• 대한전기학회논문지
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• 제41권6호
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• pp.633-639
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• 1992

The physical and electrical properties of TiN/TiSiS12T contact barrier were studied. The TiN/TiSiS12T system was formed by rapid thermal anneal in NS12T ambient after the Ti film was deposited on silicon substrate. The Ti film reacts with NS12T gas to make a TiN layer at the surface and reacts with silicon to make a TiSiS12T layer at the interface respectively. It was found that the formation of TiN/TiSiS12T system depends on RTA temperature. In this experiment, competitive reaction for TiN/TiSiS12T system occured above $600^{\circ}C$. Ti-rich TiNS1xT layer and Ti-rich TiSiS1xT layer were formed at $600^{\circ}C$. stable structure TiN layer and TiSiS1xT layer which has CS149T phase and CS154T phase were formed at $700^{\circ}C$. Both stable TiN layer and CS154T phase TiSiS12T layer were formed at 80$0^{\circ}C$. The thickness of TiN/TiSiS12T system was increased as the thickness of deposited Ti film increased.

• 한국분말재료학회지
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• 제20권5호
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• pp.338-344
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• 2013

Fe-TiC composite was fabricated from Fe and TiC powders by high-energy milling and subsequent spark-plasma sintering. The microstructure, particle size and phase of Fe-TiC composite powders were investigated by field emission scanning electron microscopy and X-ray diffraction to evaluate the effect of milling conditions on the size and distribution of TiC particles in Fe matrix. TiC particle size decreased with milling time. The average TiC particle size of 38 nm was obtained after 60 minutes of milling at 1000 rpm. Prepared Fe-TiC powder mixture was densified by spark-plasma sintering. Sintered Fe-TiC compacts showed a relative density of 91.7~96.2%. The average TiC particle size of 150 nm was observed from the FE-SEM image. The microstructure, densification behavior, Vickers hardness, and fracture toughness of Fe-TiC sintered compact were investigated.

• 한국결정성장학회지
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• 제11권4호
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• pp.133-137
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• 2001

고출력 이산화탄소 레이저빔에 의한 TiC/Al 표면합금의 특성을 연구하였다. 이 과정을 분석하기 위해 기본금속[Al]과 TiC 분말입자 사이의 물리적 특성을 측정하였다. 표면층의 크기와 모양, 광학적 흡수율 그리고 분말효율을 TiC/Al 행력에서 레이저출력의 함수로 측정하였다. TiC 분말을 사용한 경우와 사용하지 않은 경우의 기본금속내의 흡수율은 레이저 출력이 증하가면 감소하였다. 레이저출력이 2kW에서 4.5kW 범위로 증가되면 분말효율은 4%에서 12%까지 증가하였다. 그러나 TiC 분말입자는 용융된 알루미늄에는 용해되지 않는다. 이 결과 분말입자가 증가되면 쉽게 표면층을 투과하여 금속행렬속에 2개의 위상상태로 생성된다.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 1988년도 제7회 학술강연회초록집
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• pp.39-42
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• 1988

요업체 절삭공구(ceramic tool)는 공구강이나 초경제품에 비해 고속 절삭 작업이 가능하며 생산성을 높일 수 있기 때문에 최근 주목을 받고 있다. 본 실험에서 모재(substrate)로 사용된 $Si_3N_4$-TiC ceramic은 요업체 공구중에서 파괴인성이 우수하며, 주철이나 초합금을 절삭할 때 우수한 성능을 나타낸다. 그러나 요업체 절삭공구중에서 경도가 낮은 편에 속하며, Fe,Mn,O와 $Si_3N_4$가 화학적 반응을 일으켜서, steel을 절삭할 때 상면 마모(crater wear)가 심하게 발생하기 때문에 우수한 성능을 나타내지 못하고 있는 실정이다. 따라서 이러한 단점을 보완하기 위해 공구의 표면에 보호피막(protective coating)을 입히는 것은 필수적이다. 본 연구에서는 반응변수들이 TiC 및 TiN 증착층의 증착속도, 미세구조, 화학적 조성 및 증착층과 substrate 사이의 interface를 조사하여 각 증착층의 최적증착조건을 규명하고자 한다.

• 한국세라믹학회지
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• 제32권10호
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• pp.1194-1202
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• 1995

The influences of TiC additions to the α-SiC on microstructural, mechanical, and electrical properties were investigated. Electrical discharge machinability of SiC-TiC composites was also studied. Samples were prepared by adding 30, 45, 60 wt.% TiC particles as a second phase to a SiC matrix. Sintering of SiC-TiC composites was done by hot pressing under a vacuum atmospehre from 1000 to 2000℃ with a pressure of 32 MPa and held for 90 minutes at 2000℃. Samples obtained by hot pressing were fully dense with the relative densities over 99% except 60wt.% TiC samples. Flexural strength and fracture toughness of the samples were increased with the TiC content. In case of SiC samples containing 45 wt.% TiC, the fracture toughness showed 90% increase compared to that of monolithic SiC sample. The crack propagation and crack deflection were observed with a SEM for etched samples after Vicker's indentation. The electrical resistivities of SiC-TiC composites were measured utilizing the four-point probe. The electrical dischage machining of composites was also conducted to evaluate the machinability.

• 전기학회논문지
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• 제62권2호
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• pp.284-287
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• 2013

In this work, we have fabricated TiC films by using unbalanced magnetron sputtering method with graphite and Ti targets for contact strip application of electric railway. TiC films were deposited with various substrate temperatures. We investigated various properties of TiC films prepared with various substrate temperatures, such as the hardness, surface roughness, friction coefficient, resistivity, FESEM (Field Emission Scanning Electron Microscopy), HRTEM (High Resolution Transmission Electron Microscopy) and XPS (X-ray Photoelectron Spectroscopy). The hardness and friction coefficient properties of TiC films were improved with increasing substrate temperature. These results indicate that the improvement of hardness and resistivity is related to the increase of sp2 clusters in TiC films. And also, the resistivity value of TiC films were decreased with increasing substrate temperature.

• 한국주조공학회지
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• 제17권2호
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• pp.170-179
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• 1997

A noble technique has been developed for fabricating in situ formed $TiC_p/Al$ composites. In this process, fairly stable TiC particles were in situ synthesized in liquid aluminum by the interfacial reaction between an Al-Ti melt and SiC, which is a comparatively unstable carbide from the view-point of thermodynamics. It is possible in the present process to generate TiC particles of nearly 1 ${\mu}m$ in diameter, even utilizing SiC of 14 ${\mu}m$ as raw material. However, the dispersion behavior of TiC particles in the matrix depends on the size of the raw material SiC. Decomposing finer SiC makes the dispersion of TiC particles more uniform and the mechanical properties of composites are improved accordingly. The structure of in situ composites and their mechanical properties are affected by the fabrication temperature and the stirring time. It has been found that the most suitable condition for fabrication should be applied depending on the size of the raw material, even if the same kinds of carbide are used. Furthermore, although Al-Ti-Si system intermetallic compounds are detected in a $TiC_p/Al-Si$ composite which is fabricated by conventional melt-stirrng method, these compounds can not be observed in a $TiC_p/Al-Si$ composite made by this in situ production method. Hence the mechanical properties of the in situ $TiC_p/Al-Si$ composite are superior to those of the conventional $TiC_p/Al-Si$ composites.

• 한국분말재료학회지
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• 제21권5호
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• pp.382-388
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• 2014

Fe-TiC composite powder was fabricated by high-energy milling of powder mixture of (Fe, TiC) and (FeO, $TiH_2$, C) as starting materials, respectively. The latter one was heat-treated for reaction synthesis of TiC phase after milling. Both powders were spark-plasma sintered at various temperatures of $680-1070^{\circ}C$ for 10 min. with sintering pressure of 70 MPa and the heating rate of $50^{\circ}C/min$. under vacuum of 0.133 Pa. Density and hardness of the sintered compact was investigated. Fe-TiC composite fabricated from (FeO, $TiH_2$, C) as starting materials showed better sintered properties. It seems to be resulted from ultra-fine TiC particle size and its uniform distribution in Fe-matrix compared to the simply mixed (Fe, TiC) powder.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2014년도 추계학술대회 논문집
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• pp.192-192
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• 2014

TiN, Ti(C,N), TiAlSiN, TiZrAlN, TiAlCrSiN 박막을 제조한 후, 이 들의 고온산화 특성을 SEM, EPMA, TGA, TEM, AES 등을 이용하여 조사하고, 산화기구를 제안하였다. 산화속도, 생성되는 산화물의 종류와 분포는 박막의 조성, 산화온도, 산화시간에 따라 변하였다.

• 한국세라믹학회지
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• 제39권4호
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• pp.413-419
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• 2002

$Al_2O_3$/TiC/SiC, $Al_2O_3$/SiC 및 $Al_2O_3$/TiC 복합체들을 고온가압소결로 제조하여 이들의 균열저항거동과 기계적 성질을 비교해 보았다. $Al_2O_3$에 $0.8{\mu}m$의 TiC가 30vol% 첨가된 $Al_2O_3$/TiC는 단일체 $Al_2O_3$와 비슷한 균열저항거동을 보이며 파괴인성은 전반적으로 10% 이내의 증가를 보이는데 그쳤지만 강도는 약 30% 증가하였다. $Al_2O_3$에 $3{\mu}m$ SiC가 30vol% 첨가된 $Al_2O_3$/SiC는 SiC 입자의 균열 접속으로 인해 증가하는 균열저항거동을 뚜렷이 보이면서 파괴인성이 긴 균열에서 약 75% 증가하였으나 강도는 다소 감소했다. $Al_2O_3$/TiC에 SiC 입자가 30 vol% 첨가된 $Al_2O_3$/TiC/SiC 복합체의 경우 단일체 $Al_2O_3$에 비해 긴 균열 거리에서 파괴인성이 50% 이상 증가된 6.6 MP${\cdot}\sqrt{m}$에 이르렀으며 강도 값도 약 20% 상승하였다. 그러나 큰 SiC 입자의 첨가로 인해 TiC 입자만 첨가된 $Al_2O_3$/TiC 복합체보다는 강도가 다소 낮았다. 또한 SiC 입자만 첨가된 $Al_2O_3$/SiC 복합체보다는 파괴인성이 다소 낮았는데, 이는 작은 TiC 입자들이 SiC 입계를 거칠게 만들어 균열접속을 일으키는 SiC 입자의 뽑힘 현상을 방해하였기 때문이다.