• Structural Monitoring and Maintenance
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• 제3권4호
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• pp.335-347
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• 2016

One of major errors in flow rate measurement for two-phase flow using an Electrical Capacitance Sensor (ECS) concerns sensor sensitivity under temperature raise. The thermal effect on electrical capacitance sensor (ECS) system for air-water two-phase flow monitoring include sensor sensitivity, capacitance measurements, capacitance change and node potential distribution is reported in this paper. The rules of 12-electrode sensor parameters such as capacitance, capacitance change, and change rate of capacitance and sensitivity map the basis of Air-water two-phase flow permittivity distribution and temperature raise are discussed by ANSYS and MATLAB, which are combined to simulate sensor characteristic. The cross-sectional void fraction as a function of temperature is determined from the scripting capabilities in ANSYS simulation. The results show that the temperature raise had a detrimental effect on the electrodes sensitivity and sensitive domain of electrodes. The FE results are in excellent agreement with an experimental result available in the literature, thus validating the accuracy and reliability of the proposed flow rate measurement system.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 추계학술대회
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• pp.308-313
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• 2003

Thermal mass flow meters (TMFMs) are most widely used for measuring mass flow rates in the semiconductor industry. A TMFM should have a short response time in order to measure the time-varying flow rate rapidly and accurately. Therefore it is important to study transient heat transfer phenomena in the sensor tube of a TMFM that is the most critical part in the TMFM. In the present work, a simple numerical model for transient heat transfer phenomena of the sensor tube of a TMFM is presented. Numerical solutions for the tube and fluid temperatures in a transient state are obtained using the proposed model and compared with experimental results to validate the proposed model. Based on numerical solutions, heat transfer mechanism in a transient state in the sensor tube is explained. Finally, a correlation for predicting the response time of a sensor tube is presented. The correlation is verified by experimental results.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2011년도 춘계학술대회 논문집
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• pp.171-172
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• 2011

• 대한전기학회:학술대회논문집
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• 대한전기학회 1994년도 하계학술대회 논문집 C
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• pp.1391-1393
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• 1994

A silicon microbridge flow sensor has been developed. The heat transfer within silicon microbridge is modeled to predict the characteristics of the sensor. The flow sensor shows high sensitivity at small flow rate. This device is simple to fabricate, using standard IC and micromachining technology.

• 대한기계학회논문집B
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• 제20권4호
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• pp.1376-1384
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• 1996

Measuring the velocity of fluid flow, semiconductor flow sensors are widely used in the various fields of engineering and science such as the semiconductor manufacturing processes and electronic control engines for automobiles. In the near future, this type of sensors will replace present hot wire type sensors or other type flow sensor due to its low price, easy handling and small size. To develop the advanced semiconductor flow sensor, it is necessary to obtain characteristics of the flow and the heat transfer around the sensor in advance. In the present study, the theoretical analysis including mathematical modeling and numerical calculation to predict the characteristics of heat transfer and flow field around the sensor was carried out. The main parameters for optimum design of the flow sensor are the free stream velocity, the heat generation rate of silicon arm and the distance between arms. Effects of these parameters on flow and heat transfer around the sensor and the temperature difference between arms are examined.

• 한국정밀공학회지
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• 제26권11호
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• pp.138-145
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• 2009

A suspended membrane micro fluidic heat flux sensor that is able to measure the heat flow rate was designed and fabricated by a complementary-metal-oxide-semiconductor-compatible process. The combination of a thirty-junction gold and nickel thermoelectric sensor with an ultralow noise preamplifier, low pass filter, and lock-in amp has enabled the resolution of 50 nW power and provides the sensitivity of $11.4\;mV/{\mu}W$. The heater modulation method was used to eliminate low frequency noises from sensor output. It is measured with various heat flux fluid of DI-water to test as micro fluidic application. In order to estimate the heat generation of samples from the output measurement of a micro fluidic heat-flux sensor, a methodology for modeling and simulating electro-thermal behavior in the micro fluidic heat-flux sensor with integrated electronic circuit is presented and validated. The electro-thermal model was constructed by using system dynamics, particularly the bond graph. The electro-thermal system model in which the thermal and the electrical domain are coupled expresses the heat generation of samples converts thermal input to electrical output. The proposed electro-thermal system model shows good agreement with measured output voltage response in transient state and steady-state.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2000년도 춘계학술대회논문집B
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• pp.154-161
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• 2000

As a mass flow controller is widely used in many manufacturing processes for controlling a mass flow rate of gas with accuracy of 1%, several investigators have tried to describe the heat transfer phenomena in a sensor tube of an MFC. They suggested a few analytic solutions and numerical models based on simple assumptions, which are physically unrealistic. In the present work, the heat transfer phenomena in the sensor tube of the MFC are studied by using both experimental and numerical methods. The numerical model is introduced to estimate the temperature profile in the sensor tube as well as in the gas stream. In the numerical model, the conjugate heat transfer problem comprising the tube wall and the gas stream is analyzed to fully understand the heat transfer interaction between the sensor tube and the fluid stream using a single domain approach. This numerical model is further verified by experimental investigation. In order to describe the transport of heat energy in both the flow region and the sensor tube, the Nusselt number at the interface between the tube wall and the gas stream as well as heatlines is presented from the numerical solution.

• 대한기계학회논문집B
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• 제39권4호
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• pp.309-316
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• 2015

가열식 액체용 질량유량계측기(LMFM, Liquid Mass Flow Meter)에 대하여 수치해석적으로 분석하였으며 실험을 통하여 검증하였다. 기존의 기체용 질량유량계측기(GMFM, Gas Mass Flow Meter)와 동일한 구조로 설계하였으나 계측온도차는 기체용에 비하여 정 반대의 특성을 나타낸다. 기체는 열용량이 작아서 계측관벽을 통한 전도열전달이 기체의 유동에 따른 대류열전달에 대응할 정도이므로 이들 상호작용의 결과 상 하류 써미스터의 온도차가 질량유량에 비례한다. 반면, 열용량이 큰 액체의 경우 대류열전달이 지배적이 되어 계측관벽을 통한 전도열전달이 무시되며, 결과적으로 온도차가 질량유량에 반비례한다. 계측관경과 히터의 권선폭은 LMFM 의 중요한 설계인자로서 각각 최적화가 필요하다. 최적화 설계를 통하여 제작한 계측기는 반도체 생산장비의 극소유량 정밀제어 및 공급용으로 사용할 수 있다.

• 한국신재생에너지학회:학술대회논문집
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• 한국신재생에너지학회 2006년도 춘계학술대회
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• pp.451-454
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• 2006

Fiber optic distributed temperature sensing and thermal line sensor are applied in an observation borehole and a loom deep borehole heat exchanger. For the case of permanently installed system fiber optic DTS is very useful. By comparing with TLS, fiber optic DTS shows good accuracy and reliability. Ground water flow can give influences at heat exchange rate of the heat pump system. According to the hydraulic characteristics and temperature-depth profile, we consider that temperature-depth profile do not seem to be dependent on ground water flow. A permanent installation of fiber optic cable is expected as a reliable temperature measurement technique in a borehole heat exchanger system.

• 센서학회지
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• 제3권1호
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• pp.12-18
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• 1994

본 연구에서는, calorimetric 형 흐름센서 소자를 미세가공된 실리콘 구조상에 제작하고 그 특성을 평가하였다. 기체의 흐름을 통한 냉각효과 및 가열효과를 가열저항을 중심으로 양측에 배열된 두개의 온도센서로 측정하였으며 절연박막 다이아프램을 기판으로 사용하여 열적절연효과를 향상시켰다. 제작된 흐름센서는 $0{\sim}0.25grs/min$의 질소가스의 흐름 범위 내에서, 10V의 브릿지 인가전압에 대해 $0{\sim}378.4mV$의 출력전압을 발생하였으며, 센서가 동작 영역에 이르는 시간은 10초 내외로 나타났다.