitoring, are showing much higher than that, especially in the closed landfill.

• KIPS Transactions on Computer and Communication Systems
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• v.2 no.1
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• pp.35-42
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• 2013

This paper shows the positivistic approach for analyzing the effect of ICT on the reduction of greenhouse gas (GHG) emission. The real-time navigation was selected for the ICT based service in this research, and the CO2 reduction ratios of the optimized routes in the navigation were compared with the reduction ratios of the shortest routes in existing navigations. The results of experiments showed the driving based on the optimized routes has more reduction effects than the driving on the basis of the shortest routes. Also, new evaluation method for GHG emission was suggested by the quantification and monitoring approaches on the basis of the Clean Development Mechanism (CDM) in this paper. The results of this paper can be used as a preliminary research for the effect of ICT on the reduction of GHG emission. The evaluation method which suggested in this paper will be suggested to CDM as the new standard for the reduction of GHG emission in the transportation field as well.

• Journal of the Korean Institute of Gas
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• v.26 no.6
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• pp.37-44
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• 2022

In this study, two low-swirl nozzles with the same SN (Swirl Number) but different mass ratio (m) of the core part and the swirler part were designed to perform an atmospheric pressure combustion test. For each nozzle, a combustion test was conducted according to the adiabatic flame temperature, and the flame structure, emissions, and combustion instability mode were identified. Although the flame structure was significantly different, the CO emission was similar, and the NOx emission was also more related to combustion dynamics than the flame structure. Combustion dynamics and NOx emission were identified while adjusting the convection delay time by changing the position of the fuel injection nozzle. It was confirmed that when the convection delay time is in the region of (3+4n)/4T±1/4T (n=0,1,2,...), the combustion instability is strong, and in the opposite case, the combustion instability is very weak.

• Journal of Environmental Science International
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• v.11 no.6
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• pp.543-551
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• 2002

A Numerical simulation on the thermal flow performance was carried out to propose the incinerator type for the domestic refuses and to investigate the design factor and operating conditions. The SSTI(Standard Stoker Type Incinerator) proposed in this study was modified from the type with central f)ow. It has the characteristics of good mixing between refuse and hot combustion gas in primary combustion chamber and between unburned gas inflowing and secondary air jet in secondary chamber. By predictive results, the SSTI was no recirculation zone in secondary chamber so that mixing time was increased with high residence time. It has good characteristics of combustion and low emission. Parametric screening studies have been understood with phenomenon of combustion in incinerator.