• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.23 no.11
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• pp.831-836
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• 2010

In this paper, Plasma Enhanced Chemical Vapor Deposition (PECVD) $SiO_2$ film properties are modeled using statistical analysis and neural networks. For systemic analysis, Box-Behnken's 3 factor design of experiments (DOE) with response surface method are used. For characterization, deposited film thickness and film stress are considered as film properties and three process input factors including plasma RF power, flow rate of $N_2O$ gas, and flow rate of 5% $SiH_4$ gas contained at $N_2$ gas are considered for modeling. For film thickness characterization, regression based model showed only 0.71% of root mean squared (RMS) error. Also, for film stress model case, both regression model and neural prediction model showed acceptable RMS error. For sensitivity analysis, compare to conventional fixed mid point based analysis, proposed sensitivity analysis for entire range of interest support more process information to optimize process recipes to satisfy specific film characteristic requirements.

• Environmental Engineering Research
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• v.25 no.3
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• pp.418-425
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• 2020

In this study soft computing techniques including, Artificial Neural Network (ANN) and Adaptive Neuro-Fuzzy Inference System (ANFIS) were investigated for the prediction of Cr(VI) transport efficiency by novel Polymer Inclusion Membranes (PIMs). Transport experiments carried out by varying parameters such as time, film thickness, carrier type, carier rate, plasticizer type, and plasticizer rate. The predictive performance of ANN and ANFIS model was evaluated by using statistical performance criteria such as Root Mean Standard Error (RMSE), Mean Absolute Error (MAE), and Coefficient of Determination (R²). Moreover, Sensitivity Analysis (SA) was carried out to investigate the effect of each input on PIMs Cr(VI) removal efficiency. The proposed ANN model presented reliable and valid results, followed by ANFIS model results. RMSE and MAE values were 0.00556, 0.00163 for ANN and 0.00924, 0.00493 for ANFIS model in the prediction of Cr(VI) removal efficiency on testing data sets. The R² values were 0.973 and 0.867 on testing data sets by ANN and ANFIS, respectively. Results show that the ANN-based prediction model performed better than ANFIS. SA demonstrated that time; film thickness; carrier type and plasticizer type are major operating parameters having 33.61%, 26.85%, 21.07% and 8.917% contribution, respectively.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2004.11a
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• pp.227-231
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• 2004

Technological advance in information technology has sparked the necessity of small form factor (SFF) optical disk for mobile devices. Small form factor optical disk is highly anticipated to be a next generation storage device because it can be used for a cost-effective way compared with solid state memory. For the application to the 5 mm height small-form-factor optical disk drive, we have presented an optical flying head and swing arm actuator. In this study, we propose a small 1-axis actuator for compensating ficus error and SA due to the variation of cover-layer thickness in the cover-layered small optical disk. The main design issues of the 1-axis actuator are the realization of compact structure and the new support structure of the actuator: Finally, the compensating principle and performance of the 1-axis actuator will be explained.

• Journal of the Korean Society for Precision Engineering
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• v.34 no.2
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• pp.107-114
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• 2017

In this investigation, we describe a metrological technique for surface and thickness profiles of a silicon (Si) wafer by using a 6 degree of freedom (DOF) stitching method. Low coherence scanning interferometry employing near infrared light, partially transparent to a Si wafer, is adopted to simultaneously measure the surface and thickness profiles of the wafer. For the large field of view, a stitching method of the sub-aperture measurement is added to the measurement system; also, 6 DOF parameters, including the lateral positioning errors and the rotational error, are considered. In the experiment, surface profiles of a double-sided polished wafer with a 100 mm diameter were measured with the sub-aperture of an 18 mm diameter at $10\times10$ locations and the surface profiles of both sides were stitched with the sub-aperture maps. As a result, the nominal thickness of the wafer was $483.2{\mu}m$ and the calculated PV values of both surfaces were $16.57{\mu}m$ and $17.12{\mu}m$, respectively.

• Proceedings of the Korean Nuclear Society Conference
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• 1995.05a
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• pp.680-686
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• 1995

It has been known that water-side corrosion of fuel rods in nuclear reactor is accompanied with the loss of metallic wall thickness and pickup of hydrogen. This corrosion is one of the important limiting factors ill the operating life of fuel rods. In connection with the fuel cladding corrosion, a device to measure the water-side oxide layer thickness by means of the eddy-current method without destructing the fuel rod was developed by KAERI. The device was installed on the multi-function testing bench in the nondestructive test hot-cell and its calibration was carried out successfully for the standard rod attached with plastic thin films whose thicknesses are predetermined. It shows good precision within about 10% error. And a PWR fuel rod, one of the J-44 assembly discharged from Kori nuclear power plant Unit-2, has been selected for oxide layer thickness measurements. With the result of data analysis, it appeared that the oxide layer thicknesses of Zircaloy cladding vary with the length of the fuel rod, and their thicknesses were compared with those of the destructive test results to confirm the real thicknesses.

• Computational Structural Engineering
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• v.10 no.1
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• pp.185-191
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• 1997

Beam - and arch-like structures are two-dimensional bodies characterized by the fact of small thickness compared to the length of structures. Owing to this geometric feature, linear displacement approximations through the thickness such as Kirchhoff and Reissner-Mindlin theories which are more accessible one dimensional problems have been used. However, for accurate analysis of the behavior in the regions where the state of stresses is complex, two-dimensional linear elasicity or relatively high order of thickness polynomials is required. This paper analyses accuracy according to the order of thickness polynomials and introduces a technique for model combination for which several different polynomial orders are mixed in a single structure.

• Journal of Sensor Science and Technology
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• v.25 no.1
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• pp.35-40
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• 2016

Pulse diagnosis is one of the representative diagnostic methods in Oriental medicine. In this study, a pulse pressure sensor array coated with silicone, which includes 6 piezo-resistive sensors and 1 thermistor, is fabricated for pulse measurement. It is necessary to coat the pulse sensor array with silicone to avoid the fracture or damage of pressure sensors when the sensor is in contact with the skin and a constant pressure is applied. However, the silicone coating on the pulse sensor array can cause signal interference among the sensors in the pulse sensor array. The interference number (IN), a calculation for expressing the degree of interference among channels, is changed according to the silicone thickness on the pulse sensor array. The IN is increased by a thick silicone coating, but the fabrication error, an important index for the mass production of the sensor array, is reduced by the thickness of the silicone coating. We propose that the thickness of the silicone on the pulse sensor array is an important consideration for the performance of the fabricated sensor and manufacturing repeatability.

• Transactions of Materials Processing
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• v.19 no.2
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• pp.79-87
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• 2010

The Pipe bending process using high frequency local induction heating is an advanced technique to bend pipes with a small bending radius and a large diameter. Even though the pipe bending process is a quite widespread engineering practice, it depends heavily upon trial and error method by field engineers with several years of experience. So it is necessary to develop an integrated methodology for optimum design of the pipe bending process. During hot pipe bending using induction heating, outward wall thickness of a pipe is thinned due to tensile stress and the reduction of wall thickness is not allowed to exceed 12.5%. Taguchi method and dynamic reverse moment is proposed to maintain a reduction ratio of thickness within 12.5%, when D/t ratio is high. An application of the proposed approach was compared with those of the finite element analysis and has good in agreements.

• Nuclear Engineering and Technology
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• v.53 no.4
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• pp.1266-1276
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• 2021

The mask parameters of a coded aperture are critical design features when optimizing the performance of a gamma-ray camera. In this paper, experiments and Monte Carlo simulations were performed to derive the minimum detectable activity (MDA) when one seeks a real-time imaging capability. First, the impact of the thickness of the modified uniformly redundant array (MURA) mask on the image quality is quantified, and the imaging of point, line, and surface radiation sources is demonstrated using both cross-correlation (CC) and maximum likelihood expectation maximization (MLEM) methods. Second, the minimum detectable activity is also derived for real-time imaging by altering the factors used in the image quality assessment, consisting of the peak-to-noise ratio (PSNR), the normalized mean square error (NMSE), the spatial resolution (full width at half maximum; FWHM), and the structural similarity (SSIM), all evaluated as a function of energy and mask thickness. Sufficiently sharp images were reconstructed when the mask thickness was approximately 2 cm for a source energy between 30 keV and 1.5 MeV and the minimum detectable activity for real-time imaging was 23.7 MBq at 1 m distance for a 1 s collection time.

• Korean Journal of Optics and Photonics
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• v.27 no.4
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• pp.143-150
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• 2016

The thickness of each layer in a multilayered system is determined by a Fourier-transform method using spectroscopic reflectance measurements. To verify this method, we first generate theoretical reflectance spectra for three layers, and these are fast-Fourier-transformed using our own Matlab program. Each peak of the Fourier-transformed delta function denotes the optical thickness of each layer, and these are transformed to physical thicknesses. The relative thickness error of the theoretical model is less than 1.0% while a layer's optical thickness is greater than 730 nm. A PI-(thin $SiO_2$)-PImultilayeredstructure produced by the bar-coating method was analyzed, and the thickness errors compared to SEM measurements. Even though this Fourier-transform method requires knowing the film order and the refractive index of each layer prior to analysis, it is a fast and nondestructive method for the analysis of multilayered structures.