• Journal of Sensor Science and Technology
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• v.4 no.3
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• pp.80-88
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• 1995

This paper presents the fabrication of a metal-insulator-metal(MIM) antifuse structure consisting of insulators sandwiched between top electrode, Al, and bottom electrode, TiW and additionally studies on antifuse properties depending on the condition of insulator. The intermetallic insulators, prepared by means of sputter, comprised of silicon oxide and tantalum oxide. In such an antifuse structure, silicon oxide layer is utilized to decrease the leakage current and tantalum oxide layer, of which the dielectric strength is lower than that of silicon oxide, is also utilized to lower the breakdown voltage near 10V. Finally sufficient low leakage current, below 1nA, and low programming voltage, about 9V, could be obtained in antifuse device comprising $Al/Ta_{2}O_{5}(10nm)/SiO_{2}(10nm)/TiW$ structure and OFF resistance of 3$3.65M{\Omega}$ and ON resistance of $7.26{\Omega}$ could be also obtained. This $Ta_{2}O_{5}/SiO_{2}$ based antifuse structures will be promising for highly reliable programmable device.

• Journal of Korea Foundry Society
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• v.30 no.6
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• pp.241-246
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• 2010

The viscosity of foam metal is necessary to get the pores, but it is difficult to manufacture net-shape foam, because the fluidity decreases by increasing viscosity. In this study, the A356 alloy which has good fluidity and less defect was selected and fabricated to foam metal. To understand about effect of thickening agent on foaming and mechanical properties, quantity of thickening agent was changed. The pore size, porosity and distribution of foam metal were measured by i-solution program. And compression test were performed by UTM. In case of 3.0wt% Ca in thickening agent, it is found that most of foam consist of homogeneous shape, and the growth height had the highest value of 204 mm in the all fabricated foams. The porosity was 93% and compressive strength was 3.1 MPa. In the microstructure, the $Al_2Si_2Ca$ intermetallic compound and Ti were observed. The vickers hardness value rose with increasing viscosity value.