Influence of Substrate Temperature on the TiC Thin Films Prepared by Unbalanced Magnetron Sputtering Method (비대칭 마그네트론 스퍼터링 방법으로 제조된 TiC 박막의 기판온도 영향)
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- The Transactions of The Korean Institute of Electrical Engineers
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- v.62 no.2
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- pp.284-287
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- 2013