• Title/Summary/Keyword: Surface Measurement

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Development of SFM System for Nano In-Process Profile Measurement (나노인프로세스 표면형상계측을 위한 SFM시스템의 개발)

  • Kweon, Hyun-Kyu;Choi, Seong-Dae;Hong, Sung-Wook
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.3 no.2
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    • pp.53-59
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    • 2004
  • In this paper, we propose a new multi-purpose Scanning Force Microscope (SFM) system. The system can be used for nano/micro-scratching, in-process profile measurement, and observation of potential surface defects which occur during the scratching in air or liquid. Experimental results of nano/micro-scratching show that the smallest scratching depth can be controlled to be 10nm, which corresponds to the stability of the SFM system. Profile measurements of nano/micro-scratching surfaces have also been performed by the method of on-machine measurement and in-process measurement. Two measurement results were in good agreement with each other. The maximum difference was approximately 10 nm, which was mainly caused by the sampling repeatability error that influences the measurement accuracy Also, micro-defects on the micro-scratching surface were successfully detected by the SFM system. It was confirmed that the number of micro-defects increases when the surface is subjected to a cyclic bending load. The maximum depth was less than 100nm.

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A Study on a Hartmann Test of Optical Mirror for On-Machine Measurement of Polishing machine (광학면 연마기의 OMM을 위한 Hartmann Test 방법 연구)

  • 김옥현;이응석;오창진;김용관
    • Journal of the Korean Society for Precision Engineering
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    • v.21 no.1
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    • pp.40-45
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    • 2004
  • Recently, aspheric optical lenses and mirrors, which are harder to manufacture and measure than the conventional spherical ones, are widely used, particularly in electronic fabrication process. Generally, interferometric optical method is used for the measurement of spherical optical surface. However, the interferometric method for aspheric surface measurement is difficult because it needs a precise null corrector and strict environmental conditions such as constant temperature, humidity and vibrations. We have been studied on the manufacturing of aspheric optics to improve the surface profile accuracy and productivity using a corrective polishing process. For the corrective polishing, a practical method of On-Machine Measurement (OMM) is required. For this purpose, an optical OMM system has been studied using the Shach-Hartmann test, which is very robust to the practical polishing environment. The wavefront has been reconstructed from the measured data using the primary aberration polynomial function by the least squares fitting. The measured result of the OMM system shows that the maximum deviation is less than 200 nm for the one of commercial Fizeau interferometer Wyko 6000.

Improvement of the Stereo Vision-Based Surface-Strain Measurement System for Large Stamped Parts (중.대형 판재성형 제품의 곡면변형률 측정을 위한 스테레오 비전 시스템의 개선)

  • 김형종;김두수;김헌영
    • Transactions of Materials Processing
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    • v.9 no.4
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    • pp.404-412
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    • 2000
  • It is desirable to use the square grid analysis with the aid of the stereo vision and image processing techniques in order to automatically measure the surface-strain distribution over a stamped part. But this method has some inherent problems such as the difficulty in enhancement of bad images, the measurement error due to the digital image resolution and the limit of the area that can be measured at a time. Therefore, it is still hard to measure the strain distribution over the entire surface of a medium-or large-sized stamped part even by using an automated strain measurement system. In this study, several methods which enable to solve these problems considerably without losing accuracy and precision In measurement are suggested. The superposition of images that have different high-lightened or damaged part from each other gives much enhanced image. A new algorithm for constructing of the element connectivity from the line-thinned image helps recognize up to 1,000 elements. And the geometry assembling algorithm including the global error minimization makes it possible to measure a large specimen with reliability and efficiency.

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A Study on the In-Process Measurement of Metallic Surface Roughness in Cylindrical Grinding by Diode Laser (원통연삭가공시 반도체 레이저 빔을 이용한 금속표면거칠기의 인프로세스 측정)

  • 김희남;이주상
    • Journal of the Korean Society of Safety
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    • v.10 no.3
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    • pp.30-41
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    • 1995
  • This paper proposed a simple method for measuring surface roughness of ground surface. Utilizing non-contact in-process measuring system using the diode laser. The measurement system is consisted of a laser unit with a diode laser and a cylindrical lens, a detecting unit with polygon mirror and CCD array sensor, and a signal processing unit with a computer and device. During operation, this measuring system can provide information on surface roughness in the measuring distance with a single sampling and simultaniously monitor the state of the grind wheel. The experimental results, showed that the Increase of the feed rate and the dressing speed an caused increase in the surface roughness and when the surface roughness is 4Rmax-10Rmax, the cutting speed is 1653m/min-1665m/min, the table speed is 0.2n1/min -0.9m/min, the dressing speed is 0.2mm/rev~0.4mm/rev, the stylus method and the in-process method can be obtained the same results. Thus, under limited working conditions, using the proposed system, the surface roughness of the ground surface during cylindrical grinding can be obtained through the in-process measurement method using the diode laser.

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A.c. Impedance Measurement of CP-Ti in 0.1 M NaOH Solution

  • Moon, Sungmo;Kwon, Mikyung;Kim, Jusuk
    • Journal of Electrochemical Science and Technology
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    • v.3 no.4
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    • pp.185-189
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    • 2012
  • A.c. impedances of mechanically polished CP-Ti specimens were measured at open-circuit potential (OCP) with immersion time and under applied anodic potentials between -0.2 and 1 $V_{Ag/AgCl}$ in 0.1 M NaOH solution. Capacitances of native oxide films ($C_{ox,na}$) grown naturally and capacitances of anodic oxide films ($C_{ox,an}$) formed under applied anodic potentials were obtained to examine the growth of native and anodic oxide films in 0.1 M NaOH solution and how to use $C_{ox,na}$ for the surface area measurement of Ti specimen. $1/C_{ox,na}$ and $1/C_{ox,an}$ appeared to be linearly proportional to OCP and applied potential ($E_{app}$), with proportional constants of 0.086 and 0.051 $uF^{-1}\;V^{-1}$, respectively. The $C_{ox,na}$ also appeared to be linearly proportional to geometric surface area of the mechanically polished CP-Ti fixture specimen, with proportional constants of 11.3 and $8.5{\mu}F\;cm^{-2}$ at -0.45 $V_{Ag/AgCl}$ and -0.25 $V_{Ag/AgCl}$ of OCPs, respectively, in 0.1 M NaOH solution. This linear relationship between $C_{ox,na}$ and surface area is suggested to be applicable for the measurement of real surface area of Ti specimen.

A study on the Measurement of Field Transmission Loss through Doors in Buildings Using the Surface Intensity Method. (Surface Intensity 법에 의한 건물내 출입문의 차음성능 현장측정에 관한 연구)

  • 손장열;오재응;김흥식
    • The Journal of the Acoustical Society of Korea
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    • v.4 no.2
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    • pp.3-12
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    • 1985
  • The surface intensity method is a relatively new tool which can identify the noise source or path and measure the radiation power. One microphone and one accelerometer are used in this new technique. In this study, this new technique has been used to measure the field transmission loss trough doors. The results of the experiment indicate that the surface intensity method produces reliable data and can be applied to the transmission loss measurement.

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A study on the Measurement of Field Transmission Loss through Doors in Buildings Using the Surface Intensity Method. (Surface Intensity 법에 의한 건물내 출입문의 차음성능 현장측정에 관한 연구)

  • Son, Jang Yeol;O, Jae Eung;Kim, Heung Sik
    • The Journal of the Acoustical Society of Korea
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    • v.4 no.2
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    • pp.3.1-3.1
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    • 1985
  • The surface intensity method is a relatively new tool which can identify the noise source or path and measure the radiation power. One microphone and one accelerometer are used in this new technique. In this study, this new technique has been used to measure the field transmission loss trough doors. The results of the experiment indicate that the surface intensity method produces reliable data and can be applied to the transmission loss measurement.

Surface roughness model of end-milling surface (엔드밀 가공면의 표면거칠기 모델)

  • Chin, Do-Hun;Kim, Jong-Do;Yoon, Moon-Chul
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.12 no.2
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    • pp.68-74
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    • 2013
  • In this paper, an average surface roughness, $R_a$, was measured by optical measurement and its mathematical model according to spindle speed and feedrate was obtained by least square method. Also, its result is compared and investigated with real measured average surface roughness. The optical measurement of surface roughness is performed by CLSM(confocal laser scanning microscope) and the captured HEI(height encoded image) data is used as an original data for the generation of average surface roughness and its mathematical plane or contour surface of surface roughness. Using this polynomial model with two independent variables, the behavior of an average surface roughness is investigated and analyzed with an experimental modeling of least square algorithm. And it can be used for the prediction of $R_a$ in different condition of machining.

Simultaneous active strain and ultrasonic measurement using fiber acoustic wave piezoelectric transducers

  • Lee, J.R.;Park, C.Y.;Kong, C.W.
    • Smart Structures and Systems
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    • v.11 no.2
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    • pp.185-197
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    • 2013
  • We developed a simultaneous strain measurement and damage detection technique using a pair of surface-mounted piezoelectric transducers and a fiber connecting them. This is a novel sensor configuration of the fiber acoustic wave (FAW) piezoelectric transducer. In this study, lead-zirconate-titanate (PZT) transducers are installed conventionally on a plate's surface, which is a technique used in many structural health monitoring studies. However, our PZTs are also connected with an optical fiber. A FAW and Lamb wave are simultaneously guided in the optical fiber and the structure, respectively. The dependency of the time-of-flight of the FAW on the applied strain is quantified for strain sensing. In our experimental results, the FAW exhibited excellent linear behavior and no hysteresis with respect to the change in strain. On the other hand, the well-known damage detection function of the surface-mounted PZT transducers was still available by monitoring the waveform change in the conventional Lamb wave ultrasonic path.

SCRATCH TESTERS ON THE APPLICATION TO THE ADHESION MEASUREMENT OF THIN COATINGS

  • Takeshita, Kyo
    • Journal of the Korean institute of surface engineering
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    • v.29 no.6
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    • pp.691-694
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    • 1996
  • Two models of scratch testers developed recently are applied to the adhesion measurement of thin coatings. In both models the critical load is determined from the frictional irregularity when coated surface is broken in the scratching process. One model is effective for coatings thicker than 1m and the other for thin coatings down to $0.1\mu\textrm{m}$. The mechanism and the measurement principle of these testers are described. High sensitivity and good reproducibility of the measurement are attained primarily by the employment of new detection devices. These testers are even more useful for the quality control and the inspection of commercial products of coatings because only a small area of specimen is required for the test.

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