• 제목/요약/키워드: TiO$_2$-SiO$_2$

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Ti3O5/SiO2 다층박막를 이용한 협대역 칼라투과필터 제작 및 특성연구 (The Fabrication and Characteristic for Narrow-band Pass Color-filter Deposited by Ti3O5/SiO2 Multilayer)

  • 박문찬;고견채;이화자
    • 한국안광학회지
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    • 제16권4호
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    • pp.357-362
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    • 2011
  • 목적: $Ti_3O_5$$SiO_2$를 이용하여 중심파장이 500 nm에서 반치폭이 약 12 nm이고 투과율이 99%인 협대역 칼라투과필터를 제작하고, 이 칼라필터의 박막 특성을 연구하고자 한다. 방법: 두께 800 nm인 $Ti_3O_5$박막과 $SiO_2$박막의 투과율로부터 박막의 광학상수 n(굴절률)과 k(소멸계수)를 구하였고, Essential Macleod program을 이용하여 중심파장이 500 nm에서 반치폭이 약 12 nm이고 투과율이 99%인 협대역 칼라투과필터의 필터층과 AR 코팅층을 설계하였다. 또 한 electron beam evaporation 장치를 이용하여 $Ti_3O_5/SiO_2$ 다층막 칼라필터을 만든 후, 분광광도계를 이용하여 투과율을 측정하였고, SEM 사진에 의한 칼라필터의 단면으로부터 칼라필터의 박막두께와 층수를 알 수 있었고, XPS분석으로부터 박막 성분을 분석하였다. 결과: 칼라필터의 AR 코팅층의 최적조건은 6층으로 [air$|SiO_2(90)|Ti_3O_5(36)|SiO_2(5)|Ti_3O_5(73)|SiO_2(30)|Ti_3O_5(15)|$ glass]이며, 반치폭이 12 nm인 칼라필터의 필터층의 최적조건은 41층으로 [air$|SiO_2(20)|Ti_3O_5(64)|SiO_2(102)|Ti_3O_5(66)|SiO_2(112)|Ti_3O_5(74)|SiO_2(120)|Ti_3O_5(68)|SiO_2(123)|Ti_3O_5(80)|SiO_2(109)|Ti_3O_5(70)|SiO_2(105)|Ti_3O_5(62)|SiO_2(99)|Ti_3O_5(63)|SiO_2(98)|Ti_3O_5(51)|SiO_2(60)|Ti_3O_5(42)|SiO_2(113)|Ti_3O_5(88)|SiO_2(116)|Ti_3O_5(68)|SiO_2(89)|Ti_3O_5(49)|SiO_2(77)|Ti_3O_5(48)|SiO_2(84)|Ti_3O_5(51)|SiO_2(85)|Ti_3O_5(48)|SiO_2(59)|Ti_3O_5(34)|SiO_2(71)|Ti_3O_5(44)|SiO_2(65)|Ti_3O_5(45)|SiO_2(81)|Ti_3O_5(52)|SiO_2(88)|$ glass] 이었다. 위의 데이터를 이용하여 제작한 칼라필터는 SEM 사진에 의해 41층으로 확인되었으며, XPS 분석에 의해 $SiO_2$층이 맨 위층이며 $Ti_3O_5$층과 교번인 다층막으로 형성돼 있으며, $Ti_3O_5$박막 형성 시 TiO2 박막과 $Ti_3O_5$박막이 섞여 형성됨을 알 수 있었다. 결론: 41층의 $Ti_3O_5/SiO_2$ 다층박막을 이용하여 12 nm 반치폭을 갖으며 500 nm 중심파장에서 투과율은 99%인 협대역 칼라투과필터를 제작하였으며, 이 칼라필터는 $Ti_3O_5$박막 형성 시 TiO2 박막과 $Ti_3O_5$박막이 섞여 형성됨을 알 수 있었다.

Self-cleaning Properties of TiO2-SiO2-In2O3 Nanocomposite Thin Film

  • Eshaghi, Akbar;Eshaghi, Ameneh
    • Bulletin of the Korean Chemical Society
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    • 제32권11호
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    • pp.3991-3995
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    • 2011
  • $TiO_2-SiO_2-In_2O_3$ nanocomposite thin film was deposited on the glass substrates using a dip coating technique. The morphology, surface composition, surface hydroxyl groups, photocatalytic activity and hydrophilic properties of the thin film were investigated by AFM, XPS, methyl orange decoloring rate and water contact angle measurements. The hydroxyl content for $TiO_2$, $TiO_2-SiO_2$ and $TiO_2-SiO_2-In_2O_3$ nanocomposite films was calculated to be 11.6, 17.1 and 20.7%, respectively. $TiO_2-SiO_2-In_2O_3$ film turned superhydrophilic after 180-min irradiation with respect to pure $TiO_2$ and $TiO_2-SiO_2$ thin films. The photocatalytic decomposition of methyl orange for $TiO_2$, $TiO_2-SiO_2$ and $TiO_2-SiO_2-In_2O_3$ thin films was measured as 38.19, 58.71 and 68.02%, respectively. The results indicated that $SiO_2$ and $In_2O_3$ had a significant effect on the hydrophilic, photocatalytic and self-cleaning properties of $TiO_2$ thin film.

썬글라스용 반미러(Half-Mirror) 코팅의 분석과 설계 (Analysis and Design of half-mirror coating for sunglasses)

  • 박문찬;정부영;횡보창권
    • 한국안광학회지
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    • 제8권2호
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    • pp.111-117
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    • 2003
  • 국내외 썬글라스 반미러 코팅렌즈의 광학적 특성을 파악하기 위해, 분광광도계를 이용하여 반미러 코팅렌즈의 반사율을 측정하였으며, Macleod 프로그램을 이용해 계산한 결과와 비교 분석하였다. 또한 황금 색깔이 나는 TiN을 이용한 반미러 코팅렌즈를 설계하였고, 광학특성을 조사하였다. 반미러 코팅렌즈의 분석결과, 은색 투톤(two tone) 반미러 코팅은 금속 크롬(Cr)을 사용하였으며 경도를 증가시키기 위하여 크롬위에 $SiO_2$(또는 $Al_2O_3$)를 증착하여 사용하였다. 크롬 위에 증착되는 $SiO_2$의 두께는 10nm 정도가 적정한 것으로 판단된다. 칼라 반미러 코팅의 경우 디자인 결과는 각각 다음과 같다 ; blue 계열은 [air|$SiO_2$(66.3)|$TiO_2$(129.0)|$SiO_2$(62.9)|$SiO_2$(26.0)|$TiO_2$(120.3)|$SiO_2$(9.1)|glass]이며, gold 계열은 [air|$SiO_2$(60.6)|$TiO_2$(86.2)|$SiO_2$(13.5)|$TiO_2$(86.8)|$SiO_2$(214.38)|glass]이며, green 계열은 [air|$SiO_2$(74.3)|$TiO_2$(75.8)|$SiO_2$(44.3)|$TiO_2$(11.6)|$SiO_2$(160.8)|$TiO_2$(12.9)|$SiO_2$(183.3)|$TiO_2$(143.8)|glass]이며, silver 계열은 [air|$SiO_2$(21.2)|$TiO_2$(49.7)|$SiO_2$(149.3)|glass]이다. white 반미러 코팅인 경우는 [air|$SiO_2$(17nm)|$TiO_2$(43nm)(또는 $ZrO_2$)|$SiO_2$(87nm) polysiloxane($4.46{\mu}m$)|glass or CR-39]이며, 가시광선 영역(400~700 nm)에서 평균 19%의 반사율을 가지며 흡수가 적기 때문에 약 80%의 투과율을 보이는 white 타입의 반미러가 되게 된다. 황금빛 색깔을 띠는 반미러 코팅렌즈의 설계에 있어서 [air|$SiO_2$(170nm)|TiN(15nm)|glass]가 되면 CIE 좌표값은 거의 [air|Au(150nm)|glass]의 좌표값과 유사해지는 것을 볼 수 있었다.

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SiO2-TiO2계 복합 나노섬유의 제조 및 광활성 연구 (Fabrication and Photocatalytic Properties of SiO2-TiO2 Composite Nanofibers)

  • 현동호;임태호;이성욱
    • 공업화학
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    • 제19권5호
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    • pp.554-558
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    • 2008
  • 전구체로서 알콕사이드[Tetraethyl orthosilicate (TEOS), Titanium (IV) isopropoxide (TiP)]를 사용하여 졸-겔 방법으로 전기방사에 적합한 졸을 제조한 후, $(1-x)SiO_2-(x)TiO_2$계 복합 나노섬유를 제조하였다. 제조된 광활성 무기나노섬유의 표면 및 구조적 특성은 X-선회절분석(XRD), 주사전자현미경(SEM), 투과전자현미경(TEM), 열중량분석 및 미분주사칼로리미터분석 (TGA-DSC), 적외선분광분석((FT-IR)을 통하여 확인하였다. $(1-x)SiO_2-(x)TiO_2$계에서 $TiO_2$ 양이 증가하면 전기방사된 복합섬유직경은 증가하였으며, 저온에서 안정한 아나타제 $TiO_2$ 결정에서 루타일로의 상전이는 $1000^{\circ}C$에서의 열처리 후에도 고루 분산되어 있는 $SiO_2$로 인해 $0.6SiO_2-0.4TiO_2$계까지는 아나타제상으로 존재하였다. $SiO_2-TiO_2$계 복합체 나노섬유의 광활성은 메틸렌블루 광분해 실험 및 UV-vis/DRS 분석을 통해 자외선 영역에서 나타남을 확인하였다.

The Effect of SiO2 Shell on the Suppression of Photocatalytic Activity of TiO2 and ZnO Nanoparticles

  • Lee, Min Hee;Patil, Umakant Mahadev;Kochuveedu, Saji Thomas;Lee, Choon Soo;Kim, Dong Ha
    • Bulletin of the Korean Chemical Society
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    • 제33권11호
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    • pp.3767-3771
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    • 2012
  • In this study, we investigate the potential use of $TiO_2@SiO_2$ and $ZnO@SiO_2$ core/shell nanoparticles (NPs) as effective UV shielding agent. In the typical synthesis, $SiO_2$ was coated over different types of $TiO_2$ (anatase and rutile) and ZnO by sol-gel method. The synthesized $TiO_2@SiO_2$ and $ZnO@SiO_2$ NPs were characterized by UV-Vis, XRD, SEM and TEM. The UV-vis absorbance and transmittance spectra of core@shell NPs showed an efficient blocking effect in the UV region and more than 90% transmittance in the visible region. XRD and SAED studies confirmed the formation of amorphous $SiO_2$ coated over the $TiO_2$ and ZnO NPs. The FESEM and TEM images shows that coating of $SiO_2$ over the surface of anatase, rutile $TiO_2$ and ZnO NPs resulted in the increase in particle size by ~30 nm. In order to study the UV light shielding capability of the samples, photocatalytic degradation of methylene blue dye on $TiO_2@SiO_2$ and $ZnO@SiO_2$ NPs was performed. Photocatalytic activity for both types of $TiO_2$ NPs was partially suppressed. In comparison, the photocatalytic activity of ZnO almost vanished after the $SiO_2$ coating.

졸-겔법에 의한 SiO2-TiO2 박막의 초친수성 (Super Hydrophilic Properties of SiO2-TiO2 Thin Film Prepared by Sol-Gel Method)

  • 박민정;이경석;강종봉;문종수
    • 한국재료학회지
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    • 제17권3호
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    • pp.125-131
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    • 2007
  • [ $TiO_{2}-solution$ ] was aaded in $SiO_{2}-solution$ by various composition. $SiO_{2}-TiO_{2}$ thin films were obtained by the dip-coating method on the $SiO_{2}$ glass substrates, and then heat-treated at various temperature. Nano-size $TiO_{2}$ particles dispersed $SiO_{2}-TiO_{2}$ films showed absorption peak by quantum size effect at short wavelength region $350{\sim}400nm$, which made them good candidates for non-linear optical materials and photo-catalytic materials. The thickness of $SiO_{2}-TiO_{2}$ films were $300{\sim}430nm$. The contact angle of $SiO_{2}-TiO_{2}$ films for water was $5.3{\sim}47.9^{\circ}$, and therefore it is clear that $SiO_{2}-TiO_{2}$ films have super hydrophilic properties and the self-cleaning effects.

SHS법을 이용한 복합분말(Al2O3-SiC) 제조시 TiO2첨가의 영향 (The effect of the addition of TiO2 in the preparation of (Al2O3-SiC)- SiC composite powder by SHS Process)

  • 윤기석;양범석;이종현;원창환
    • 한국재료학회지
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    • 제12권1호
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    • pp.48-53
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    • 2002
  • $Al_2O_3-SiC$ and $Al_2O_3-SiC$-TiC composite powders were prepared by SHS process using $SiO_2,\;TiO_2$, Al and C as raw materials. Aluminum powder was used as reducing agent of $SiO_2,\;TiO_2$ and activated charcoal was used as carbon source. In the preparations of $Al_2O_3-SiC$, the effect of the molar ratio in raw materials, compaction pressure, preheating temperature and atmosphere were investigated. The most important variable affecting the synthesis of $Al_2O_3-SiC$ was the molar ratio of carbon. Unreactants remained in the product among all conditions without compaction. The optimum condition in this reaction was $SiO_2$: Al: C=3: 5: 5.5, 80MPa compaction pressure under Preheating of $400^{\circ}C$ with Ar atmosphere. However there remains cabon in the optimum condition. The effect of $TiO_2$ as additive was investigated in the preparations of $Al_2O_3-SiC$. As a result of $TiO_2$ addition, $Al_2O_3-SiC$-TiC composite powder was prepared. The $Al_2O_3$ powder showed an angular type with 8 to $15{\mu}m$, and the particle size of SiC powder were 5~$10{\mu}m$ and TiC powder were 2 to $5{\mu}m$.

솔젤법에 의해 제작된 $TiO_2$ 솔과 $SiO_2$ 솔의 점도 특성에 대한 분석 (Analyses on Viscosity Properties of $TiO_2$ Sol and $SiO_2$ Sol using Sol-Gel Method)

  • 유도현
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제54권12호
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    • pp.573-577
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    • 2005
  • [$TiO_2$] sol and $SiO_2$ sol were prepared using sol-gel method. As $H_{2}O$/Alkoxide ratios increased, sol had cluster structure and as $H_{2}O$/Alkoxide ratios decreased, sol had linear structure. Gelation time of $TiO_2$ sol was faster than that of $SiO_2$ sol according to the time. In comparison with initial viscosity between $TiO_2$ sol and $SiO_2$ sol, $TiO_2$ sol was highest at $H_{2}O/Ti(OC_{3}H_{7})_{4}=5$, $SiO_2$ sol was almost constant according to $H_{2}O/Si(OC_{2}H_{5})_{4}$ ratios.

열처리된 SiO$_{2}$/TiW 구조의 계면 특성 (The interfacial properties of th eanneled SiO$_{2}$/TiW structure)

  • 이재성;박형호;이정희;이용현
    • 전자공학회논문지A
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    • 제33A권3호
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    • pp.117-125
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    • 1996
  • The variation of the interfacial and the electrical properties of SiO$_{2}$TiW layers as a function of anneal temperature was extensively investigated. During the deposition of SiO$_{2}$ on TiW chemical bonds such as SiO$_{2}$, TiW, WO$_{3}$, WO$_{2}$ TiO$_{2}$ Ti$_{2}$O$_{5}$ has been created at the SiO$_{2}$/TiW interface. At the anneal temperature of 300$^{\circ}C$, WO$_{3}$ and TiO$_{2}$ bonds started to break due to the reduction phenomena of W and Ti and simultaneously the metallic W and Ti bonds started to create. Above 500$^{\circ}C$, a part of Si-O bonds was broken and consequently Ti/W silicide was formed. Form the current-voltage characteristics of Al/Sico$_{2}$(220$\AA$)/TiW antifuse structure, it was found that the breakdown voltage of antifuse device wzas decreased with increasing annealing temperature for SiO$_{2}$(220$\AA$)/TiW layer. When r, the insulating property of antifuse device of the deterioration of intermetallic SiO$_{2}$ film, caused by the influw of Ti and W.W.

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Crystalline Phases and Dielectric Properties of Crystallized Glasses in the System (Ca, Sr, Ba) O-Al2O3-B2O3-SiO2-TiO2

  • Tuzuku, Koichiro;Kishi, Hiroshi;Taruta, Seiichi;Takusagawa, Nobuo
    • The Korean Journal of Ceramics
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    • 제5권2호
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    • pp.189-194
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    • 1999
  • Crystallization of glasses in the system (Ca, Sr, Ba)$O-Al_2O_3-B_2O_3-SiO_2-TiO_2$ and dielectric properties of crystallized glasses were investigated. As increasing B2O3 content and decreasing SiO2 content in the glass, the major crystalline phase changed from $(Sr, Ba)_2TiSi_2O_8$ to (Ca, Sr, Ba)TiO3, the dielectric constant of crystallized glasses increased and the Temperature Coefficient of Capacitance (TCC) changed to negative. The dielectric constant and TCC was estimated for (Sr, Ba)2TiSi2O8 phase as 18 and -440 $ppm/^{\circ}C$, respectively and for (Ca, Sr, Ba)TiO3 phase as 307 and -1900 $ppm/^{\circ}C$, respectively. The dielectric properties of (Ca, Sr, Ba)TiO3 phase (in this study) were similar to those of (Ca, Ba) TiO_3 solid-solution^12)$, but $(Sr, Ba)_2TiSi_2O_8$ phase (in this study) and $Sr_2TiSi_2O_\;8^4$ showed the different properties.

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