• 제목/요약/키워드: TOF-SIMS

검색결과 44건 처리시간 0.036초

Investigation of Nanostructures in Homopolymer and Copolymer Films by Surface Techniques

  • Kang, Minhwa;Lee, Jihye;Lee, Yeonhee
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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    • pp.276-276
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    • 2013
  • Time-Of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS) and Atomic Force Microscopy (AFM) are the useful instruments to measure nanostructures of material surfaces. Surface pattern formation in blending homopolymer and diblock copolymer films was investigated as a function of film thickness and annealing conditions. In this study, surface structures of blending homopolymer [deuterated polystyrene (Mn 20,000), poly (methyl methacrylate) (Mn 18,000)] and diblock copolymer [Poly (deuteratedstyrene(d8)-b-methyl methacrylate) (Mn 19,500-18,100)] films were observed. The AFM result indicated that the nanostructures and film thickness depended on temperature, concentration and solvent. TOF-SIMS depth profiling was obtained for the lamellar morphology of symmetric dPS-b-PMMA which is found to orient parallel to the surface of the substrate. Elemental and molecular depth profiles measured in the negative ion mode by a Cs+ primary ion beam demonstrate variations in hydrogen, deuterium, carbon, oxygen, hydrocarbons and deuterated hydrocarbons within the diblock copolymer according to the depth.

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Label-free NanoBio Imaging for New Biology and Medical Science

  • Moon, Dae Won
    • Applied Science and Convergence Technology
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    • 제24권6호
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    • pp.203-214
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    • 2015
  • We have been developing a new label-free nanobio imaging platform using non-linear optics such as Coherent Anti-Stokes Raman Spectroscopy (CARS) and ion beam techniques based on sputtering and scattering such as Secondary Ion Mass Spectrometry (SIMS) and Medium Energy Ion Scattering Spectroscopy (MEIS), which have been widely used for atomic and molecular level analysis of semiconductors and nanomaterials. To apply techniques developed for semiconductors and nanomaterials for biomedical applications, the convergence of nano-analysis and biology were tried. Our activities on label-free nanobio imaging during the last decade are summarized in this review about non-linear optical 3D imaging, ellipsometric interface imaging, SIMS imaging, and TOF-MEIS nano analysis for cardiovascular tissues, collagen thin films, peptides on microarray, nanoparticles, and cell adhesion studies and finally the present snapshot of nanobio imaging and the future prospect are described.

전하 트랩 형 비휘발성 기억소자를 위한 재산화 산화질화막 게이트 유전악의 특성에 관한 연구 (Characteristics of the Reoxidized Oxynitride Gate Dielectric for Charge Trap Type NVSM)

  • 이상은;박승진;김병철;서광열
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1999년도 추계학술대회 논문집
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    • pp.37-40
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    • 1999
  • For the first time, charge trapping nonvolatile semiconductor memories with the deoxidized oxynitride gate dielectric is proposed and demonstrated. Gate dielectric wit thickness of less than 1 nm have been grown by postnitridation of pregrown thermal silicon oxides in NO ambient and then reoxidation. The nitrogen distribution and chemical state due to NO anneal/reoxidation were investigated by M-SIMS, TOF-SIMS, AES depth profiles. When the NO anneal oxynitride film was reoxidized on the nitride film, the nitrogen at initial oxide interface not only moved toward initial oxide interface, but also diffused through the newly formed tunnel oxide by exchange for oxygen. The results of reoxidized oxynitride(ONO) film analysis exhibits that it is made up of SiO$_2$(blocking oxide)/N-rich SiON interface/Si-rich SiON(nitrogen diffused tunnel oxide)/Si substrate. In addition, the SiON and the S1$_2$NO Phase is distributed mainly near the tunnel oxide, and SiN phase is distributed mainly at tunnel oxide/Si substrate interface.

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말디토프 질량분석을 이용한 고분자의 특성분석 (Analysis of Polymer Characteristics Using Matrix-assisted Laser Desorption/Ionization Time-of-flight Mass Spectrometry)

  • 강민정;성윤서;김문주;김명수;변재철
    • 공업화학
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    • 제28권3호
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    • pp.263-271
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    • 2017
  • 최근에, 질량분석기술의 폴리머 분석에의 응용은 MALDI-TOF MS 개발 이후 급속도로 발전하였다. 이 리뷰 논문은 현재까지 연구된 MALDI-TOF MS의 폴리머 특성분석에의 응용에 관한 최신 논문을 정리하였다. MALDI-TOF MS는 바이오 폴리머와, 합성 폴리머의 평균분자량 분석, 폴리머의 시퀀스 분석을 통한 구조의 해석, 모노머의 조성분석에까지 이용되고 있다. 엔드그룹의 특성과 농도를 분석하는 연구도 많이 진행되었고, 복잡한 폴리머의 분자량의 분석에는 SEC와 MALDI-TOF MS를 연결한 분석법을 추천한다. MALDI에 tandem MS를 결합한 분석기술이나, 이온 모빌리티를 응용한 질량분석기, TOF-SIMS, MALDI-TOF-Imaging 기술도 급격히 발전하고 있으며, 이의 폴리머 특성분석에의 응용은 별도의 분리기술이 필요 없어 앞으로 더 많이 이용될 것으로 생각된다. 분자량, 시퀀스, 그리고 모노머의 조성을 정확하게 계산해주는 소프트웨어와 고분자량(> 100 kDa)의 분석을 가능하게 해주는 기술이 개발된다면, 폴리머를 연구하는 과학자들에게 MALDI-TOF MS의 이용은 문제점을 해결하고, 목적하는 폴리머를 합성하는 데 중요한 수단이 될 것이다.

CSS test에 의한 레이저 텍스쳐 디스크의 나노-트라이볼로지 (Nano-tribology of laser textured hard disk by contact start/stop test)

  • 김우석;황평;김장교
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2000년도 춘계학술대회논문집
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    • pp.1589-1595
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    • 2000
  • 레이저 텍스쳐와 미케니칼 텍스쳐 컴퓨터 하드디스크의 마찰과 마코 매카니즘이 Contact Start/Stop test 실행후의 특성들에 대해 연구되었다. 다양한 분석적이고 기계적인 테스트 기술들이 이용되었다. 형상, 조도, 화학적 조성, 기계적 성질, CSS 로부터 기인된 코팅의 마찰특성들에 대해 그 변화들을 조사하였다. 즉, AFM(Atomic Force Microscopy), Nano-Indentation, Nano-Scratch, TOF-SIMS(Time of Flight Secondary Ion Mass Spectroscopy), AES(Auger Electronic Spectroscopy)등이 이 연구에 적용되었다. 레이저 텍스쳐 범프의 표면조도와 미케니칼 텍스쳐 지역의 표면조도는 각각 대략적으로 4nm 와 7nm 감소되었다. 탄성계수와 경도값은 CSS test후에 증가하였고 가장 바깥쪽의 코팅층의 변형강화가 생겨났다. 자성층과 Ni-P 층 사이에 점착성의 문제가 확인되었다. TOF-SIMS 분석은 C 와 $C_2F_5$의 세기에 있어서 감소를 드러냈고 이것은 코팅 표면에 윤활제 요소의 마모를 확실시 할수 있는 결과로 나타났다.

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CHARACTERIXATION OF PLASMA ION IMPLANTED SURFACES USING TIME-OF-FLIGHT SECONDARY ION MASS SPECTROMATRY

  • Lee, Yeon-Hee;Han, Seung-Hee;Lee, Jung-Hye;Yoon, Jung-Hyeon
    • 한국표면공학회지
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    • 제29권6호
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    • pp.880-883
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    • 1996
  • Plasma Source Ion Implantation (PSII) technique was used for the hydrophilization or hydrophobization of polymer surfaces. Polymers were modified with different plasma gases such as oxygen, nitrogen, argon, and tetrafluoromethane, and for varying lengths of treatment time. Plasma ion treatment of oxygen, nitrogen, argon and their mixtures increased significantly the hydrophilic properties of polymer surfaces. More hydrophobic surfaces of polymers were formed after the treatment with tetrafluoromethane. A study of plasma source ion implanted polymers was performed using contact angle measurements and Time-of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS). The TOF-SIMS spectra and depth profile were used to obtain the information about the treated surfaces of polymers. The permanence of this technique could be evaluated with respect to ageing time. The surfaces treated with PSII gave better stability than other surface modification methods.

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