• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.58-58
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• 1999

The diamond films which can be applied to SOD (silicon-on-diamond) structure were deposited on Si(100) substrate using CO/H2 CH4/H2 source gases by microwave plasma chemical vapor deposition(MPCVD), and SOD structure have been fabricated by poly-silicon film deposited on the diamond/Si(100) structure y low pressure chemical vapor deposition(LPCVD). The phase of the diamond film, surface morpholog, and diamond/Si(100) interface were confirmed by X-ray diffraction(XRD), scanning electron microscopy(SEM), atomic force microscopy(AFM), and Raman spectroscopy. The dielectric constant, leakage current and resistivity as a function of temperature in films are investigated by C-V and I-V characteristics and four-point probe method. The high quality diamond films without amorphous carbon and non-diamond elements were formed on a Si(100), which could be obtained by CO/H2 and CH4/H2 concentration ratio of 15.3% and 1.5%, respectively. The (111) plane of diamond films was preferentially grown on the Si(100) substrate. The grain size of the films deposited by CO/H2 are gradually increased from 26nm to 36 nm as deposition times increased. The well developed cubo-octahedron 100 structure nd triangle shape 111 are mixed together and make smooth and even film surface. The surface roughness of the diamond films deposited by under the condition of CO/H2 and CH4/H2 concentration ratio of 15.3% and 1.5% were 1.86nm and 3.7 nm, respectively, and the diamond/Si(100) interface was uniform resistivity of the films deposited by CO/H2 concentration ratio of 15.3% are obtained 5.3, 1$\times$10-9 A/cm, 1 MV/cm2, and 7.2$\times$106 $\Omega$cm, respectively. In the case of the films deposited by CH4/H2 resistivity are 5.8, 1$\times$10-9 A/cm, 1 MV/cm, and 8.5$\times$106 $\Omega$cm, respectively. In this study, it is known that the diamond films deposited by using CO/H2 gas mixture as a carbon source are better thane these of CH4/H2 one.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.169-169
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• 2008

To keep pace with scaling trends of CMOS technologies, high-k metal oxides are to be introduced. Due to their high permittivity, high-k materials can achieve the required capacitance with stacks of higher physical thickness to reduce the leakage current through the scaled gate oxide, which make it become much more promising materials to instead of $SiO_2$. As further studying on high-k, an understanding of the relation between the etch characteristics of high-k dielectric materials and plasma properties is required for the low damaged removal process to match standard processing procedure. There are some reports on the dry etching of different high-k materials in ICP and ECR plasma with various plasma parameters, such as different gas combinations ($Cl_2$, $Cl_2/BCl_3$, $Cl_2$/Ar, $SF_6$/Ar, and $CH_4/H_2$/Ar etc). Understanding of the complex behavior of particles at surfaces requires detailed knowledge of both macroscopic and microscopic processes that take place; also certain processes depend critically on temperature and gas pressure. The choice of $BCl_3$ as the chemically active gas results from the fact that it is widely used for the etching o the materials covered by the native oxides due to the effective extraction of oxygen in the form of $BCl_xO_y$ compounds. In this study, the surface reactions and the etch rate of $Al_2O_3$ films in $BCl_3/Cl_2$/Ar plasma were investigated in an inductively coupled plasma(ICP) reactor in terms of the gas mixing ratio, RF power, DC bias and chamber pressure. The variations of relative volume densities for the particles were measured with optical emission spectroscopy (OES). The surface imagination was measured by AFM and SEM. The chemical states of film was investigated using X-ray photoelectron spectroscopy (XPS), which confirmed the existence of nonvolatile etch byproducts.

• Journal of the korean academy of Pediatric Dentistry
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• v.24 no.2
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• pp.460-474
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• 1997

The purpose of this study was to evaluate and compare the effectiveness of various low-viscosity resin systems used as rebonding agents to prevent microleakage at the margins of class I composite resin restorations. Seventy sound human premolars were selected for experiment. Class I cavities were prepared and each cavity was conditioned with a 37% phosphoric acid for 15 sec, rinsed with water for 15 sec, and dried with compressed air. Bonding agent(Scotchbond Multipurpose, 3M Co.) was applied and a hybrid composite resin (Z-100, 3M Co.) was placed using an incremental technic. The excess cured composite resin was carefully removed with Sof-Lex discs(3M Co.) to expose the original margins of the cavity. The following seven groups were established : group 1 was not rebonded and used as control group ; group 2 was rebonded with a Scotchbond Multipurpose(3M Co.) and finished ; group 3 was rebonded with a Fortify(BISCO) and finished ; group 4 was rebonded with a Concise white sealant(3M Co.) and finished ; group 5 was rebonded with a Concise white sealant(3M Co.) and not finished ; group 6 was rebonded with a P&F sealant(BISCO) and finished; group 7 was rebonded with a P&F sealant(BISCO) and not finished. The specimens were then subjected to 500 thermocycles between 5 & 65 with a 10 see dwell time and immersed in 2% methylene blue dye solution for 24 hours and sectioned with low-speed diamond cutter into two part under water condition. The extent of microleakage at rebonded margins was evaluated microscopically and scored for dye penetration according to the following scale : 0=no dye penetration ; 1=dye penetration to half-way along axial wall between enamel surface and DEJ ; 2=dye penetration beyond halfway along axial wall between enamel surface and DEJ ; 3=dye penetration to the full depth of DEJ or beyond DEJ. Selected samples were prepared for SEM observation to determine the depth of penetration of the rebonding agent into the marginal interface. The obtained results were as follows: 1. In the group 2 and 3, which is rebonded with a Scotchbond Multipupose and Fortify, dye penetration score were decreased significantly than that of group 1 (P<0.05), but group 4 and 6 were not statistically different from group 1(P>0.05). 2. There were significant differences between group 4, 6 and group 5, 7 when compared by dye penetration score (P<0.05). 3. In the SEM observation, Scotchbond Multipurpose and Fortify were penetrated within $30-40{\mu}m$ depth of the outermost surface. However, both sealants were failed to penetrate into the debonded interface.

• Restorative Dentistry and Endodontics
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• v.31 no.4
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• pp.282-289
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• 2006

The purpose of this study was to compare the ability of three resin surface sealants to prevent microleakage in Class V composite resin restorations. Forty Class V cavities with the occlusal margin in enamel and gingival margin in dentin were prepared on the buccal surfaces of sound extracted molars, and restored with composite resin. Restorations were randomly assigned into one of four equal groups (n = 10): a control group, without resin sealing, and three experimental groups in which margins were sealed with Fortify Plus, Biscover and Permaseal, respectively. Specimens were thermocycled, immersed in a 2% methylene blue solution for 4 hours, sectioned longitudinally, and observed the leakage at the occlusal and gingival margins. The result was analyzed using Kruskal-Wallis test, Mann-Whitney test and Wilcoxon signed rank test. In conclusion, the ability to reduce microleakage at occlusal margins was similar in all of three sealants. However at gingival margin, it depended on the type of used resin surface sealant. At gingival margin. control and Fortify Plus group showed statistically higher microleakage than PermaSeal group. and Fortify Plus group also showed higher microleakage than BisCover group (p < 0.05).

• Journal of the Korea Academia-Industrial cooperation Society
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• v.19 no.6
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• pp.160-166
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• 2018

The worldwide semi-conductor market has been growing for a long time. Manufacturing lines of semi-conductors need to handle several types of toxic gases. In particular, they need to be controlled accurately in real time. This type of toxic gas control system consists of many different kinds of parts, e.g., fittings, valves, tubes, filters, and regulators. These parts obviously need to be manufactured precisely and be corrosion resistant because they have to control high pressure gases for long periods without any leakage. For this, surface machining and hardening technologies of the metal block and metal gasket need to be studied. This type of study depends on various factors, such as geometric shapes, part materials, surface hardening method, and gas pressures. This paper presents strong concerns on a series of simulation processes regarding the differences between the inlet and outlet pressures considering several different fluid velocity, tube diameters, and V-angles. Indeed, this study will very helpful to determine the important design factors as well as precisely manufacture these parts. The EP (Electrolytic Polishing) process was used to obtain cleaner surfaces, and hardness tests were carried out after the EP process.

• The Journal of Korean Academy of Prosthodontics
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• v.47 no.2
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• pp.182-190
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• 2009

Statement of problem: Microleakage at the occlusal and gingival margin of Class V cavities restored with composite resin has traditionally been considered an obstacle to successful restoration. Purpose: The aim of this study was to assess the effectiveness of three different surface sealants(Fortify, Permaseal and Biscover LV) on the marginal sealing of Class V light-activated composite resin restorations(Z250). Material and methods: Forty noncarious human premolars and molars extracted within a three-month period were selected. Class V cavities with the occlusal margin in enamel and gingival margin in cementum were prepared in both buccal and lingual surfaces. The teeth, randomly assigned in four groups with twenty cavities in each group, were restored with composite resin after applying an adhesive system(Clearfil SE bond). After the finishing and polishing procedures, the restorations were covered with a specific surface sealants, except for the control samples, which were not sealed. After placing restorations, the specimens were thermocycled, and immersed in a 2% methylene blue solution for twenty four hours and sectioned longitudinally. The marginal microleakage was evaluated at the occlusal and gingival interfaces using a microscope and compared among the four groups using ANOVA test and Wilcoxon Rank-Sum test($\alpha$=0.05). Results: Statistical analysis showed that there was significantly less leakage when the surface sealants were used than there was in control group(P<.05). There were no significant differences of microleakage at occlusal and gingival margins among groups. There were no significant differences between microleakage of occlusal and gingival margins in each group. Fortify was not statistically different from control group at the gingival margin(P>.05). Conclusion: Application of surface sealants was an effective method of surface coating in reducing microleakage at occlusal and gingival margins of Class V composite resin restorations. However, it is certain that some microleakage still occurred despite the application of surface sealants, especially gingival margins.

• Restorative Dentistry and Endodontics
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• v.27 no.2
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• pp.142-149
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• 2002

Low-viscosity composite resins may produce better sealed margins than stiffer compositions (KempScholte and Davidson, 1988: Crim, 1989). Plowable composites have been recommended for use in Class V cavities but it is also controversial because of its high rates of shrinkage. On the other hand, in the study comparing elastic moduli and leakage, the microfill had the least leakage (Rundle et at. 1997) Furthermore, in the 1996 survey of the Reality Editorial Team, microfills were the clear choice for abfraction lesions. The purpose of this study was to evaluate the microleakage of 6 compostite resins (2 hybrids, 2 microfills, and 2 flowable composites) with and without load cycling. Notch-shaped Class V cavities were prepared on buccal surface of 180 extracted human upper premolars on cementum margin. The teeth were randomly divided into non-load cycling group (group 1) and load cycling group (group 2) of 90 teeth each. The experimental teeth of each group were randomly divided into 6 subgroups of 15 samples. All preparations were etched, and Single bond was applied. Preparations were restored with the following materials (n=15) : hybrid composite resin [Z250(3M Dental Products Inc. St. Paul, USA), Denfil(Vericom, Ahnyang, Korea)], microfill [Heliomolar RO(Vivadent, Schaan, Liechtenstein), Micronew(Bisco Inc. Schaumburg, IL, USA)], and flowable composite［AeliteFlo(Bisco Inc. Schaumburg, IL, USA), Revolution(Kerr Corp. Orange, CA, USA)]. Teeth of group 2 were subjected to occlusal load (100N for 50,000 cycles) using chewing simulator(MTS 858 Mini Bionix II system, MTS Systems Corp. Minn. USA). All samples were coated with nail polish 1mm short of the restoration, placed in 2％ methylene blue for 24 hours, and sectioned with a diamond wheel. Enamel and dentin/cementum margins were analyzed for microleakage on a sclale of 0 (no leakage) to 3 (3/3 of wall). Results were statistically analyzed by Kruscal-Wallis One way analysis, Mann-Whitney U-test, and Student-Newmann-Keuls method. (p = 0.05) Results : 1. There was significantly less microleage in enamel margins than dentinal margins of all groups (p＜0.05) 2. There was no significant between six composite resin in enamel margin of group 1. 3. In dentin margin of group 1, flowable composite had more microleakage than others but not of significant differences. 4. there was no significant difference between six composite resin in enamel margin of group 2. 5. In dentin margin of group 2, the microleakage were R＞A =H=M＞D＞Z. But there was no significant differences. 6. In enamel margins, load cycling did not affect the marginal microleakage in significant degree. 7. In enamel margins, load cycling did affect the marginal microleakage only in Revolution. (p＜0.05).

• Restorative Dentistry and Endodontics
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• v.26 no.4
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• pp.263-272
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• 2001

The aim of this study was to investigate the influence of four different light curing modes on the marginal leakage of Class V composite resin restoration. Eighty extracted human premolars were used. Wedge-shaped class Y cavities were prepared on the buccal surface of the tooth with high-speed diamond bur without bevel. The cavities were positioned half of the cavity above and half beyond the cemento-enamel junction. The depth, height, and width of the cavity were 2 mm, 3 mm and 2 mm respectively. The specimens were divided into 4 groups of 20 teeth each. All the specimen cavities were treated with Prime & Bond$^{R}$ NT dental adhesive system (Dentsply DeTrey GmbH, Germany) according to the manufacturer's instructions and cured for 10 seconds except group VI which were cured for 3 seconds. All the cavities were restored with resin composite Spectrum$^{TM}$ TPH A2 (Dentsply DeTrey GmbH, Germany) in a bulk. Resin composites were light-cured under 4 different modes. A regular intensity group (600 mW/${cm}^2$, group I) was irradiated for 30 s, a low intensity group (300 mW/${cm}^2$, group II) for 60 s and a ultra-high intensity group (1930 mW/${cm}^2$, group IV) for 3 s. A pulse-delay group (group III) was irradiated with 400 mW/${cm}^2$ for 2 s followed by 800 mW/${cm}^2$ for 10 s after 5 minutes delay. The Spectrum$^{TM}$ 800 (Dentsply DeTrey GmbH, Germany) light-curing units were used for groups I, II and III and Apollo 95E (DMD, U.S.A.) was used for group IV. The composite resin specimens were finished and polished immediately after light curing except group III which were finished and polished during delaying time. Specimens were stored in a physiologic saline solution at 37$^{\circ}C$ for 24 hours. After thermocycling (500$\times$, 5-55$^{\circ}C$), all teeth were covered with nail varnish up to 0.5 mm from the margins of the restorations, immersed in 37$^{\circ}C$, 2% methylene blue solution for 24 hours, and rinsed with tap water for 24 hours. After embedding in clear resin, the specimens were sectioned with a water-cooled diamond saw (Isomet$^{TM}$, Buehler Co., Lake Bluff, IL, U.S.A.) along the longitudinal axis of the tooth so as to pass the center of the restorations. The cut surfaces were examined under a stereomicroscope (SZ-PT Olympus, Japan) at ${\times}$25 magnification, and the images were captured with a CCD camera (GP-KR222, Panasonic, Japan) and stored in a computer with Studio Grabber program. Dye penetration depth at the restoration/dentin and the restoration/enamel interfaces was measured as a rate of the entire depth of the restoration using a software (Scion image, Scion Corp., U.S.A.) The data were analysed statistically using One-way ANOVA and Tukey's method. The results were as follows : 1. Pulse-Delay group did not show any significant difference in dye penetration rate from other groups at enamel and dentin margins (p>0.05) 2. At dentin margin, ultra-high intensity group showed significantly higher dye penetration rate than both regular intensity group and low intensity group (p<0.05). 3. At enamel margin, there were no statistically significant difference among four groups (p>0.05). 4. Dentin margin showed significantly higher dye penetration rate than enamel margin in all groups (p<0.05).

• Restorative Dentistry and Endodontics
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• v.32 no.6
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• pp.522-529
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• 2007

The purpose of this study was to compare the apical leakage of the root canal filled with the System B and the EndoTwinn(the combined application of heat and ultrasonic vibration). Sixty extracted premolars with straight root were cleaned and shaped to size 35. Group SB was obturated using System B and Group ET was filled with EndoTwinn. A size 35 of 0.06 tapered gutta-percha and Adseal were used and the plugger which could be introduced to 4 mm short of working length was selected in the obturation procedure. As the positive control, Group PC was not filled. In Group SB, ET and PC, all external surfaces of each tooth were coated with nail varnish leaving only 1 mm area around the apical foramen. In the negative control of Group NSB and Group NET, all of external tooth surface including apical foramen was coated with the nail varnish. The specimens were immersed in methylene blue dye solution for 2 days. Then the specimens were sectioned at each 1 mm from apex to 5 mm level. The final score of one specimen was given by summing up of the points at all levels. The dye leakage of Group ET was significantly less than that observed in Group SB (p < 0.05). And the frequency of gutta-percha pulling out from root canal when the plugger was removed was more often with the System B than with EndoTwinn but there was no significant difference.

• Journal of the Korean Vacuum Society
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• v.18 no.2
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• pp.79-84
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• 2009

The electron emission source of triode type has been fabricated using CNT paste. The nano Ag particle and photosensitive polymers were added to the CNT paste. The surface roughness of the CNT emitter was uniform by the back exposure method. The added nano Ag particle improves the adhesion and the electric conductance with small variation in the CNTs and between electrode. After the aging with heat-exhausting, the reliability of the triode CNT electron source was secured in the high voltage and current operation for 12 hours. At this time, the gate leakage current was about 10 % less than.