• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.11 no.6
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• pp.436-441
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• 1998

$Pt/SrTiO_3/Pb_x(Zr_{0.52}, Ti_{0.48})O_3/SrTiO_3/Si$ structure was prepared by rf-magnetron sputtering method for use in nondestructive read out ferroelectric RAM(NDRO-FEAM). PBx(Zr_{0.52}Ti_{0.48})O_3}$(PZT) and $SrTiO_3$(STO) films were deposited respectively at the temperatures of $300^{\circ}C and 500^{\circ}C$on p-Si(100) substrate. The role of the STO film as a buffer layer between the PZT film and the Si substrate was studied using X-ray diffraction (XRD), Auger electron spectroscopy (ASE), and scanning electron microscope(SEM). Structural analysis on the interfaces was carried out using a cross sectional transmission electron microscope(TEM). For PZT/Si structure, mostly Pb deficient pyrochlore phase was formed due to the serious diffusion of Pb into the Si substrate. On the other hand, for STO/PZT/STO/Si structure, the PZT film had perovskite phase and larger grain size with a little Pb interdiffusion. the interfaces of the PZT and the STO film, of the STO film and the interface layer and $SiO_2$, and of the $SiO_2$ and the Si substate had a good flatness. Across sectional TEM image showed the existence of an amorphous layer and $SiO_2$ with 7nm thickness between the STO film and the Si substrate. The electrical properties of MIFIS structure was characterized by C-V and I-V measurements. By 1MHz C-V characteristics Pt/STO(25nm)/PZT(160nm)/STO(25nm)/Si structure, memory window was about 1.2 V for and applied voltage of 5 V. Memory window increased by increasing the applied voltage and maximum voltage of memory window was 2 V for V applied. Memory window decreased by decreasing PZT film thickness to 110nm. Typical leakage current was abour $10{-8}$ A/cm for an applied voltage of 5 V.

• Journal of radiological science and technology
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• v.33 no.3
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• pp.179-184
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• 2010

A hard X-ray microscope system for obtaining images of nano-spatial resolution has been widely studied and requires monochromatic X-ray. A multilayer mirror of 84% reflectivity was designed to acquire tungsten characteristic X-ray of 8.4 keV from the white beam generated from an X-ray tube, and the C/W multilayer mirror of $50{\times}50\;mm$ size and 5.65 nm d-spacing was fabricated by the ion-beam sputtering system. The C/W multilayer had a uniformity of 99.5%, and the structure of the multilayer mirror was verified by a TEM image. The obtainable x-ray reflectivity for the C/W multilayer mirror at 8.4 keV was estimated from measuring the X-ray reflectivity using the copper characteristic X-ray of 8.05 keV. Monochromatic X-ray of 8.4 keV was generated by combining a X-ray tube, and the reflectivity and monochromaticity were 77.1% and 0.21 keV, respectively. Monochromatic X-ray generated from the combination of an X-ray tube and an C/W multilayer mirror has enough potential to use X-ray source for hard X-ray microscope system of laboratory size. If the C/W multilayer mirror of d-spacing of a few nanometers can be fabricated, monochromatic X-ray corresponded to 17.5 keV, molybdenum characteristic X-ray, can be obtained and applied to mammography in the medical application.

• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.117-117
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• 1999

최근 광소자와 더불어 발전과 더불어 고효율의 새로운 광소자에 대한 수요가 증가되고 있다. ZnO는 이러한 특성을 가진 재료중에 한가지로서 최근 들어 그 가능성에 대한 연구가 활발히 이루어지고 있다. 특히 상온에서 exciton binding energy가 다른 재료보다 큰 60meV로 고효율의 blue, UV 발광이 가능한 재료로 알려져 있다. 본 연구에서도 광소자로서 ZnO를 활용하기 위해서 RF magnetron sputtering법을 이용하기 위하여 광특성의 향상에 목적을 두고 연구하였다. ZnO 박막은 RF magnetron sputtering법을 이용하여 sapphire (0001) 기판위에 성장시켰다. RF power는 60W에서 120W까지 변화시켰고 박막의 성장온도는 55$0^{\circ}C$와 $600^{\circ}C$로 변화시켰으며, 박막의 성장시간은 60분, ZnO target과 기판과의 거리는 4.5cm로 하여 성장시켰다. 성장된 ZnO 박막은 XRD $\theta$-rocking scan 측정을 통해서 박막의 C-축 배향성과 RBS channeling를 이용하여 ZnO 박막의 epitaxial 성장 정도를 측정하였다. 박막의 상온 발광 특성은 He-Cd laser를 사용한 photoluminescence spectra로 측정하였다. 또한 표면의 morphology는 atomic force microscope(AFM)를 이용하여 관찰하였으며 transmission electron microscopy(TEM)을 사용하여 ZnO박막의 단면적을 관찰함으로서 grain의 성장과 광특성 및 결정성과의 영향에 대해서 연구하였다. ZnO 박막의 성장온도 55$0^{\circ}C$에서 RF power를 60W에서 120W까지 변화시킬 경우 XRD $\theta$-rocking peak의 반치폭이 0.157$^{\circ}$에서 0.436$^{\circ}$까지 변화하였고 80W에서 최소값을 가졌으며 in-plain에 대한 XRD 측정 결과 ZnO 박막의 성장은 sapphire 기판에 대해서 30$^{\circ}$회전되어 성장된 것으로 알 수 있었으며 이는 ZnO [100]∥ Al2O3[110]의 관계를 갖는다는 것을 나타낸다. 광특성의 측정 결과인 PL peak의 반치폭은 133.67meV에서 89.5meV까지 변화함을 알 수 있었고 80W에서 최대값을 가졌으며 이는 RF power의 변화에 따른 결정성의 변화와는 반대되는 현상임을 알 수 있었다. 그러나 성장온도 $600^{\circ}C$일때에는 XRD $\theta$-rocking peak의 반치폭이 0.129$^{\circ}$로 결정성이 우수한 박막임을 확인할 수 있었고 PL peak의 반치폭 또한 Ar과 O2의 비율에 따라 76.32meV에서 98.77meV로 광특성도 우수한 것으로 나타났다. RBS channeling 결과 55$0^{\circ}C$에서는 $\chi$min값이 50~60%였으나 $600^{\circ}C$일 때에는 $\chi$min값이 4~5%로 박막이 epitaxial 성장을 하였다는 것을 알 수 있었다. 결정성과 광특성과의 연관성을 알아보기 위해 TEM을 이용한 박막의 cross section image를 관찰한 결과 광특성이 우수한 시편일수록 grain의 크기가 큰 것으로 나타났고 결정성이 우수한 시편의 경우에서는 XRD분석 결과에서처럼 C-축배향성이 우수한 것을 확인할 수 있었다. 이상의 결과로부터 RF magnetron sputtering 법으로 광특성이 우수한 양질의 ZnO박막 성장이 가능하였다는 것을 알 수 있었으며 광소자로써의 가능성을 확인 할 수 있었다.

• Korean Journal of Materials Research
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• v.21 no.10
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• pp.563-567
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• 2011

We report the structural characterization of $Bi_xZn_{1-x}O$ thin films grown on c-plane sapphire substrates by plasma-assisted molecular beam epitaxy. By increasing the Bi flux during the growth process, $Bi_xZn_{1-x}O$ thin films with various Bi contents (x = 0~13.17 atomic %) were prepared. X-ray diffraction (XRD) measurements revealed the formation of Bi-oxide phase in (Bi)ZnO after increasing the Bi content. However, it was impossible to determine whether the formed Bi-oxide phase was the monoclinic structure ${\alpha}-Bi_2O_3$ or the tetragonal structure ${\beta}-Bi_2O_3$ by means of XRD ${\theta}-2{\theta}$ measurements, as the observed diffraction peaks of the $2{\theta}$ value at ~28 were very close to reflection of the (012) plane for the monoclinic structure ${\alpha}-Bi_2O_3$ at 28.064 and the reflection of the (201) plane for the tetragonal structure ${\beta}-Bi_2O_3$ at 27.946. By means of transmission electron microscopy (TEM) using a diffraction pattern analysis and a high-resolution lattice image, it was finally determined as the monoclinic structure ${\alpha}-Bi_2O_3$ phase. To investigate the distribution of the Bi and Bi-oxide phases in BiZnO films, elemental mapping using energy dispersive spectroscopy equipped with TEM was performed. Considering both the XRD and the elemental mapping results, it was concluded that hexagonal-structure wurtzite $Bi_xZn_{1-x}O$ thin films were grown at a low Bi content (x = ~2.37 atomic %) without the formation of ${\alpha}-Bi_2O_3$. However, the increased Bi content (x = 4.63~13.17 atomic %) resulted in the formation of the ${\alpha}-Bi_2O_3$ phase in the wurtzite (Bi)ZnO matrix.

• Ecology and Resilient Infrastructure
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• v.8 no.3
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• pp.143-153
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• 2021

The growth inhibition effects of M. aeruginosa were verified using large volume (7.2 L) of algae samples and ultrasonication (high frequency of 1.6 MHz vs. low frequency of 23 kHz) in lab-scale experiment. The chlorophyll-a (chl-a) and cell number decreased gradually after 6 hr sonication with high frequency of 1.6 MHz whereas both decreased sharply after 6 hr sonication with low frequency of 23 kHz. Additionally, the first order degradation coefficient (k) values after sonication were greater than those during sonication. These results indicate that relatively low sonication energy per volume may affect the cell membrane and internal organs of M. aeruginosa in a slow and retarded manner and resulted in gradual decrease of cell numbers of M. aeruginosa. Based on the comparison of chl-a and cell number of M. aeruginosa after sonication, low frequency of 23 kHz is superior for growth inhibition of M. aeruginosa, since low frequency of 23 kHz easily penetrates the cell membrane and ruptures the internal organs including gas vesicles. As is evident in SEM and TEM images, ruptured cell membranes were clearly observed for low frequency of 23 kHz. Finally, the microcystin-LR in water is not detected and considered to be harmless in aquaculture systems.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.31 no.1
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• pp.32-36
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• 2021

This study was investigated in carbon diffusion behavior of laser-carburized TiZrN coating layer and the changes of mechanical properties. The carbon paste was deposited on TiZrN coatings, and the laser was irradiated to carburize into the coatings. The XRD peak corresponding to the (111) plane shifted to a lower angle after the carburization, showing the lattice expansion by doped carbon. The decreased grain size implied the compression by the grain boundary diffusion of carbon. The XPS spectra for the bonding states of carbon was analyzed that carbon was substitute to nitrogen atoms in TiZrN, as carbide, through the thermal energy of laser. In addition, the combination of sp2 and sp3 hybridized bonds represented the formation of an amorphous carbon. The cross-sectional TEM image and the inverse FFT of the TiZrN coating after carburizing were observed as the wavy shape, confirming the amorphous phase located in grain boundaries. After the carburization, the hardness increased from 34.57 GPa to 38.24 GPa, and the friction coefficient decreased by 83 %. In particular, the ratio of hardness and elastic modulus (H/E) which is used as an index of the elastic recovery, increased from 0.11 to 0.15 and the wear rate improved by 65 %.

• Applied Microscopy
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• v.36 no.2
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• pp.73-82
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• 2006

Major contributions has been made in cellular ultrastructure studies with the use of high voltage electron microscopy (HVEM) and tomography. Applications of HVEM, accompanied by appropriate image processing, have provided great improvements in the analysis of three-dimensional cellular structures. In the present study, structural patterns of the crystalline bodies that are distinguished in mesophyll plastids of CAM-performing Sedum rotundifolium L., have been investigated using HVEM and tomography. Tilting, and diffraction pattern analysis were performed during the investigation. The titlting was performed at ${\pm}60^{\circ}\;with\;2^{\circ}$ increments while examining serial sections ranging from 0.125 to $1{\mu}m$ in thickness. The young plastids exhibited crystalline inclusion bodies that revealed a peculiar structural pattern. They were irregular in shape and also variable in size. Their structural attributes affected the plastid morphology. The body consisted of a large number of tubular elements, often reaching up to several thousand in number. The tubular elements typically aggregated to form a fluster The elements demonstrated either a parallel or lattice arrangement depending on the sectioning angle. The distance between the elements was approximately 20nm as demonstrated by the diffraction analysis. HVEM examination of the serial sections revealed an occasional fusion or branching of elements within the inclusion bodies. Finally, a three-dimensional reconstruction of the plastid crystalline bodies has been attempted using two different image processing methods.

• Applied Microscopy
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• v.38 no.1
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• pp.51-61
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• 2008

This simulation study examined the effect of data acquisition error including the data type of TEM image, and incident beam intensity of the tilt series on 3D tomograms. Simulation was performed with the 3D head phantom model of Kak and Slaney, and the slightly modified 3D head phantom model with enhanced difference in absorption coefficients. Reconstructed tomogram for the original head phantom model using 8-bit gray-scale image was distorted with extremely high level of noise, while an acceptable result was obtained for the modified model. The results for the original model using wrong formulation for the transmitted beam intensity was proved to be incorrect. The high level of noise along the z direction was found in case of the modified model. On the other hand, the wrong value of incident beam intensity in both models gave distorted results. In order to reconstruct an artifacts-free 3D structure from the projections with invisible features in electron tomography, the 16-bit projection images should be used with the correct incident beam intensity which is applied to Beer's law.

• Journal of Korea Foundry Society
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• v.17 no.6
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• pp.560-568
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• 1997

The dissolution behavior of secondary solidification phases in squeeze cast Al-3.9wt%Cu-1.5wt%Si-1.0wt%Mg has been studied using a combination of optical microscope, image analyzer, scanning electron microscope(SEM), energy dispersive spectrometer(EDS), X-ray diffractometer(XRD) and differential thermal analyzer (DTA). Special emphasis was placed on the investigation of the effects of the nonequilibrium heat treatment on the dissolution of the second solidification phases. Ascast microstructure consisted of primary solidification product of ${\alpha}-Al$ and secondary solidification products of $Al_2Cu$, $Mg_2Si$ and $Al_2CuMg$. Equilibrium and non-equilibrium solution treatments were carried out at the temperatures of $495^{\circ}C$, $502^{\circ}C$ and $515^{\circ}C$ for 3 to 5 hours. The amount of the dissolved secondary phases increased with increasing solution treatment temperature, for example, area fractions of $Al_2Cu$, $Mg_2Si$ and $Al_2CuMg$ were approximately 0%, 1.6% and 4.2% after solution treatment at $495^{\circ}C$ for 5hours, and were approximately 0%, 0.36% and 2% after solution treatment at $515^{\circ}C$ for 5hours. The best combination of tensile properties was obtained when the as-cast alloy was solution treated at $515^{\circ}C$ for 3hours followed by aging at $180^{\circ}C$ for 10 hours. Detailed DTA and TEM study showed that the strengthening behavior during aging was due to enhanced precipitation of the platelet type fine ${\theta}'$ phase.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.242-242
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• 2016

Magnetite, Fe3O4, is a ferrimagnet with a cubic inverse spinel structure and exhibits a metal-insulator, Verwey, transition at about 120 K.[1] It is predicted to possess as half-metallic nature, 100% spin polarization, and high Curie temperature (850 K). Cobalt ferrite is one of the most important members of the ferrite family, which is characterized by its high coercivity, moderate magnetization and very high magnetocrystalline anisotropy. It has been reported that the CoFe2O4/Fe3O4 bilayers represent an unusual exchange-coupled system whose properties are due to the nature of the oxide-oxide super-exchange interactions at the interface [2]. In order to evaluate the effect of interface interactions on magnetic and transport properties of ferrite and cobalt ferrite, the CoFe2O4/Fe3O4 superlattices on MgO (100) substrate have been fabricated by molecular beam epitaxy (MBE) with the wave lengths of 50, and $200{\AA}$, called $25{\AA}/25{\AA}$ and $100{\AA}/100{\AA}$, respectively. Streaky RHEED patterns in sample $25{\AA}/25{\AA}$ indicate a very smooth surface and interface between layers. HR-TEM image show the good crystalline of sample $25{\AA}/25{\AA}$. Interestingly, magnetization curves showed a strong antiferromagnetic order, which was formed at the interfaces.