• Journal of the Korea Society for Simulation
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• v.19 no.4
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• pp.111-122
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• 2010

In this study, a length adjustment algorithm for cyclic signals in manufacturing process using Time Invariant Feature point Extraction and Matching(TIFEM) is proposed. In order to precisely compensate the length of cyclic signals which have irregular length in the middle of signal as well as in the full length more feature points are needed. The extracted feature must involve information about the pattern of signal and should have invariant properties on time and scale. The proposed TIFEM algorithm extracts features having the intrinsic properties of the signal characteristics at first. By using those extracted features, feature vector is constructed for each time point. Among those extracted features, the only effective features are filtered and are chosen such as basis for the length adjustment. And then the partial length adjustment is performed by matching feature points. To verify the performance of the proposed algorithm, the experiments were performed with the experimental data mimicking the three kinds of signals generated from the actual semiconductor process.