Electrical resistance ppropperties of (TaO$_x$ /TaN$_{0.1}$ /Cr/Al$_2$ O$_3$ (Bulk) thin films for supper pprecision and high resistance
(고정밀, 고저항 Resistor용 TaO$_x$ /TaN$_{0.1}$ /Cr/Al$_2$ O$_3$ (Bulk) 박막의 저항 특성에 관한 연구)
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- Proceedings of the Korean Vacuum Society Conference
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- 1993.07a
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- pp.87-88
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- 1993