• Title/Summary/Keyword: Ternary compound

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A Study on Properties of Cu/In ratio on the $CuInS_2$ thin film (Cn/In 비에 따른 $CuInS_2$ 박막의 특성에 관한 연구)

  • Yang, Hyeon-Hun;Kim, Young-Jun;So, Soon-Youl;Jeong, Woon-Jo;Park, Gye-Choon;Lee, Jin;Chung, Hae-Deok
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2006.11a
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    • pp.261-262
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    • 2006
  • $CuInS_2$ thin films were synthesized by sulpurization of Cu/In Stacked elemental layer deposited onto glass Substrates by vacuum furance annealing at temperature 200[$^{\circ}C$]. And structural and electrical properties were measured in order to certify optimum conditions for growth of the ternary compound semiconductor $CuInS_2$ thin films with non-stoichiometry composition. $CuInS_2$ thin film was well made at the heat treatment 200[$^{\circ}C$] of SLG/Cu/In/S stacked elemental layer which was prepared by thermal evaporator, and chemical composition of the thin film was analyzed nearly as the proportion of 1:1:2. Physical properties of the thin film were investigated at various fabrication conditions substrate temperature, annealing and temperature, annealing time by XRD, FE-SEM and hall measurement system. At the same time, carrier concentration, hall mobility and resistivity of the thin films was $9.10568{\times}10^{17}[cm^{-3}]$, 312.502 [$cm^2/V{\cdot}s$] and $2.36{\times}10^{-2}[{\Omega}{\cdot}cm]$, respectively.

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Additional Impurity Roles of Nitrogen and Carbon for Ternary compound W-C-N Diffusion Barrier for Cu interconnect (Cu 금속 배선에 적용되는 질소와 탄소를 첨가한 W-C-N 확산방지막의 질소불순물 거동 연구)

  • Kim, Soo-In;Lee, Chang-Woo
    • Journal of the Korean Vacuum Society
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    • v.16 no.5
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    • pp.348-352
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    • 2007
  • In submicron processes, the feature size of ULSI devices is critical, and it is necessary both to reduce the RC time delay for device speed performance and to enable higher current densities without electromigration. In case of contacts between semiconductor and metal in semiconductor devices, it may be very unstable during the thermal annealing process. To prevent these problems, we deposited tungsten carbon nitride (W-C-N) ternary compound thin film as a diffusion barrier for preventing the interdiffusion between metal and semiconductor. The thickness of W-C-N thin film is $1,000{\AA}$ and the process pressure is 7mTorr during the deposition of thin film. In this work we studied the interface effects W-C-N diffusion barrier using the XRD and 4-point probe.

Fabrication and Characteristics of $CuInS_2$ thin films produced by Vacuum Evaporation (진공증착에 의해 제조된 $CuInS_2$ 박막의 제작 및 특성)

  • Yang, Hyeon-Hun;Kim, Young-Jun;So, Soon-Youl;Jeong, Woon-Jo;Park, Gye-Choon;Lee, Jin;Chung, Hae-Deok
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2006.12a
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    • pp.68-70
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    • 2006
  • $CuInS_2$ thin films were synthesized by sulpurization of Cu/In Stacked elemental layer deposited onto glass Substrates by vacuum furance annealing at temperature 200[$^{\circ}C$]. And structural and electrical properties were measured in order to certify optimum conditions for growth of the ternary compound semiconductor $CuInS_2$ thin films with non-stoichiometry composition. $CuInS_2$ thin film was well made at the heat treatment 200 [$^{\circ}C$] of SLG/Cu/In/S stacked elemental layer which was prepared by thermal evaporator, and chemical composition of the thin film was analyzed nearly as the proportion of 1:1:2. Physical properties of the thin film were investigated at various fabrication conditions substrate temperature, annealing and temperature, annealing time by XRD, FE-SEM and hall measurement system. At the same time, carrier concentration, hall mobility and resistivity of the thin films was $9.10568{\times}10^{17}[cm^{-3}]$, $312.502[cm^2/V{\cdot}s]$ and $2.36{\times}10^{-2}[{\Omega}{\cdot}cm]$, respectively.

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A Study on Properties of CuInS2 Thin Films by Cu/ln Ratio (Cu/In 비에 따른 CuInS2 박막의 특성에 관한 연구)

  • Yang, Hyeon-Hun;Park, Gye-Choon
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.20 no.7
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    • pp.594-599
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    • 2007
  • [ $CulnS_2$ ] thin films were synthesized by sulfurization of Cu/In Stacked elemental layer deposited onto glass Substrates by vacuum furnace annealing at temperature $200^{\circ}C$. And structural and electrical properties were measured in order to certify optimum conditions for growth of the ternary compound semiconductor $CuInS_2$ thin films with non-stoichiometry composition. $CuInS_2$ thin film was well made at the annealed $200^{\circ}C$ of SLG/Cu/In/S stacked elemental layer which was prepared by thermal evaporator, and chemical composition of the thin film was analyzed nearly as the proportion of 1 : 1 : 2. Physical properties of the thin film were investigated at various fabrication conditions substrate temperature, annealing and temperature, annealing time by XRD, FE-SEM and Hall measurement system. The compositional deviations from the ideal chemical formula for $200^{\circ}C$ material can be conveniently described by non-molecularity$({\Delta}x=[Cu/In]-1)$ and non-stoichiometry $({\Delta}y=[{2S/(Cu+3In)}-1])$. The variation of ${\Delta}x$ would lead to the formation of equal number of donor and accepters and the films would behave like a compensated material. The ${\Delta}y$ parameter is related to the electronic defects and would determine the type of the majority charge carriers. Films with ${\Delta}y>0$ would behave as p-type material while ${\Delta}y<0$ would show n-type conductivity. At the sane time, carrier concentration, hall mobility and resistivity of the thin films was $9.10568{\times}10^{17}cm^{-3},\;312.502cm^2/V{\cdot}s\;and\;2.36{\times}10^{-2}\;{\Omega}{\cdot}cm$, respectively.

Effects of GBF Treatment Conditions and Scrap Ratio on the Electric Conductivity of Commercial Pure Aluminum (공업용 순알루미늄의 전기전도도에 미치는 스크랩비율 및 GBF처리조건의 영향)

  • Hwang, Nam-Gyu;Kim, Young-Chan;Choi, Se-Won;Kang, Chang-Seok;Hong, Sung-Kil
    • Journal of Korea Foundry Society
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    • v.31 no.3
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    • pp.130-136
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    • 2011
  • Effects of GBF (gas bubbling filtration) treatment conditions and scrap ratio on the electric conductivity of a commercial pure aluminum for diecasting were investigated using by specific gravity and electrical conductivity measurement system, hydrogen gas analyzer, XRD, and EDS. Electrical conductivities of specimen mixed Al scrap ratio until 60% from 0% were decreased with increasing the precipitates amount and size of AlFeSi ternary intermetallic compound on the grain boundary as well as amount of porosity in the grain. On the other hand, electrical conductivities was reincreased gradually in spite of scrap ratio increase from 80% to 100%. Size of AlFeSi compound formed on the grain boundary were coarsened with the increament of scrap ratios untill 80% and GBF treatment time simultaneously.

Electrical and Structural Properties of $CuInS_2$ thin films fabricated by EBE (Electrical Beam Evaporator) Method (전자빔 증착기로 제조된 $CuInS_2$ 박막의 전기적,구조적 특성)

  • Yang, Hyeon-Hun;Kim, Young-Jun;Park, Joung-Yun;Jeong, Woon-Jo;Park, Gye-Choon
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2006.05a
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    • pp.49-51
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    • 2006
  • Ternary chalcopyrite $CuInS_2$ thin film material is very promising for photovoltaic. Power generation because of its excellent optical and semiconductor properties, $CuInS_2$ thin films were performed from S/In/Cu/SLG stacked elemental layer (SEL) method with post annealing treatment. $CuInS_2$ thin films were appeared from 0.84 to 1.27 of Cu/In composition ratio and sulfur composition ratios of $CuInS_2$ thin films fabricated. Analysis of the optical energy band gap of $CuInS_2$ value of l.5eV interior and exterior.

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Electronic Structure and Bonding in the Ternary Silicide YNiSi3

  • Sung, Gi-Hong;Kang, Dae-Bok
    • Bulletin of the Korean Chemical Society
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    • v.24 no.3
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    • pp.325-333
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    • 2003
  • An analysis of the electronic structure and bonding in the ternary silicide YNiSi₃is made, using extended Huckel tight-binding calculations. The YNiSi₃structure consists of Ni-capped Si₂dimer layers and Si zigzag chains. Significant bonding interactions are present between the silicon atoms in the structure. The oxidation state formalism of $(Y^{3+})(Ni^0)(Si^3)^{3-}$ for YNiSi₃constitutes a good starting point to describe its electronic structure. Si atoms receive electrons from the most electropositive Y in YNiSi₃, and Ni 3d and Si 3p states dominate below the Fermi level. There is an interesting electron balance between the two Si and Ni sublattices. Since the ${\pi}^*$ orbitals in the Si chain and the Ni d and s block levels are almost completely occupied, the charge balance for YNiSi₃can be rewritten as $(Y^{3+})(Ni^{2-})(Si^{2-})(Si-Si)^+$, making the Si₂layers oxidized. These results suggest that the Si zigzag chain contains single bonds and the Si₂double layer possesses single bonds within a dimer with a partial double bond character. Strong Si-Si and Ni-Si bonding interactions are important for giving stability to the structure, while essentially no metal-metal bonding exists at all. The 2D metallic behavior of this compound is due to the Si-Si interaction leading to dispersion of the several Si₂π bands crossing the Fermi level in the plane perpendicular to the crystallographic b axis.

Separation of Functionalized Heterocyclic Compounds by High Performance Liquid Chromatography(I) (고성능 액체 크로마토그래피에 의한 기능성 헤테로고리화합물의 분리(I))

  • Lee, Kwang-PilI;Cho, Yun Jin;Lee, Young Cheol
    • Analytical Science and Technology
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    • v.10 no.6
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    • pp.408-417
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    • 1997
  • Normal phase or reversed phase liquid chromatographic separation of some structural isomers of functionalized heterocyclic compounds has been carried out by using several different columns and various mobile phases. The optimal experimental conditions for separation of structural isomers were found on a ternary solvent system including alcohol as a modifier. This polar modifier is preferentially adsorbed onto strong adsorption site, leaving a more uniform population of weaker site that then serve to retain the sample. This 'deactivation' of the adsorbent leads to a number of improvements in subsequent separations. The optimal mobile phase system of separation were found on normal phase on structural isomers. Retention mechanism of normal phase system was also studied depending on adsorption strength between solute and stationary phase of column. However, retention factors of reversed phase system were found on hydrophobic interaction with solvophobic effect.

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A Study of Reactively Sputtered Ti-Si-N Diffusion Barrier for Cu Metallization (혼합기체 sputtering 법으로 증착된 Cu 확산방지막으로의 Ti-Si-N 박막의 특성 연구)

  • Park, Sang-Gi;Lee, Jae-Gap
    • Korean Journal of Materials Research
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    • v.9 no.5
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    • pp.503-508
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    • 1999
  • We have investigated the physical and diffusion barrier property of Ti-Si-N film for Cu metallization. The ternary compound was deposited by using reactive rf magnetron sputtering of a TiSi$_2$target in an Ar/$N_2$gas mixture. Resistivities of the films were in range of 358$\mu$$\Omega$-cm, to 307941$\mu$$\Omega$-cm, and tended to increase with increasing the $N_2$/Ar flow rate ratio. The crystallization of the Ti-Si-N compound started to occur at 100$0^{\circ}C$ with the phases of TiN and Si$_3$N$_4$identified by using XRD(X-ray Diffractometer). The degree of the crystallization was influenced by the $N_2$/Ar flow ratio. The diffusion barrier property of Ti-Si-N film for Cu metallization was determined by AES, XRD and etch pit by secco etching, revealing the failure temperature of 90$0^{\circ}C$ in 43~45at% of nitrogen content. In addition, the very thin compound (10nm) with 43~45at% nitrogen content remained stable up to $700^{\circ}C$. Furthermore, thermal treatment in vacuum at $600^{\circ}C$ improved the barrier property of the Ti-Si-N film deposited at the $N_2$(Ar+$N_2$) ratio of 0.05. The addition of Ti interlayer between Ti-Si-N films caused the drastic decrease of the resistivity with slight degradation of diffusion barrier properties of the compound.

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Cure Characteristics and Mechanical Properties of Ternary Accelerator System in NR/BR Compounds (NR/BR Compounds의 가황촉진제 병용에 의한 가황 특성 및 기계적 물성 연구)

  • Kim, Il-Jin;Kim, Wook-Soo;Lee, Dong-Hyun;Bae, Jong-Woo;Byon, Young-Hoo;Kim, Wonho
    • Korean Chemical Engineering Research
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    • v.47 no.4
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    • pp.403-409
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    • 2009
  • In the 1840s, Goodyear found out sulfur cure system, but cure time was too slow. So producing of rubber product takes a long time. In 1904, Oenslager et al. found that aniline is accelerated sulfur cure system. Recently, many rubber industries needed high yield and good quality. So, many researchers have studied a rubber system with fast vulcanization time and good mechanical properties. In this study, cure characteristics and mechanical properties of NR/BR compounds by accelerator with MBTS(2,2' Dithiobisbenzothiazole), TMTM(Tetramethylthiuram Monosulfide), ZDMC (Zinc dimethyldithiocarbamate), CBS(N-Cyclohexyl benzothiazolyl-2-sulfenamide), DPG(Diphenylguanidine) were evaluated. The results of the study indicate that cure charateristics($t_{90}$: 235 sec, $T_{max}$: 5.77 Nm) and mechanical properties (100, 300% modulus : 2,180, 5.656 Mpa and tear strength: 59.58 kgf/cm) of NR/BR compounds shows efficient acceleration with MBTS 1.5 phr, TMTM 0.5 phr, DPG 0.15phr. This is due to the synergistic activity of ternary accelerator system in rubber vulcanization.