• Journal of Korean Vacuum Science & Technology
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• 제3권2호
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• pp.139-144
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• 1999

Hydrogen concentration depth profiles in homoepitaxial Si(001) films grown from hyper-thermal Si beams generated by ultrahigh vacuum (UHV) ion-beam sputtering have been measured by nuclear reaction analyses as a function of film growth temperature and deposition rate. Bulk H concentrations CH in the crystalline Si layers were found tio be below detection limits, 1${\times}$1019cm-3, with no indication of significant H surface segregation at the crystalline/amorphous interface region. This is quite different than the case for growth by molecular-beam epitaxy (MBE) where strong surface segregation was observed for similar deposition conditions with average CH values of 1${\times}$1020cm-3 in the amorphous overlayer. The markedly decreased H concentrations in the present experiments are due primarily to hydrogen desorption by incident hyperthermal Si atoms. Reduced H surface coverages during growth combined with collisionally-induced filling of interisland trenches and enhanced interlayer mass transport provide an increase in critical epitaxial thicknesses by up to an order of magnitude over previous MBE results.

• 한국수소및신에너지학회논문집
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• 제10권3호
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• pp.171-175
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• 1999

진공 증착 방법으로 제작한 Pd박막(두께 $180{\sim}670{\AA}$)에 상온에서 수소기체를 흡수-방출시킬 때의 전기저항값의 변화를 측정하였다. 저항값 변화의 최대값은 시료의 두께에 따라서 달라졌다. $({\Delta}R_{\infty}/R_0)_{{\beta}min}$ 값은 $\670{\AA}$ 시료는 0.61이었으며, $\180{\AA}$ 시료는 0.34 이었다. 같은 두께의 시료일 경우 시료의 제작 조건에 따라 저항값의 변화는 다른 경향을 보였다.

• Journal of Magnetics
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• 제20권3호
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• pp.221-228
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• 2015

Colloidal particles consisted of individual nanosized magnetite grains on the surface of the silica cores were obtained by two-stage sol-gel technique. Size distribution and microstructure of the particles were analyzed using atomic force microscopy, X-ray diffraction and Nitrogen thermal desorption. Magnetic properties of the particles were studied by the method of the longitudinal nonlinear response. It has been shown that nanoparticles of magnetite have a size corresponding to a superparamagnetic state but exhibit hysteresis properties. The phenomenon was explained using the magnetostatic interaction model based on the hypothesis of iron oxide particles cluster aggregation on the silica surface.

• 환경위생공학
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• 제16권1호
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• pp.61-65
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• 2001

To review mass transfer trays from a process of view, the dependence of efficiency in loading ranges and maximum loadings with an acceptable efficiency of traditional tray have to be known. It is reported about the performance of the metallic Dualflex, relatively new high performance packing. Absorption, desorption and rectification tests as well as pressure drop and maximum capacity are concerned, indicate the superiority of the Dualflex over the general packing of comparable, main process. The process engineering characteristics show that Dualflex can be applied for all mass transfer precesses and it is to be recommended especially for those high capacity separations which requite allow low pressure drop because of the thermal sensibility of the product or because of the need of energy saving.

• Applied Science and Convergence Technology
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• 제23권4호
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• pp.169-178
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• 2014

Fluid model based numerical analysis is done to simulate a low damage etch back system for 20 nm scale semiconductor fabrication. Etch back should be done conformally with very high material selectivity. One possible mechanism is three steps: reactive radical generation, adsorption and thermal desorption. In this study, plasma generation and transport steps are analyzed by a commercial plasma modeling software package, CFD-ACE+. Ar + $CF_4$ ICP was used as a model and the effect of reactive gas inlet position was investigated in 2D and 3D. At 200~300 mTorr of gas pressure, separated gas inlet scheme is analyzed to work well and generated higher density of F and $F_2$ radicals in the lower chamber region while suppressing ions reach to the wafer by a double layer conducting barrier.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.249-249
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• 2010

The effect of forming a passivation layer was investigated in superconformal Cu gap-filling of the nano-scale trench with atomic-layer deposited (ALD)-Ru glue layer. It was discovered that the nucleation and growth of Cu during metal-organic chemical vapor deposition (MOCVD) were affected by hydrogen plasma treatments. Specifically, as the plasma pretreatment time increased, Cu nucleation was suppressed proportionally. XPS and Thermal Desorption Spectroscopy indicated that hydrogen atoms passivate the Ru surface, which leads to suppression of Cu nucleation owing to prevention of adsorption of Cu precursor molecules. For gap-fill property, sub 60-nm ALD Ru trenches without the plasma pretreatment was blocked by overgrown Cu after the Cu deposition. With the plasma pretreatment, superconformal gap filling of the nano-scale trenches was achieved due to the suppression of Cu nucleation near the entrances of the trenches. Even the plasma pretreatment with bottom bias leads to the superconformal gap-filling.

• Archives of Pharmacal Research
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• 제15권2호
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• pp.109-114
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• 1992

For the risk assessment of human exposure to volatile halogenated hydrocarbons, a dynamic purge trap/on-column cryofocusing method using capillary gas chromatograph-$^{63}Ni$ electron capture detector and thermal desorption unit was applied to analyze the free forms, metabolites of 1, 1, 2-trichloroethylene and 1, 1, 2, 2-tetrachloroethylene. The urine sample was diluted with distilled water, hydrolyzed and sealed. Then the inert gas was infused to purge out free 1, 1, 2-trichloroethylene, free 1, 1, 2, 2-tetrachloroethylene and urichloroethanol. These compounds were trapped to $Tenax^R$ / GC-gas trap device throughout clean up tube. Being undertectable to gas chromatograph directly, trichloroacetic acid was methyl esterificated and trapped in the manner above mentioned. The optimal incubation time to get best recovery of methyl ester was 4 hours at $60^circ$C. The concentrations of free volatile halogenated hydrocarbons and their metabolites in urine were obtained of free volatile halogenated hydrocarbons and their metabolites in urine were obtained from 5 healthy volunteers. This analytical method is expected to make the biological monitoring more precise and convenient.

• Bulletin of the Korean Chemical Society
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• 제17권8호
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• pp.730-735
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• 1996

The layered perovskite oxide, KSr2Nb3O10, was synthesized. The interlayer potassium cations were readily exchanged by protons in hydrochloric acid solution to give the protonation compound, HSr2Nb3O10·0.5H2O. The intercalation compounds, [NH3(CH2)nNH3]xSr2Nb3O10, were also obtained by acid-base reactions between the protonation compound and organic bases, 1,n-alkyldiamines. The interlayer distances in the intercalation compounds were linearly increased with the increase of the number of carbon (Δc/Δn=1.05 Å) in 1,n-alkyldiamines. The intercalated alkyldiammonium ions formed a paraffin-like monolayer with average tilting angle (θ) of ca. 56°. The intercalation reactions occurred stoichiometrically. The thermal decomposition process of the intercalation compounds showed distinct three steps due to the desorption of hydrated water, the decomposition of organic moiety, and the decomposition of Sr-related compounds.

• Bulletin of the Korean Chemical Society
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• 제22권3호
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• pp.267-270
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• 2001

The adsorption of chlorine on a Pt(111) surface at 90 K has been studied using scanning tunneling microscopy (STM) in ultra-high vacuum environments. The adsorbed chlorine atoms give rise to two different ordered structures, (3${\times}$3)-Cl and c(4${\times}$2)- Cl, depending on the coverage. It has been determined from the STM image that the absolute coverage of (3${\times}$3)-Cl structure is 0.44, which is not in agreement with coverage calibrated by a low energy electron diffraction technique together with an Auger electron spectrometer and a thermal desorption spectrometer. The Cl atoms bound to on-top sites at the Pt(111)(3${\times}$3)-Cl surface appeared to effectively perturb the density of states of Pt atoms, as compared with that bound to bridging sites. The other ordered structure, c(4${\times}$2)-Cl, with small domain sizes, consists of both on-top and bridge-bonded species with a saturation coverage of 0.5.

• Bulletin of the Korean Chemical Society
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• 제11권4호
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• pp.290-296
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• 1990

Ion-surface collision studies at low kinetic energies (1-100 eV) provide a unique opportunity for investigating reactions and collision dynamics at surfaces. A special ion optics system for generating an energy- and mass-selected ion beam of this energy is designed and constructed. An ultrahigh vacuum (UHV) reaction chamber, in which the ions generated from the beamline collide with a solid surface, is equipped with Auger electron spectroscopy (AES) and thermal desorption spectrometry (TDS) as in-situ surface analytical tools. The resulting beam from the system has the following characteristics : ion current of 5-50 nA, energy spread < 2eV, current stability within ${\pm}5%,$ and unit mass resolution below 20 amu. The performance of the instrument is illustrated with data representing the implantation behavior of $Ar^+$ into a graphite (0001) surface.