• 한국군사과학기술학회지
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• 제20권2호
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• pp.231-237
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• 2017

The profile of unpaved road is an important issue in the reliability of endurance test. Efforts on measuring 2D road profile and analyzing the severity have been continued in the study of performing reliable endurance test evaluations through reflecting the results of such measurement and analysis. However, 2D road profile has limitation in measuring the profile in the road width direction because data is obtained along the trailer wheel track. Therefore, in order to measure 3-dimensional shape of road surface and construct severity DB of 3D road profile, Changwon Proving Ground(CPG) of Agency for Defense Development(ADD) developed 3D profilometer which is composed of laser scanner, IMU, GPS, encoder and so on. This paper focuses on the analysis of unpaved road severity using 3D road profile for army operation roads. This results will be used to manage test courses severity of CPG.

• 한국정밀공학회지
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• 제14권9호
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• pp.22-29
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• 1997

This paper describes a three dimensional profile measurement method for sheet metal products which have flexible and porous sculptured surfaces. Shadow masks are used as measuring objects for practical implementation or this study. The shadow masks are located inside the fluorescent glasses of monitors for televisions or computers and used to prevent electron guns from interfering between pixels. Three dimen- sional surface profiles are measured by adopting a software autofocusing technique to capture focused images. The experimental results show that the method is very effecive and suitable for sheet meal prod- ucts with flexible and porous surfaces.

• 한국재료학회지
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• 제22권9호
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• pp.482-488
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• 2012

To fabricate a precise micro metal mold, the electrochemical etching process has been researched. We investigated the electrochemical etching process numerically and experimentally to determine the etching tendency of the process, focusing on the current density, which is a major parameter of the process. The finite element method, a kind of numerical analysis, was used to determine the current density distribution on the workpiece. Stainless steel(SS304) substrate with various sized square and circular array patterns as an anode and copper(Cu) plate as a cathode were used for the electrochemical experiments. A mixture of $H_2SO_4$, $H_3PO_4$, and DIW was used as an electrolyte. In this paper, comparison of the results from the experiment and the numerical simulation is presented, including the current density distribution and line profile from the simulation, and the etching profile and surface morphology from the experiment. Etching profile and surface morphology were characterized using a 3D-profiler and FE-SEM measurement. From a comparison of the data, it was confirmed that the current density distribution and the line profile of the simulation were similar to the surface morphology and the etching profile of the experiment, respectively. The current density is more concentrated at the vertex of the square pattern and circumference of the circular pattern. And, the depth of the etched area is proportional to the current density.

• 한국정밀공학회지
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• 제31권7호
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• pp.605-613
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• 2014

Scanning white-light interferometry is an important measurement option for many surfaces. However, serious profile measurement errors can be present when measuring free-form surfaces being highly curved or tilted. When the object surface slope is not zero, the object and reference rays are no longer common path and optical aberrations impact the measurement. Aberrations mainly occur at the beam splitter in the interference objective and from misalignment in the optical system. Both effects distort the white-light interference signal when the surface slope is not zero. In this paper, we describe a modified version of white-light interferometry for eliminating these measurement errors and improving the accuracy of white-light interferometry. Moreover, we report systematic errors that are caused by optical aberrations when the object is not flat, and compare our proposed method with the conventional processing algorithm using the random ball test.

• 제어로봇시스템학회논문지
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• 제14권6호
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• pp.519-522
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• 2008

As industry of a semiconductor and LCD industry have been rapidly growing, precision technologies of machining such as etching and 3D measurement are required. Stylus has been important measuring method in traditional manufacturing process. However, its disadvantages are low measuring speed and damage possibility at contacting point. To overcome mentioned disadvantage, non-contacting measurement method is needed such as PMP(Phase Measuring Profilometry), WSI(white scanning interferometer) and Confocal Profilometry. Among above 3 well-known methods, WSI started to be applied to FPD(flat panel display) manufacturing process. Even though it overcomes 21t ambiguity of PMP method and can measure objects which has specular surface, the measuring speed and vibration coming from manufacturing machine are one of main issue to apply full automatic total inspection. In this study, We develop high speed WSI system and algorithm to reduce unknown noise. The developing WSI and algorithm are implemented to measure 3D surface of wafer. Experimental results revealed that the proposed system and algorithm are able to measure 3D surface profile of wafer with a good precision and high speed.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1543-1546
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• 2005

This paper presents a method to measure a large surface shape using atomic force microscopy, which has been used mostly for measuring over very tiny surfaces. Experiments are performed to measure a step height and a slope of a test sample. The proposed method is rigorously compared with the coordinate measuring machine. The repetition accuracy and the effects of the set point are also studied. The experimental results show that the proposed method is reliable and should be effective to measure both the nano-accuracy surface profile as well as the micro-accuracy global shape of a macro/micro parts using atomic force microscope.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1995년도 춘계학술대회 논문집
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• pp.73-76
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• 1995

In this study, the slab waveguide was fabricated using potassium-nitride(KNO$_3$) or silver-nitride (AgNO$_3$) molten sources by ion-exchange process. The effective refractive indices of waveguide were measured by Prism-Coupling method. and The characteristics of waveguide(mode dispersion, effective diffusion depth. surface refractive index, diffusion coefficient, and refractive index profile etc,) were investigated by WKB method, In the case of potassium ion-exchange, the computer calculation showed that the refractive index profile of waveguide followed Gaussian function, the surface refractive index increased with ion-exchange time and the effective diffusion depth increased a little as ion-exchange time increased, while the surface refractive index of silver ion-exchanged waveguide decreased with ion-exchange time because of the ion depletion on the surface of waveguide, and the effective diffusion depth seriously with ion-exchange tim. Double ion-exchanged waveguide was fabricated by performing silver ion-exchange after potassium ion-exchange. Double ion-exchanged waveguide had a tight mode binding force since the surface refractive index was larger than single step ion-exchanged waveguide.

• 한국광학회:학술대회논문집
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• 한국광학회 2003년도 하계학술발표회
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• pp.146-147
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• 2003

산업계에서의 다양한 제품 개발로 인해 새로운 형상 측정기술이 요구된다. 칩패키지와 실리콘 웨이퍼로 대표되는 광산란 표면 특성을 가진 제품들의 형상 측정은 거친 표면을 가진 반면 수마이크로의 형상 측정 정밀도를 요구하기 때문에 기존의 측정법으로는 기대하는 성과를 이루지 못해왔다. 현재까지 기존의 정통적인 측정법을 통해 측정 시도되어 온 방법들은 다음과 같이 두 방법으로 요약된다. 첫째, Kwon과 Han등은 경면(specular surface)을 측정하던 정통적인 간섭계에 10.6$\mu$m파장의 $CO_2$레이저를 광원으로 사용함으로써 가시광선 영역에서의 광산란 표면을 적외부 영역에서 경면화 하여 측정하였다. (중략)

• 한국정밀공학회지
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• 제22권4호
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• pp.151-158
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• 2005

An important component of a cooling tower is an axial fan, and there happens distortion in its shape which brings significant loss of efficiency. In this paper, a surface profile measuring system for large size axial fan of cooling towers is developed. A laser sensor is used as a measuring device and aluminum profiles and stepping motors are engaged into the system as frame structure and driving devices respectively. The measuring data are compared to the design data to compute the distortion of the axial fans. Two types of errors, axial and twist errors, are used to represent the precision of axial fan distortion. Genetic algorithm is used to solve the optimization problem during computing the precision. Results are displayed three dimensionally in a solid-modeler as well as 2-D drawings to help users find it with ease.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 추계학술대회 논문집
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• pp.838-841
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• 2000

To improve the accuracy of products and improve the product quality, we need to enhance the machining accuracy of the machine tools. To this point of view, measurement and inspection of finished part as well as error analysis of machine tools has been studied for last several decades. OMM(On the Machine Measurement) has been issued to alternate with CMM, pointing out disadvantages of high expenses and lots of setting time in CMM. In this paper, we study 1) the spherical surface manufacturing by volumetric error compensation of machine tool, 2) the system development of OMM without detaching work piece from a bed of machine tool after working. 3) the generation of the finished part profile by On the machine measurement. Furthermore, the output of OMM is compared with that of CMM, and verified the feasibility of the measurement system.