• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.68-68
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• 2011

As feature size is smaller, new technology are needed in semiconductor factory such as gap-fill technology for sub 100nm, development of ALD equipment for Cu barrier/seed, oxide trench etcher technology for 25 nm and beyond, development of high throughput Cu CMP equipment for 30nm and development of poly etcher for 25 nm and so on. We are focus on gap-fill technology for sub-30nm. There are many problems, which are leaning, over-hang, void, micro-pore, delaminate, thickness limitation, squeeze-in, squeeze-out and thinning phenomenon in sub-30 nm gap fill. New gap-fill processes, which are viscous oxide-SOD (spin on dielectric), O3-TEOS, NF3 Based HDP and Flowable oxide have been attempting to overcome these problems. Some groups investigated SOD process. Because gap-fill performance of SOD is best and process parameter is simple. Nevertheless these advantages, SOD processes have some problems. First, material cost is high. Second, density of SOD is too low. Therefore annealing and curing process certainly necessary to get hard density film. On the other hand, film density by Flowable oxide process is higher than film density by SOD process. Therefore, we are focus on Flowable oxide. In this work, dielectric film were deposited by PECVD with TSA(Trisilylamine - N(SiH3)3) and NH3. To get flow-ability, the effect of plasma treatment was investigated as function of O2 plasma power. QMS (quadruple mass spectrometry) and FTIR was used to analysis mechanism. Gap-filling performance and flow ability was confirmed by various patterns.

• Nuclear Engineering and Technology
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• 제41권10호
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• pp.1285-1292
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• 2009

The effects of the narrowed upside gap on nucleate pool boiling heat transfer in a vertical annulus were investigated experimentally. For the study, a stainless steel tube with a diameter of 25.4 mm and saturated water that kept an atmospheric condition were used. The ratio between the gaps measured at the upper and the lower regions of the annulus ranged from 0.18 to 1. Two different lengths of the modified gap also were investigated. The change in heat transfer due to the modified gap became evident as the gap ratio decreased and the length of the gap increased. As the gap ratio became less than 0.51, a significant decrease in heat transfer was observed compared to the plain annulus. The longer gap size resulted in an additional decrease in heat transfer. The major cause for the tendency was attributed to the formation of lumped bubbles around the upper region of the annulus followed by the increased flow friction between the fluid and the surface around the modified gap.

• 대한기계학회논문집A
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• 제38권2호
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• pp.157-166
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• 2014

경수로 핵연료가 원자로내에서 연소되는 동안 핵연료 펠릿에서부터 피복관까지 온도해석은 핵연료 안전 해석에 있어 중요한 요소이며, 경수로 핵연료 온도 해석을 하기 위해서는 간극 모델 개발이 필수적이다. 간극 열전도도는 특성상 간극 두께값에 의존적이게 되며 이러한 특성으로 인해 다차원 간극 열전도도 모델이 비선형적 거동을 보인다. 본 연구에서는 선형화된 다차원 간극 열전도도 모델 개발을 위해 가상 연결 간극 요소를 제안하였다. 제안된 간극 연결 요소에 간극 열전도도를 적용하기 위해 등가 열전달 계수를 정의하였다. 제안된 모듈을 평가하기 위해 상용코드 ANSYS APDL 을 이용하여 열-구조 연계 해석 모듈을 구현하였으며, 다양한 예제를 통해 정확성과 수렴성을 평가하였다.

• 제어로봇시스템학회논문지
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• 제18권7호
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• pp.627-631
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• 2012

Observable mathematical model of DDM (Direct Dirve Motor) was suggested. The motor that operates the object system directly is called DDM. DDM has many strong points, however, it has a significant disadvantage, that it is more sensitive to the external force than the motor with reduction gear. In other word, if the force is applied, air gap of the motor can be perturbed. This causes not only difficulty in motor control but also even more serious problem, such as the breakdown of motor. However, if the air gap variation can be estimated, it can help prevent these problems. DDM should be modeled to estimate the air gap variation. The type of researched DDM is PMSM (Permanent Magnet Synchronous Motor) and precedent model of PMSM includes only characteristics of electro-magnetic system and rotational motion. However, suggested model should also include characteristics of translational motion of rotor to estimate the air gap variation. Also, this model should satisfy observability condition, because state observer is designed based on this model.

• 대한치과기공학회지
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• 제38권3호
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• pp.119-125
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• 2016

Purpose: The purpose of this study is to evaluate the marginal gap of all-ceramic crowns fabricated by CEREC$^{(R)}$ in-office CAD/CAM system. Methods: The mandibular first molar was selected as the abutment for the experiments. Thirty working models were prepared. VITA Mark II(VM) and VITA Enamic(VE), LAVA Ultimate(LU) blocks were milled using CEREC MCXL with CEREC 3D system to construct 10 crowns for each groups. To measure marginal gap, milled restorations were examined under digital microscope with scale under 160x magnifications. The results were statistically analyzed using the one-way ANOVA and Tukey's HSD test(${\alpha}=0.05$). Results: There was no significant difference in the marginal gap regarding to ceramic materials(p>0.05). Conclusion: Single crowns fabricated using CEREC in-office CAD/CAM system provided clinically acceptable marginal gap. This confirmed that the type of ceramic material used does not determine the precision of fit of a prosthesis.

• 센서학회지
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• 제25권5호
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• pp.310-319
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• 2016

Three types of gap sensors, a capacitive gap sensor, an eddy current gap sensor, and a Hall effect gap sensor are described and evaluated through experiments for the purpose of precise gap sensing for micrometer scale movement, and a novel type of differential hall effect gap sensor is proposed. Each gap sensor is analyzed in terms of resolution and environment dependency including temperature dependency. Furthermore, a transport system for AMOLED deposition is introduced as a typical application of gap sensors, which are recently receiving considerable attention. Based on the analyses, the proposed differential Hall effect gap sensor is found to be the most suitable gap sensor for precise gap sensing, especially for application to a transport system for AMOLED deposition. The sensor shows resolution of $0.63mV/{\mu}m$ for the overall range of the gap from 0 mm to 2.5 mm, temperature dependency of $3{\mu}m/^{\circ}C$ from $20^{\circ}C$ to $30^{\circ}C$, and a monotonic characteristic for the gap between the sensor and the target.

• Journal of Electrical Engineering and Technology
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• 제13권1호
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• pp.315-325
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• 2018

This paper investigates optimum air-gap flux distribution with third harmonic rotor flux orientation adjustment for five-phase induction motor. The technique of objective is to generate a nearly rectangular air-gap flux, and it improves iron utilization under variation loading conditions. The proportional relations between third harmonic and fundamental plane currents is usually adopted in the conventional method. However, misalignment between fundamental and third harmonic component occurs with variation loading. The iron of stator teeth is saturated due to this misalignment. This problem is solved by third harmonic rotor flux orientation adjustment simultaneously, and direction and amplitude are changed with mechanical load variation. The proposed method ensures that the air-gap flux density is near rectangular for a maximum value from no load to rated load. It is confirmed that the proposed method guarantees complete both planes decoupling with third harmonic flux orientation adjustment. The effectiveness of the proposed technique is validated experimentally.

• 반도체디스플레이기술학회지
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• 제7권3호
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• pp.41-43
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• 2008

The electro-optical characteristics of the Liquid Crystal on Silicon (hereinafter "LCOS") micro-display on vertically alignment (VA) mode were studied depending on various cell gaps. 5 different cell gaps, such as $1.4{\mu}m,\;1.8{\mu}m,\;2.1{\mu}m,\;2.4{\mu}m$ and $2.8{\mu}m$, were selected. The reflectance-voltage (R-V) characteristics, distributions of reflected light and reflectance were calculated with 3-dimmensional LC code. At the center of cell, the smallest $1.4{\mu}m$ cell gap showed the lowest reflectance and the largest $2.8{\mu}m$ cell gap showed the highest reflectance due to the surface anchoring effect. In case of $2.1{\mu}m$ cell gap, the sum of reflectance overall cell was the highest value. Considering the reflectance and RV curve characteristic, the optimized cell gap was $2.1{\mu}m$.

• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2008년도 춘계학술대회
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• pp.23-29
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• 2008

- High Density Plasma Source-CCP-Dual/Triple, RF Frequency Control - Radical/Flux Analysis - Low Pressure Process - Chamber Design (Process gap/Wall gap) - Chamber Temp. Control. - ESC Dielectric Materials - Uniform Gas Injection

• International Journal of Fluid Machinery and Systems
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• 제6권3호
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• pp.113-120
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• 2013

While performing numerical simulations, it is general industrial practice to neglect the clearance gap between the impeller and the inlet duct. In the present work, the effect of clearance gap on the performance of an industrial sized centrifugal blower is simulated for two volutes of width ratios and various flow coefficients. The results show that the clearance has a positive effect at low mass flow rates. This is observed in the pressure rise (1.3%) as well as in efficiency (0.7%). At higher mass flow rates, it has a negative effect with a drop in efficiency of 1% and pressure drop of about 1.4%. The effect of clearance gap on volute with higher width ratio is smaller when compared with the volute with smaller width ratio.