• Tunnel and Underground Space
• /
• v.8 no.2
• /
• pp.146-156
• /
• 1998

Nemerical algorithms were developed to analyze the behavior of the double lining as well as ground mass separately or simultaneously. A lining interface element was especially developed, verified and applied to the study on the coupled interaction of shotcrete and the concrete lining. It could be known fro parameter studys on double lining support systems that as the contact surface between shotcrete and concrete lining was rougher, the more decreased bearing capacity against the cracking of the system. If the thickness of the shotcrete increased, the bearing capacity of the double lining also increased linearly with the thickness. If the thickness of the concrete lining increased, the bearing capacity of the double lining had the relationship of the characteristic S-shape of a sigmoid function with the thickness. When the thickness increased over a given value, it was not useful to increase more the thickness because bearing capacity had no remarkable change. It could be concluded that the behavior of the shotcrete and concrete lining was generally reversed before and after the ratio of horizontal to vertical earth preassure of 1.0 and 0.5 respectively. Therefore, we could guess that the movement which two shotcrete and concrete lining deflect toward each other around the crown caused a friction between two linings and thus this disadvantageous effect could contribute to reducing the bearing capacity against the cracking.

• Journal of Sensor Science and Technology
• /
• v.21 no.3
• /
• pp.186-191
• /
• 2012

In this paper, we present a pH measurement method that uses a microcantilever-array-based biosensor system. It is composed of microcantilever array, liquid cell, micro syringe pump, laser diode array, position sensitive detector, data acquisition device, and data processing software. Four microcantilevers are functionalized with pH-sensitive MHA(mercaptohexadecanoic acid) as a probe, while three microcantilevers are functionalized with HDT(hexadecane thiol) as reference. We prepare PBS(phosphate buffered saline) solutions of different pH and inject them into the liquid cell with a predefined volumetric speed at regular time intervals. The functionalized mircocantilevers in the liquid cell deflect as a self-assembled monolayer on the microcantilever binds with probe molecules in the solution. The difference in deflection between the MHA-covered probe microcantilever and the HDT-covered reference microcantilever was used to compensate for thermal drift. The deflection difference clearly increases with increasing pH in the solution. It was shown that when the pH values of the PBS solutions are high, there were large variations in the deflection of microcantilevers, whereas there were small variations for low pH value. The experimental results show that the microcantilever array functionalized with MHA and HDT can detect pH value with good repeatability.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2009.06a
• /
• pp.59-59
• /
• 2009

현재 CMP분야는 광역 평탄화 반도체 소자의 집적화 및 소형화가 진행됨에 따라서 CMP 공정의 중요성은 날로 성장하고 있다. 하지만 이러한 CMP공정은 불가피하게도 scratch, pit, CMP residue와 같은 defect들을 발생시키고 있으며, 점점 선폭이 작아짐에 따라, 이러한 defect들이 반도체 수율에 미치는 영향은 심각해지고 있다. Defect들 중에 특히 scratch는 반도체에 치명적인 circuit failure를 일으키게 된다. 또한 반도체 내구성과 신뢰성을 감소시키게 되고, 누전전류를 증가시키는 등 바람직하지 못한 현상들이 생기게 된다. 본 연구에서는 scratch 와 같은 deflect들을 효율적으로 검출, 분석하고, scratch를 감소시키는데 그 목적이 있다. 본 실험을 위해 8" TEOS wafer와 commercial oxide slurry 및 friction polisher (Poli-500, G&P tech., Korea)를 사용하여 CMP 공정을 진행하였으며, CMP 공정조건은 각각 80rpm/80rpm/1psi(Platen speed/Head speed/Pressure)에서 1분 동안 연마를 한 후 scratch 발생 경향을 살펴보았다. CMP 후 wafer위에 오염되어 있는 slurry residue들을 제거하기 위해 SC-1, HF 세정을 이용하여 최적화된 post-CMP 공정기술을 제안하였다. Scratch 검출 및 분석을 위해 wafer surface analyzer (Surfscan 6200, Tencor, USA)와 optical microscope (LV100D, Nicon, Japan)를 사용하였다. CMP 공정 변수들에 따른 scratch 발생정도를 비교하였으며, scratch 발생 요인들에 따른 scratch 형태 및 발생정도를 살펴보았다. 최적화된 post-CMP 세정 조건은 메가소닉과 함께 SC-1 세정을 실시하여 slurry residue들을 제거한 후, HF 세정을 실시하여 잔여 오염물들을 제거하고 검출이 용이하도록 scratch를 확장시킬 수 있도록 제안하였으며, 100%의 particle removal efficiency (PRE)를 얻을 수 있었다. 실제 CMP 공정후 post-CMP 세정 단계별 scratch 개수를 측정한 결과, SC-1 세정 후 약 220개의 scratch가 검출되었으며, 검출되지 않았던 scratch가 HF 세정 후 확장되어 드러남에 따라 약 500개의 scratch 가 검출되었다.

• Transactions of the Korean Society of Mechanical Engineers B
• /
• v.29 no.10 s.241
• /
• pp.1156-1162
• /
• 2005

In this study, a noble method is proposed to prevent the edge overcoating (EOC) that may develop near the edge of the steel strip in the gas wiping process of continuous hot-dip galvanizing. In our past study (Trans. of the KSME (B), Vol. 27, No. 8, pp. $1105\~1113$), it was found that EOC is caused by the alternating vortices which are generated by the collision of two opposed jets in the region outside the steel strip. When the two opposed jets collide at an angle much less than $180^{o}$, non-alternating stable vortices are established symmetrically outside the steel strip, which lead to nearly uniform pressure on the strip surface. In order to deflect both jets downward by a certain angle, a cylinder with small diameter is installed tangentially to the exit of the lower lip of the two-dimensional jet. In order to find an optimum cylinder diameter, the three dimensional flow field is analysed numerically by using the commercial code, STAR-CD. And the coating thickness is calculated by using an integral analysis method to solve the boundary layer momentum equation. In order to compare the present noble method with the conventional baffle plate method to prevent the EOC, the flow field with a baffle plate is also calculated. The calculation results show that the tangentially installed cylinder at the bottom lip of the jet exit is more effective than the baffle plate to prevent EOC.

• Journal of the Korean Society for Precision Engineering
• /
• v.31 no.10
• /
• pp.889-895
• /
• 2014

Machine parts and structures of a change in the displacement and strain can be evaluated safety is one of the important factors. Typically the strain gauge has been employed to measure the displacement and strain. However, this contact-type measurement method has disadvantages that are not measured under condition of specific object shape, surface roughness and temperature. In particularly, 3 point bending and 4 point bending test not use strain gauge. So its test used cross head displacement and deflect meter. Digital Image Correlation measurement methods have many advantages. It is non contact-type measurement method to measure the object displacements and strain. In addition, it is possible to measure the Map of full field displacements and strain. In this paper, measured the 3 point bending deflection using the Digital Image Correlation methods. In order to secure the reliability, Digital Image Correlation method and universal test machine were compared.

• International Journal of Fluid Machinery and Systems
• /
• v.3 no.4
• /
• pp.342-351
• /
• 2010

During the operation of a hydro turbine the fluid mechanical pressure loading on the turbine blades provides the driving torque on the turbine shaft. This fluid loading results in a structural load on the component which in turn causes the turbine blade to deflect. Classically, these mechanical stresses and deflections are calculated by means of finite element analysis (FEA) which applies the pressure distribution on the blade surface calculated by computational fluid dynamics (CFD) as a major boundary condition. Such an approach can be seen as a one-way coupled simulation of the fluid structure interaction (FSI) problem. In this analysis the reverse influence of the deformation on the fluid is generally neglected. Especially in axial machines the blade deformation can result in a significant impact on the turbine performance. The present paper analyzes this influence by means of fully two-way coupled FSI simulations of a propeller turbine utilizing two different approaches. The configuration has been simulated by coupling the two commercial solvers ANSYS CFX for the fluid mechanical simulation with ANSYS Classic for the structure mechanical simulation. A detailed comparison of the results for various blade stiffness by means of changing Young's Modulus are presented. The influence of the blade deformation on the runner discharge and performance will be discussed and shows for the configuration investigated no significant influence under normal structural conditions. This study also highlights that a two-way coupled fluid structure interaction simulation of a real engineering configuration is still a challenging task for today's commercially available simulation tools.

• Proceedings of the International Union of Geodesy And Geophysics Korea Journal of Geophysical Research Conference
• /
• 2003.05a
• /
• pp.20-20
• /
• 2003

In the summers of 1997 and 1998 and in February of 2000 we made 570 measurements of the ambient geomagnetic field 120 cm above the pavement surface of State Route 130, south of Pahoa, the island of Hawaii using a three-component fluxgate magnetometer. We measured at every 15.2 m (50 feet) interval covering a distance of 6, 310 m (20, 704 ft) where both historic and pre-historic highly magnetic basalt flows underlie. We also collected 197 core samples from eight road cuts, 489 specimens of which were subject to AF demagnetizations at 5 - 10 mT level up to a maximum field of 60 mT. We observed significant inclination anomalies ranging from a minimum of $31^{\circ}$ to a maximum $40^{\circ}$ where a uniform inclination value of $36.7^{\circ}$ (International Geomagnetic Reference Field, IGRF) was expected. Since the mean of the observed inclinations is approximately $35^{\circ}$ we assume that the study area is slightly affected by the magnetic terrain effect to a systematically shallower inclinations for being located in the regionally sloping surface of the southern side of the island (Baag, et al., 1995). We observed inclination anomalies showing wider (spacial) wavelength (160 - 600 m) and higher amplitudes in the historic lava flows area than in the northern pre-historic flows. Our observations imply that preexisting inclination anomalies such as those that we observed would have been interpreted as paleosecular variation (PSV). These inclination anomalies can best be attributed to concealed underground highly magnetic dikes, channel type lava flows, on-and-off hydrothermal activities through fissure-like openings, etc. Both the within- and between-site dispersions of natural remanent magnetization (NRM) are largest (up to ${\pm}7^{\circ}$) above the flows of 1955, while the area of pre-historic flows in the northern part of the study area exhibit the smallest dispersion. Nevertheless, mean inclinations of each historic flow of 1955 and 1790 are almost identical to that of the corresponding present field, whereas mean of NRM (after AF demagnetization) inclinations for each of the four pre-historic lava flow units is twelve to thirteen degrees lower than the present field inclination. We observed three cases of very large inclination variations from within a single flow, the best fitting curves of which are linear, second and third order polynomials each from within a single flow, whereas no present field variations are observed. This phenomena can be attributed to the notion that local magnetic anomalies on the surface of an active volcano are not permanent, but are transient. Therefore we believe that local magnetic anomalies of an active volcano may be constantly modified due to on going subsurface injections and circulations of hot material and also due to wide spacial and temporal distribution of highly magnetic basaltic flows that will constantly modify the topography which will in turn modify the local ambient geomagnetic field (Baag, et al., 1995). Our observations bring into question the general reliability of PSV data inferred from volcanic rocks, because on-going various geologic and geophysical activities associated with active volcano would continuously deflect and modify the ambient geomagnetic field.