• E2M - 전기 전자와 첨단 소재
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• 제10권6호
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• pp.570-575
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• 1997

In this days, the thinner film of dielectric materials is required while its capacitance is required to be still large at the VLSI process. Most of such VLSI have MOS structures. For the research on this requirement, MOS capacitors were fabricated on the silicon wafer in four different thickness groups by RF sputtering method. SiO of the SiO/TiN film is used as the insulating layer and TiN is chosen as the barrier against the diffusion of Al which is the terminal connected by ohmic contact because TiN has the advantageous properties such as good thermal stability and very low diffusion rate in spite of its relatively low specific resistance. In this study their electrical and optical characteristics are investigated to find refractive index, absorption coefficient and Permittivity.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.581-584
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• 2003

The austenitic STS 304 stainless steel was turned to clarify the effects of tool geometry on the tool wear. The wear of TiN-TiCN-TiC-TiAlN coated tungsten carbide tool was the smallest, exhibiting larger wear in the order of Si-Al-O-N ceramic, TiN coated tungsten carbide, TiN-TiCN-TiN coated tungsten carbide, TiC-TiN cermet and M20 tungsten carbide tools at the same cutting conditions. The S-type tool of M20 with large approach angle showed the longest tool life of all tools used in this tests due to preventing the groove wear of the side cutting edge. The wear of the S-type tool with the rake angle of 15$^{\circ}$became smaller than with that of -5$^{\circ}$, but the tool with the nose radius of 0.8mm did not perform much better with increasing the rake angle.

• 한국정밀공학회지
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• 제20권10호
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• pp.56-64
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• 2003

The effect of tool geometry on the tool wear in turning the austenitic stainless steel, STS 304 was investigated. The wear of TiN-TiCN-TiC-TiAlN coated tungsten carbide tool was the smallest, showing larger wear in the order of Si-Al-O-N ceramic, TiN coated tungsten carbide, TiN- TiCN- TiN coated tungsten carbide, TiC-TiN cermet and M20 tungsten carbide tools at the same cutting conditions. The S-type tool of M20 with the larger side cutting edge angle showed the smallest tool wear in all tests due to preventing the groove wear of the side cutting edge. The wear of the S-type tool with the rake angle of $15^{\circ}$ became smaller than with that of $-5^{\circ}$, but the tool with the nose radius of 0.8mm did not perform much better with increasing the rake angle.

• 한국세라믹학회지
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• 제32권9호
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• pp.977-988
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• 1995

Several oxide (ZrO2, Al2TiO5, reactive Al2O3) and nonoxide (SiC, Si3N4, "ALON" (5AlN.9Al2O3)) additives were used as a microfiller for alumina based LCC (Low-Cement-Castable). High temperature prooperties (HMOR, softening under load) and the phase changes of developed LCC on various sintering temperatures were examined. In addition, thermal shock test and corrosion test were accomplished. Based on these data the effects of each microfiller on the properties of LCC were established comparing to those of the commercial LCC with amorphous silica as a microfiller. The castables, containing reactive alumina, ZrO2 and "ALON" (5AlN.9Al2O3) as a first portion, exhibited considerably higher HMOR-values over 100$0^{\circ}C$, better creep behavior, and thermal shock resistance than those of castables with amorphous silica. The LCC with 5% Al2TiO5 showed no corrosion against molten aluminum.nst molten aluminum.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2014년도 추계학술대회 논문집
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• pp.213-213
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• 2014

$300^{\circ}C$와 $500^{\circ}C$에서 아크 이온 증착된 도포층의 조성은 각각 Fe : Al : Ti : Si : N = 1.31 : 36.52 : 31.31 : 0.48 : 30.38 [wt.%]와 Fe : Cr : Al : Ti : Si : N = 1.24 : 0.56 : 36.82 : 32.72 : 0.59 : 28.07 [wt.%] 이었다. 0.1N $H_2SO_4$ 수용액과 인공해수 (ASTM D1141-98) 분위기에서 $300^{\circ}C$, $500^{\circ}C$에서 증착된 도포층의 부식전압과 부식속도는 각각 $-0.2787V_{SHE}$, $0.002A/cm^2$, $-2.764V_{SHE}$, $0.002A/cm^2$ 와 $-0.2799V_{SHE}$, $0.002A/cm^2$, $-0.0394V_{SHE}$, $0.002A/cm^2$이었다. 나노 경도값은 각각 23.6, 25.8 GPa 이었다. 이는 각각 2208.2, $2434.2H_V$에 해당되었다.

• 한국세라믹학회지
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• 제31권12호
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• pp.1545-1551
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• 1994

Various kinetic parameters of the nucleation and crystallization in anorthite glass (CaO.Al2O3.2SiO2) were calculated by nonisothermal differential thermal analysis. Base glass and glass with TiO2 were prepared by melting. In base glass, the temperature where nucleation can occur ranges from 85$0^{\circ}C$ to 9$25^{\circ}C$ and the temperature for maximum nucleation was 900$\pm$5$^{\circ}C$. In glass with TiO2, the nucleation temperature range was 800~875$^{\circ}C$ and the maximum nucleation temperature was 850$\pm$5$^{\circ}C$. Kissinger equation, Bansal equation, and modified Ozawa equation were used for calculating activation energy for crystallization, Ec. The results showed the same activation energies for both glasses with and without TiO2 in the different equations. The shape of maximum exotherm peak and Ozawa equation were used for Avrami exponent, n. The n value for each glass was 2, indicating that each glass crystallized primarily by bulk crystallization.

• 한국생산제조학회지
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• 제9권6호
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• pp.170-177
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• 2000

Dense $Al_2$O$_3$-30%TiC and Si$_3$N$_4$ ceramic tool materials with various grain size were produced by sintering-HIP treatment and by gas-pressure sintering. The fracture toughness was measured by indentation fracture and indentation strength method for both ceramics with various grain size. The effect of the grain size on the fracture toughness was evaluated, and the correlation between fracture toughness and mechanical properties such as hardness, Young\`s modulus and flexural strength of these ceramic were also investigated. The highest fracture toughness of around 6.7 MPa.m(sup)1/2 was obtained in Si$_3$N$_4$ ceramics with grain size of 1.58${\mu}{\textrm}{m}$. With a larger grain size of $Al_2$O$_3$-30%TiC and Si$_3$N$_4$ ceramics, the fracture toughness was generally increased. The increased fracture toughness of these ceramic also improved the flexural strength although the hardness decreased considerably. Similar results were obtained in grain size and mechanical properties on both $Al_2$O$_3$-30%TiC and Si$_3$N$_4$ ceramic tool materials.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2003년도 춘계학술발표강연 및 논문개요집
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• pp.27-27
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• 2003

무가압침투법으로 제조된 부피분율 10~24% SiC, TiC, B$_4$C 탄화물 입자강화 7075 Al 합금 기지 복합재료의 건식 미끄럼 마멸거동을 강화입자의 종류, 크기 및 부피 분율을 변수로 연구하였다. 미끄럼 마멸 시험은 pin-on-disk 형태의 마멸 시험기를 사용하여, AISI 52100 베어링강을 상대재로 상온 대기 중에서 실시되었다. 마멸특성의 분석과 마멸기구의 규명을 위하여 마멸면과 마멸단면을 SEM, EDS를 이용하여 분석하였다. 제조된 복합재료의 압축 시험을 통하여 측정된 항복강도와 가공경화지수는 서로 반비례하였고, 각 시편간의 경도 차는 크지 않았다. 마멸 시험결과, 크기 및 부피 분율이 7$\mu\textrm{m}$ !0%인 SiC 입자로 강화된 복합재료를 제외하고, 전체 복합재료 시편은 7075 Al 기지 합금에 비해 낮은 마멸 속도를 보였다. 10N 이하의 저하 중에서는 강화상의 종류와 상관없이 복합재료는 낮은 마멸 속도를 보였고, 25N 이상의 고하중에서는 TiC 입자강화 복합재료가 가장 낮은 마멸 속도를, SiC 입자강화 복합재료가 가장 높은 마멸 속도를 나타내었다. 강화 입자의 크기 및 부피 분율이 동일한 경우 SiC 입자로 강화된 복합재료가 가장 낮은 내마멸성을 나타내었다. 강화상의 크기 및 부피 분율이 증가함에 따라 미소 마멸에서 격렬 마멸로의 천이 하중이 증가하였다.

• 한국진공학회지
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• 제12권4호
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• pp.218-227
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• 2003

AlGaAs/GaAs HBT 에미터 오믹 접촉을 위해 n형 InGaAs에 대한 Pd/Si/Ti/Pt 및 Pd/Si/Pd/Ti/Au 오믹 접촉 특성을 조사하였다. Pd/Si/Ti/Pt 오믹 접촉의 경우, 증착 상태에서는 접촉 비저항을 측정할 수 없을 정도의 비오믹 특성을 보였으며, $375^{\circ}C$에서 10초 동안 열처리한 경우 $5\times10^{-3}\Omega\textrm{cm}^2$의 높은 접촉 비저항을 나타내었다. 그러나 열처리 조건을 $425^{\circ}C$, 10초로 변화시킬 경우 $2\times10^{-6}\Omega\textrm{cm}^2$의 낮은 접촉 비저항을 나타내었다. Pd/Si/Pd/Ti/Au 오믹 접촉의 경우, $450^{\circ}C$까지의 열처리 동안에 전반적으로 우수한 오믹 특성을 나타내어 $400^{\circ}C$, 20초의 급속 열처리 조건에서 최저 $3.9\times10^{-7}\Omega\textrm{cm}^2$의 접촉 비저항을 나타내었다. 두 오믹 접촉 모두 오믹 재료와 InGaAs의 평활한 계면을 유지하면서 우수한 오믹 특성을 나타내어, 화합물 반도체 소자의 오믹 접촉으로 충분히 응용 가능하였다. Pd/Si/Ti/Pt 및 Pd/Si/Pd/Ti/Au를 AlGaAs/GaAs HBT의 에미터 오믹 접촉으로 사용하여 제작된 HBT 소자의 고주파 특성을 측정한 결과, 차단 주파수가 각각 63.9 ㎓ 및 74.4 ㎓로, 또한 최대공진 주파수가 각각 50.1 ㎓ 및 52.5 ㎓로 우수한 작동특성을 보였다.

• 한국산학기술학회:학술대회논문집
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• 한국산학기술학회 2001년도 춘계학술대회 발표논문집
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• pp.40-46
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• 2001

A1₂TiO/sub 5/ 세라믹스의 열적 안정성은 MgO와 고온 arc용융노에서 MgAl₂O₄ spinel과 같은 고용체를 이루고, SiO₂, ZrO₂와 α-Al₂O₃등의 첨가제로 입자크기와 미세 균열을 감소시킴으로서 증가시킨다. A1₂TiO/sub 5/ 세라믹스의 낮은 열팽창 특성은 상이한 열팽창으로 hysteresis 곡선을 나타내며 이 현상은 미세균열의 opening과 closing으로 설명된다. 이들의 열팽창 곡선, 소성온도에 EK른 관계를 dilatometer로 연구하였다.