• 한국진공학회지
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• 제7권2호
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• pp.141-149
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• 1998

$Si_3N_4$상에 PECVD법으로 W박막을 증착하였다. 기판온도와 소스가스의 유량비가 텅 스텐 박막에 미치는 영향을 조사하였다. $150^{\circ}C$~$250^{\circ}C$의 온도 범위 내에서 텅스텐 박막의 증착은 표면반응에 의하여 제한 되었으며, 기판온도와 $SiH_4/WF_6$ 유량비 변화에 따라 150~ 530$\AA$/min의 증착률과 스트레스에 영향을 주었고, 특히 과도한 Si3N4가스는 W박막의 구조, 화학적 결합, 스트레스등을 급격히 변화시켰다. TiN, Ti, Mo, NiCr, Al 등 여러 가지 부착층 상의 텅스텐 박막을 증착시킨 결과, Al이 가장 좋은 부착특성을 보였다.

• 공업화학
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• 제7권4호
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• pp.670-678
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• 1996

방사성 폐기물 소각로의 배기가스 중에 포함되어 있는 NOx를 제거하기 위하여 선택적 촉매 환원법에 활용되는 촉매들의 특성을 조사하였다. 촉매는 $V_2O_5$, $MoO_3$, 그리고 $SnO_2$를 하니컴 형태의 $TiO_2$ 담체에 담지시켜 제조하였으며 촉매의 종류, 반응온도, feed의 조성, $NH_3$/NO 몰비의 영향 등이 반응특성에 미치는 영향을 실험실 규모의 반응기에서 조사하였다. 10% $V_2O_5/TiO_2$ 촉매가 $350^{\circ}C$에서 94.4%의 높은 $NO{\rightarrow}N_2$ 전환율을 보였으며 열적 안정성이 좋은 $MoO_3$의 첨가는 높은 전환율을 보이는 온도범위를 확장시켜 주었다.

• Transactions on Electrical and Electronic Materials
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• 제11권2호
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• pp.54-60
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• 2010

Polymer-assisted deposition is a chemical solution route to high quality thin films. In this process, the polymer controls the viscosity and binds metal ions, resulting in a homogeneous distribution of metal precursors in the solution and the formation of crack-free and uniform films after thermal treatment. We review our recent effort to epitaxially grow metal-nitride thin films, such as hexagonal GaN, cubic TiN, AlN, NbN, and VN, mixed-nitride $Ti_{1-x}Al_xN$, ternary nitrides tetragonal $SrTiN_2$, $BaZrN_2$, and $BaHfN_2$, hexagonal $FeMoN_2$, and nanocomposite TiN-$BaZrN_2$.

• Current Photovoltaic Research
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• 제3권3호
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• pp.85-90
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• 2015

Two-step processes for preparing $Cu(In,Ga)Se_2$ absorber layers consist of precursor layer formation and subsequent annealing in a Se-containing atmosphere. Among the various deposition methods for precursor layer, the nonvacuum (wet) processes have been spotlighted as alternatives to vacuum-based methods due to their potential to realize low-cost, scalable PV devices. However, due to its porous nature, the precursor layer deposited on Mo substrate by nonvacuum methods often suffers from thick $MoSe_2$ formation during selenization under a high Se vapor pressure. On the contrary, selenization under a low Se pressure to avoid $MoSe_2$ formation typically leads to low crystal quality of absorber films. Although TiN has been reported as a diffusion barrier against Se, the additional sputtering to deposit TiN layer may induce the complexity of fabrication process and nullify the advantages of nonvacuum deposition of absorber film. In this work, Mo oxide layers via thermal oxidation of Mo substrate have been explored as an alternative diffusion barrier. The morphology and phase evolution was examined as a function of oxidation temperature. The resulting Mo/Mo oxides double layers were employed as a back contact electrode for $CuInSe_2$ solar cells and were found to effectively suppress the formation of $MoSe_2$ layer.

• 한국표면공학회지
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• 제33권1호
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• pp.38-47
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• 2000

A Ti(CN) layer was formed on aluminum alloy by using diethylamino titanium, hydrogen and nitrogen with the pulsed DC PACVD process. Effect of process parameters such as precursor evaporation temperature, duty ratio, frequency, voltage, $H_2$/$N_2$gas ratio on the properties of Ti(CN) layer were investigated. The layer thus obtained had high hardness and low friction coefficient. Detailed results on the hardness, surface morphology, XRD, WDS analysis, wear test and scratch test of this layer are presented.

• Journal of Mechanical Science and Technology
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• 제17권12호
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• pp.1904-1911
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• 2003

In order to determine the wear properties of AIP (Arc Ion Plating) deposition, wear process was evaluated by using a Falex test machine. Also, in order to determine the effects of coating material on the wear process, TiC, TiN, and TiCN coatings of thickness about 5 $\mu\textrm{m}$∼6 $\mu\textrm{m}$ coated by Arc ion plating deposition method were tested. The wear property was determined under a dry sliding condition as a function of the applied load, sliding distance, sliding velocity and temperature. The results show that when wear of the coating-layer occurred, specific wear amount increased with the wear rate. At initial state, the wear rate rapidly increased, but it gradually reduced as the velocity increased. Also, when raising the temperature, the wear rate increased in the order of TiCN, TiN and TiC due to the frictional heat.

• Transactions on Electrical and Electronic Materials
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• 제15권5호
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• pp.275-278
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• 2014

We deposited TiAgN and ZrAgN nanocomposite coatings on pure Titanium specimens, by using arc ion plating (AIP) with single alloy targets. TiAg ZrAg alloy targets of 5 wt.%, 10 wt.% silver content by vacuum arc remelting (VAR), followed by homogenization for 2 hours at $1,100^{\circ}C$ in non-active Ar gas atmosphere and characterized these samples for morphology and chemical composition. We investigated the biocompatibility of TiAg and ZrAg alloys by examining the proliferation of L929 fibroblast cells by MTT test assay, after culturing the cells ($4{\times}10^4cells/cm^2$) for 24 hours; and exploring the antibacterial properties of thin films by culturing Streptococus Mutans (KCTC3065), using paper disk techniques. Our results showed no cytotoxic effects in any of the specimens, but the antibacterial effects against Streptococus Mutans appeared only in the 10 wt.% silver content specimens.

• 한국재료학회지
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• 제19권10호
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• pp.555-561
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• 2009

Expanded graphite (EG) is synthesized by chemical intercalation of natural graphite (NG) and rapid expansion at high temperature, with titanium n-butoxide (TNB) used as titanium source by a sol-gel method to prepare EG-TiO$_2$ composite. The performances of the prepared EG-TiO$_2$ composite are characterized by BET surface area measurement, scanning electron microscopy (SEM), X-ray diffraction patterns (XRD) and energy dispersive X-ray analysis (EDX). To compare the photocatalytic activities of the EG-TiO$_2$ composite, three kinds of dye solutions, methylene blue (MB), methylene orange (MO) and rhodamine B (RhB), and two kinds of light source, UV light and visible light (VL), are used. Comparing the results, it can be clearly seen that the degradation of all of the dye solutions under irradiation by UV light is much better than that under irradiation by visible light, and the decomposition of MB solution was better than that of both of MO and RhB solution.

• 한국분말야금학회:학술대회논문집
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• 한국분말야금학회 2006년도 Extended Abstracts of 2006 POWDER METALLURGY World Congress Part2
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• pp.1161-1162
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• 2006

In order to overcome the recrystallization embrittlement and irradiation embrittlement of Mo, which are major problems for its fusion applications, internally nitrided Mo alloys were prepared by a novel multi-step internal nitriding. Neutron irradiation was performed in the Japan Material Testing Reactor (JMTR). After irradiation, nitrided Mo alloys exhibited $\iota$ ower ductile-brittle transition temperature than irradiated TZM. These results suggested that multi-step internal nitriding was effective to the improvement in the embrittlement by irradiation. Transmission electron microscope observation revealed that TiN particles precipitated by nitriding acted as a sink for irradiation-induced defects.

• 한국전자현미경학회:학술대회논문집
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• 한국현미경학회 2000년도 제31차 춘계학술대회
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• pp.77-79
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• 2000