• Title/Summary/Keyword: Thermal evaporator

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Fabrication and Characteristics Test of Micro Heat Pipe Array for IC Chip Cooling (IC 칩 냉각용 초소형 히트 파이프의 제작 및 성능 평가)

  • 박진성;최장현;조형철;조한상;양상식;유재석
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.50 no.7
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    • pp.351-363
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    • 2001
  • This paper presents an experimental investigation on the heat trensfer characteristic of micro pipe (MHP) array with 38 triangular microgrooves. A heat pipe is an effective heat exchanger operating without external power. The heat pipe transfers heat by means of the latent heat of vaporization and two-phase fluid flow driven by the capillary force. The overall size of the MHP array can be put undermeath a microelectonic die and integrated into the electrronic package of a microelectronin device to dissipate the heat from the die. The MHP array is fabricated by micromachining with a silicon wafer and a glass substrate. The MHP was filled with water and sealed. The experimental results show the temperature decrease of 12.1$^{\circ}C$ at the evaporator section for the input power of 5.9 W and the improvement of 28% in the heat transfer rate.

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환경 요인으로 인한 Zinc-Tin-Oxide TFT의 특성 열화 분석

  • Gu, Hyeong-Seok;Choe, Seong-Ho;Choe, Byeong-Deok
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.409-409
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    • 2012
  • 모바일 및 TV, 모니터 부분에서 AMOLED의 비약적인 시장 점유율 확대와 더불어 TFT 소자 부문에서도 많은 집중과 연구개발이 이루어지고 있다. 높은 이동도를 필요로 하는 AMOLED의 구동 회로에 채널층으로서 a-Si이 낮은 이동도로 인한 한계에 부딪히며 더 이상 쓰일 수 없게 되었고, 현재 우수한 이동도와 균일성, 제조 원가 절감의 효과 등 많은 장점을 보유한 산화물 TFT가 접목되고 있다. 현재까지 IGZO, ZnO 등이 많이 연구되며 실제로 AMOLED 용 TFT 소자에 적용 되고 있다. 본 연구에서는 산화물질인 ZTO (Zinc-Tin-Oxide)를 이용하여 TFT를 제작하였다. n-type 웨이퍼에 PECVD를 이용하여 $SiO_2$를 100 nm 증착한 뒤 spin coater로 ZTO용액을 30 nm 증착하였다. ZTO의 최적화된 열처리 온도인 $450^{\circ}C$에서 annealing을 해준 다음에 thermal evaporator로 source와 drain을 증착하였다. Gate 컨택을 위하여 웨이퍼 후면에 silver paste를 이용해 소자를 완성하였다. 산화물질 특성상 환경변화에 민감한 경향성을 보이기 때문에 현재 산화물 TFT는 신뢰성 분석에 많은 연구가 진행되고 있다. 완성된 ZTO TFT 소자를 빛과 수분에 일정한 시간 노출시킨 뒤 I-V 측정을 통하여 소자 열화를 분석하였다.

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A Dynamic Characteristic of the Multi-Inverter Heat Pump with Frosting (착상을 수반한 멀티 가변속 열펌프의 동특성)

  • ;;Shigeru Koyama
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.15 no.5
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    • pp.337-345
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    • 2003
  • In the case of heat exchangers operating under frosting condition, the growth of frost layer causes the heat exchanger to increase the thermal resistance and pressure loss of the air flow. In this paper, a transient characteristic prediction model of the heat transfer for multi inverter heat pump with frosting on its surface was presented taking into account the change of the fin efficiency due to the growth of the frost layer. In this dynamic simulation program, which was peformed for a basic air conditioning system model, such as evaporator, condenser, compressor, linear electronic expansion valve (LEV) and bypass circuit. The theoretical model was driven from the obtained heat transfer coefficient and mass transfer coefficient, independently. And we consider heat transfer performance was only affected by a decrease of the wind flow area. The calculated results were compared with some cases of experiments for frosting conditions.

EFFECT OF METAL CONTACT ON THE CZT DETECTOR PERFORMANCE

  • Park, Se-Hwan;Park, Hyung-Sik;Lee, Jae-Hyung;Kin, Han-Soo;Ha, Jang-Ho
    • Journal of Radiation Protection and Research
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    • v.34 no.2
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    • pp.65-68
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    • 2009
  • Metal-semiconductor contact is very important for the operating property of semiconductor detector. $Cd_{0.96}$ $Zn_{0.04}$ Te semiconductor crystal was grown with Bridgman method, and the crystal was cut and polished. EPMA (Electron Probe Micro Analyzer) and ICP-MS (Inductively Coupled Plasma Mass Spectrometry) analysis were done to obtain the chemical composition and impurity of the crystal. Metal contact was deposited with thermal evaporator on both sides of the crystal. Detectors with Au/CZT/Au and In/CZT/Au structure were made, and I-V curve and the energy spectrum were measured with the detectors. It could be seen that the detector with the In/CZT/Au structure has superior property than the detector with Au/CZT/Au structure when the crystal resistivity was low. However, the metal contact structure effect becomes low when the crystal resistivity was high.

Analysis on the Thermal Performance of an Ammonia Unit Cooler (암모니아 유니트 쿨러의 열성능 해석)

  • 최재광;김무근;박병규
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.13 no.11
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    • pp.1125-1133
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    • 2001
  • Since the surface temperature of the evaporating tube in an ammonia unit cooled is lower than the dew point of atmosphere, the moisture in the atmosphere condenses and the frost grows on the tube. The frost of liquid film decreases the heat transfer rate. The reliable analysis of the heat transfer is required for the prediction of the optimal design of the ammonia unit cooler. For the specific commercial model, the performance was numerical1y estimated for the variation of operating condition and geometric configuration. It is found that there exists an optimum range for the parameters such as mass flow rate of air and refrigerant, humidity, refrigerant quality, fin pitch, the number of step, the number of rows and the pattern of refrigerant path.

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Development of the Dynamic Simulation Program of a Multi-Inverter Heat Pump under Frosting Conditions

  • Park Byung-Duck;Lee Joo-Dong;Chung Baik-Young
    • International Journal of Air-Conditioning and Refrigeration
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    • v.12 no.3
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    • pp.113-122
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    • 2004
  • In case of heat exchangers operating under frosting condition, the thermal resistance and the air-side pressure loss increase with a growth of frost layer. In this paper, a transient characteristic prediction model of the heat transfer for a multi-inverter heat pump with frosting on its surface was presented by taking into account the change of the fin efficiency due to the growth of the frost layer. This dynamic simulation program was developed for a basic air conditioning system composed of an evaporator, a condenser, a compressor, a linear electronic expansion valve, and a bypass circuit. The theoretical model was derived from measured heat transfer and mass transfer coefficients. We also considered that the heat transfer performance was only affected by the decrease of wind flow area. The calculated results were compared with the experimental results for frosting conditions.

Influence of Ag thickness on properties of AZO/Ag/AZO Multi-layer Thin Films (AZO/Ag/AZO 다층박막의 Ag두께에 따른 특성 연구)

  • Yeon, Je ho;Kim, Hong Bae
    • Journal of the Semiconductor & Display Technology
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    • v.16 no.2
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    • pp.27-31
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    • 2017
  • AZO/Ag/AZO multi-layer films deposited on glass substrate by RF magnetron sputtering and thermal evaporator have a much better electrical properties than Al-doped ZnO thin films. The multi-layer structure consisted of three layers, AZO/Ag/AZO, the electrical and optical properties of AZO/Ag/AZO were changed mainly by thickness of Ag layers. The optimum thickness of Ag layers was determined to be $90{\AA}$ for high optical transmittance and good electrical conductivity. The Ag layers thickness $90{\AA}$ is an optical transmittance greater than 80% of visible light and the obtained multilayer thin film with the low resistivity of $8.05{\times}10-3{\Omega}cm$ and the low sheet resistance $5.331{\Omega}/sq$. Applying to TCO and Solar electrode will improve efficiency.

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Exergy analysis of R717 high-efficiency OTEC cycle (R717용 고효율 해양온도차 발전 사이클의 엑서지 분석)

  • Yoon, Jung-In;Son, Chang-Hyo;Yang, Dong-Il;Kim, Hyeon-Uk;Kim, Hyeon-Ju;Lee, Ho-Saeng
    • Journal of Advanced Marine Engineering and Technology
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    • v.37 no.8
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    • pp.829-835
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    • 2013
  • This paper describes an analysis on exergy efficiency of proposed high-efficiency R717 OTEC power system to optimize the design for the operating parameters of this system. The operating parameters considered in this study include outlet pressure in an evaporator and high turbine, inlet pressure condenser and vapor quality at cooler outlet, respectively. The main results are summarized as follows : As the outlet pressure in an evaporator and vapor quality at cooler outlet of R717 OTEC power system increases, the exergy efficiency of this system increases, respectively. But outlet pressure in the high turbine, inlet pressure in the condenser of R717 OTEC power system increases, the exergy efficiency of this system decreases, respectively. And, incase of exergy efficiency of this OTEC system, the effect of inlet pressure in an evaporator and outlet pressure in the high turbine on R717 OTEC power system is the largest and the lowest among operation parameters, respectively.

Fabrication of Artificial Sea Urchin Structure for Light Harvesting Device Applications

  • Yeo, Chan-Il;Kwon, Ji-Hye;Kim, Joon-Beom;Lee, Yong-Tak
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.380-381
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    • 2012
  • Bioinspired sea urchin-like structures were fabricated on silicon by inductively coupled plasma (ICP) etching using lens-like shape hexagonally patterned photoresist (PR) patterns and subsequent metal-assisted chemical etching (MaCE) [1]. The lens-like shape PR patterns with a diameter of 2 ${\mu}m$ were formed by conventional lithography method followed by thermal reflow process of PR patterns on a hotplate at $170^{\circ}C$ for 40 s. ICP etching process was carried out in an SF6 plasma ambient using an optimum etching conditions such as radio-frequency power of 50 W, ICP power of 25 W, SF6 flow rate of 30 sccm, process pressure of 10 mTorr, and etching time of 150 s in order to produce micron structure with tapered etch profile. 15 nm thick Ag film was evaporated on the samples using e-beam evaporator with a deposition rate of 0.05 nm/s. To form Ag nanoparticles (NPs), the samples were thermally treated (thermally dewetted) in a rapid thermal annealing system at $500^{\circ}C$ for 1 min in a nitrogen environment. The Ag thickness and thermal dewetting conditions were carefully chosen to obtain isolated Ag NPs. To fabricate needle-like nanostructures on both the micron structure (i.e., sea urchin-like structures) and flat surface of silicon, MaCE process, which is based on the strong catalytic activity of metal, was performed in a chemical etchant (HNO3: HF: H2O = 4: 1: 20) using Ag NPs at room temperature for 1 min. Finally, the residual Ag NPs were removed by immersion in a HNO3 solution. The fabricated structures after each process steps are shown in figure 1. It is well-known that the hierarchical micro- and nanostructures have efficient light harvesting properties [2-3]. Therefore, this fabrication technique for production of sea urchin-like structures is applicable to improve the performance of light harvesting devices.

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Performance Evaluation of a $CO_2$ Heat Pump System for Fuel Cell Vehicles (연료전지 자동차용 이산화탄소 열펌프 시스템의 성능평가)

  • Kim, Sung-Chul;Park, Jong-Chul;Kim, Min-Soo;Won, Jong-Phil
    • Transactions of the Korean Society of Automotive Engineers
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    • v.16 no.1
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    • pp.37-44
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    • 2008
  • The global warming potential (GWP) of $CO_2$ refrigerant is 1/1300 times lower than that of R134a. Furthermore, the size and weight of the automotive heat pump system can decrease because $CO_2$ operates at high pressure with significantly higher discharge temperature and larger temperature change. The presented $CO_2$ heat pump system was designed for both cooling and heating in fuel cell vehicles. In this study, the performance characteristics of the heat pump system were analyzed for heating, and results for performance were provided for operating conditions when using recovered heat from the stack coolant. The performance of the heat pump system with heater core was compared with that of the conventional heating system with heater core and that of the heat pump system without heater core, and thus the heat pump system with heater core showed the best performance among the selected heating systems. On the other hand, the heating performance of two different types of coolant/air heat pump systems with heater core was compared each other at various coolant inlet temperatures. Furthermore, to use exhausted thermal energy through the radiator, experiments were carried out by changing the arrangement of a radiator and an outdoor evaporator, and quantified the heating effectiveness.