• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.11a
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• pp.111-111
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• 2009

In this work, we discuss simulation of surface acoustic wave device using Comsol Multiphysics. The structure SAW device based on piezoelectric thin film aluminum-nitride (AlN) on silicon was simulated. Some parameters of SAW device such as surface velocity, displacement of piezoelectric thin film were evaluated by software. Many modes and shapes of wave are also discussed in this paper. For evaluation physical parameters of AlN piezoelectric layer, the SAW resonator was modeled and simulation results were also compared with experiment results. we simulated arid evaluated the surface Rayleigh wave of AlN thin film on silicon substrate. Results simulation and experiment showed the surface velocity of AlN thin film was about 5200 m/s and shape of surface wave was also displayed. This paper has also proposed as method to study SAW characteristic of piezoelectric thin film and found out measurement values accurately of film such as stiffness matrix, piezoelectric matrix. These values are very important in calculation and design SAW device or MEMS device based on AlN piezoelectric layer.

• Journal of Sensor Science and Technology
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• v.4 no.2
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• pp.45-50
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• 1995

The excellent c-axis oriented zinc oxide thin films were prepared by the RF magnetron sputtering method on glass substrates. Optimum fabrication conditions of the ZnO films were such that RF power, substrate temperature, and gas pressure of mixture Ar(50%):$O_{2}$(50%) were 150 W, $200^{\circ}C$, and 5 mTorr, respectively. In these conditions, the deposition rate was $310\;{\AA}/min$, and the resistivity of the film was $1{\times}10^6\;{\Omega}{\cdot}cm$. The ZnO film also showed high c-axis orientation and crystalinity according to XRD pattern and SEM photograph. A fabricated interdigital transducer generated 1st mode surface acoustic wave at 46.6 MHz and 2nd mode surface acoustic wave at 52.5 MHz. At the 1st mode, the phase velocity of surface acoustic wave and the electromechanical coupling coefficient were 2795 m/sec and 0.031 %, respectivly. At the 2nd mode, they were 3149 m/sec and 0.019 %. respectivly.

• Journal of the Korean Society for Nondestructive Testing
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• v.29 no.4
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• pp.344-350
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• 2009

The goal of this study is to introduce the theoretical background of acoustic nonlinearity in surface wave and to verify its characteristics by experiments. It has been known by theory that the nonlinear parameter of surface wave is proportional to the ratio of $2^{nd}$ harmonic amplitude and the power of primary component in the propagated surface wave, as like as in bulk waves. In this paper, in order to verify this characteristics we constructed a measurement system using contact angle beam transducers and measured the nonlinear parameter of surface wave in an Aluminum 6061 alloy block specimen while changing the distance of wave propagation and the input amplitude. We also considered the effect of frequency-dependent attenuation to the measurement of nonlinear parameter. Results showed good agreement with the theoretical expectation that the nonlinear parameter should be independent on the input amplitude and linearly dependent on the input amplitude and the $2^{nd}$ harmonic amplitude is linearly dependant on the propagation distance.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2014.10a
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• pp.236-239
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• 2014

Most naval underwater weapon system can be simplified to a circular cylindrical structure which has vibrating machineries inside. In order to predict efficiently the total acoustic radiation power of cylindrical structure, surface velocity is measured and radiation efficiency of surface element is calculated. Then, they are substituted to the surface pressure in the simplified Helmholtz integral equation which assumes acoustic far-field and plane-wave approximation at the surface. Surface velocity and total acoustic radiation power for a submerged cylinder are measured in water-tank. In this example, it is found that total acoustic power output obtained from the prediction is in good agreement with that of measurement in mid-high frequency range.

• Journal of the Korean Society for Nondestructive Testing
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• v.26 no.5
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• pp.291-296
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• 2006

The residual stress in shot-peened Al 7075 alloy was evaluated using surface acoustic wave (SAW). Shot peening was conducted to produce a variation in the residual stress with the depth below the surface under a shot velocity of 30 m/s. The SAW velocity was measured from the V(z) curve using a scanning acoustic microscopy (SAM). The Vickers hardness profile from the surface showed a significant work hardening near the surface layer with a thickness of about 0.25 mm. As the residual stress became more compressive, the SAW velocity increased, whereas as the residual stress became more tensile, the SAW velocity decreased. The variation in the SAW velocity through the shot peened surface layer was in good agreement with the distribution of the residual stress measured by X-ray diffraction technique.

• Journal of the Korean Society for Heat Treatment
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• v.32 no.3
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• pp.118-123
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• 2019

The aim of this study investigates the feasibility of scanning acoustic microscope (SAM) with high frequency transducer for material degradation. The test specimen was prepared by artificial heat treatment of Co-base superalloy. The high frequency 200 MHz acoustic lens was used to generate the leaky surface acoustic wave (LSAW) on the test specimens. The matrix precipitates coarsened with thermal aging time, and then grow up to several tens of micrometers. The velocity of LSAW decreased with increasing aging time. Also, it has a good correlation between LSAW and hardness. Consequently, V(z) curve methods of SAM using high frequency transducer is useful tool to evaluate the heat treatment effects on microstructure.

• Proceedings of the KIEE Conference
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• 1987.07b
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• pp.841-844
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• 1987

In this paper we describe a planar type SAW(surface acoustic wave) FM discriminator, in which a 3 dB multistrip coupler is used to keep the linearity of wideband FM discrimination. This discriminator without 3 dB multistrip coupler is also applicable to DPSK demodulation.

• 한국가시화정보학회:학술대회논문집
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• 2004.11a
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• pp.76-79
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• 2004

Dynamic oscillation motion of a pendant drop has been Investigated experimentally when acoustic wave is applied. This problem is of particular interest in the understanding of transport phenomena, accompanied by liquid drop. In this experiment, pendant drop was made to oscillate by inducing the acoustic wave and the subsequent drop motion was recorded by a high-speed camera. The results obtained indicate that liquid drop hanging on the flat surface has resonant frequencies on each shape oscillation modes. It is also found that exists the swing mode of oscillation on the pendant drop.

• Laser Solutions
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• v.6 no.2
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• pp.27-33
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• 2003

A laser shock cleaning technology is a new dry cleaning methodology for the effective removal of small particles from the surface. This technique uses a plasma shock wave produced by a breakdown of air due to an intense laser pulse. In order to optimize the laser shock cleaning process, it needs to evaluate the cleaning performance quantitatively by using a monitoring technique. In this paper, an acoustic monitoring technique was attempted to investigate the laser shock cleaning process with an aim to optimize the cleaning process. A wide-band microphone with high sensitivity was utilized to detect acoustic signals during the cleaning process. It was found that the intensity of the shock wave was strongly dependent on the power density of laser beam and the gas species at the laser beam focus. As a power density was larger, the shock wave became stronger. It was also seen that the shock wave became stronger in the case of Ar gas compared with air and N$_2$ gas.

• Journal of the Korean Society of Industry Convergence
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• v.22 no.3
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• pp.243-250
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• 2019

The nanosecond laser assisted ablation have been investigated. The biocompatable polymer PMMA was employed as the target material and the two distinctive surface conditions were test. The first surface condition is a dry surface for which the target surface is exposed to air and the second surface condition is the wet surface for which the target surface is covered with dehydrated water. The ablation volume, the laser induced acoustic wave, the laser induced plasma were investigated for both wet and dry condition. The nanosecond laser pulse ablatied more on the wet surface compared to the dry surface. The enhanced ablation of wet surface is attributed to the confined acoustic wave and the laser-induced plasma in the liquid layer.