• 한국전기전자재료학회논문지
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• 제14권11호
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• pp.947-952
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• 2001

In this paper, a wideband SAW convolver using a parabolic horn waveguide was designed and its characteristics were investigated. The convolver was made with parabolic horn waveguide at compression ratio 9:1 for reducing propagation loss and for improving convolution efficiency between two input IDTs of center frequency 193.78 ㎒. The SAW convolver utilizing acoustic nonlinearities of piezoelectric material demonstrated that it can provide large S/N ratio and can be use for programmable matched filter(PMF) in spread spectrum communication system.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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• pp.242-243
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• 2005

SAW filters were fabricated on $LiNbO_3$ substrates to evaluate frequency response and properties of photolithography. In the both of etch and lift-off methods, lift off method was superior to etch method in fabrication process. Frequency response property was measured by network analyzer. From a measurement of acoustic property, SAW propagation velocity was 3574.9m/sec for $LiNbO_3$ SAW filter.

• 전기학회논문지
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• 제56권5호
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• pp.905-909
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• 2007

Crystalline and micro-structural characteristics of ZnO thin films which were deposited on p-Si(100) with cooling naturally down of pre-heated substrate during RF magnetron sputter deposition, were investigated by XRD and SEM in this paper. The film which was prepared on the substrate which was pre-heated to $400^{\circ}C$ before deposition and then cooled naturally down during deposition, showed the most outstanding c-axis preferred orientation. The ZnO thin film having the best crystalline result were applied to SMR type FBAR device and resonance properties of the device were investigated by network analyzer. It showed that resonance frequency was 2.05 GHz, return loss was -30.64 dB, quality factor was 3169 and electromechanical coupling factor was 0.4 %. This deposition method would be very useful for application of surface acoustic wave filter or film bulk acoustic wave resonator.

• 한국광학회:학술대회논문집
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• 한국광학회 2000년도 제11회 정기총회 및 00년 동계학술발표회 논문집
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• pp.248-249
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• 2000

파장분할다중 광통신시스템은 파장통과 대역폭이 좁으면서, 파장통과 대역을 넓게 가변시킬 수 있는 집적광학형 광여파기를 필요로 하고 있다. 지금까지 전기광학효과$^{(1)}$ , 스트레인광학효과$^{(2)}$ , 음향광학효과$^{(3)}$ 들을 이용하여 다양한 형태의 광여파기들이 연구되어져왔다. 특히 음향광학효과를 이용한 편광모드변환형 가변파장 광필터 (AOTF: Acousto-Optic Tunable Filter)는 150nm 이상의 넓은 파장가변 범위, 1nm이하의 좁은 파장대역폭, 수 $\mu\textrm{s}$ 정도의 비교적 빠른 스위칭 속도, 그리고 여러 파장 채널을 동시에 선택할 수 있는 특성들 때문에 많은 연구가 진행되어져 왔다. 본 논문에서는 음향파 장벽(acoustic barrier)를 이용하여 표면 음향파(SAW: Surface Acoustic Wave)의 RF 구동파워를 감소시킬 수 있는 구조의 AOTF를 제작하고, 측정 결과를 음향파 장벽을 이용하지 않은 AOTF의 측정 결과와 비교, 검토하였다. (중략)

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2003년도 하계종합학술대회 논문집 II
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• pp.759-762
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• 2003

The epitaxially grown Mg-doped GaN thin film was prepared by MOCVD (Metal Organic Chemical Vapor Deposition) for a SAW(Surface Acoustic Wave) filter. Mg-doped GaN thin film had enough properties for a SAW filter which include crystallinity and morphology. The surface morphology and crystalline of the Mg-doped GaN thin films were characterized using AFM and an X-ray rocking curve. The SAW filter, which was fabricated by lift-off process and frequency response, was measured by HP 8753C network analyzer. Center frequency was 96.687 MHz and SAW velocity was 5801 m/s when wavelength(λ) was 60${\mu}{\textrm}{m}$. Insertion loss was over -10 dB, Q was factor over 200, and side lobe attenuation was over 22 dB which was suitable for use as a SAW filter. Electro-mechanical coupling coefficient (k$^2$) was calculated from the measured data. k$^2$ was from 1 % to 1.44 %. The fabricated SAW filter using Mg-doped GaN/sapphire structure has good qualities as a filter and will be used as a SAW filter for operating RF frequency.

• 한국표면공학회지
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• 제42권5호
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• pp.216-219
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• 2009

A surface acoustic wave (SAW) filter structure was fabricated employing $4{\mu}m$ thick nanocrystalline diamond (NCD) and $2.2{\mu}m$ thick ZnO films on Si wafer. The NCD film was deposited in an $Ar/CH_4$ gas mixture by microwave plasma chemical vapor deposition method. The ZnO film was formed over the NCD film in an RF magnetron sputter using ZnO target and $Ar/O_2$ gas. On the top of the two layers, copper film was deposited by the RF sputter and inter digital transducer (IDT) electrode pattern (line/space : $1.5/1.5{\mu}m$) was defined by the photolithography including a lift-off etching process. The fabricated SAW filter exhibited the center frequency of 1.66 GHz and the phase velocity of 9,960 m/s, which demonstrated that a giga Hertz SAW filter can be realized by utilizing the nanocrystalline diamond thin film.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2001년도 하계종합학술대회 논문집(1)
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• pp.245-248
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• 2001

In this paper, we have investigated the design technique and fabricated the surface acoustic wave (SAW) filter for duplexer, which consists of Tx. and Rx. filter, and antenna terminal. For Tx. and Rx. bandpass filters we used the one-port SAW resonators with n-section ladder structure. The structure is composed of couples of series-arm resonators and parallel-arm resonators. RF filter using ladder structure was designed and fabricated on 36$^{\circ}$Y-X LiTaO$_3$ substrates. Designed filters, insertion loss is less than 1.5dB, the bandwidth is more than 25MHz, rejection band level is less than -30dB and center frequency is 820MHz.

• 한국전기전자재료학회논문지
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• 제15권4호
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• pp.325-331
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• 2002

In this paper, surface acoustic wave(SAW) bandpass filters using slanted finger interdigital electrode transducers(IDTs) are investigated. The slanted finger IDTs are used to design SAW filters with good shape factor, a flat passband, and good out-of-band rejection characteristic. For the filter design, input-output IDT structure was simulated with modified impulse model; uniform-withdrawal weighting IDTs, withdrawal-withdrawal weighting IDTs. SAW filters of uniform-withdrawal weighting IDTs structure were designed and fabricated on $128^{\circ}LiNbO_3$ piezoelectric substrates. Implemented SAW filter has a fractional bandwidth of 30%, center frequency of 70MHz and shape factor of $1.12\pm0.01$.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2010년도 추계학술대회 논문집
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• pp.537-537
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• 2010

High precision sensing is very important in various technologies. Especially, it is more important when it were applied to nano/micro meter level's sensing like AFM, storage, etc. And capacitive sensing is widely used method. To improve the measurement efficiency, many signal conditioners were studied and one of them was surface acoustic wave (SAW) device. SAW device is very widely used as a high frequency bandwidth filter. Due to the reflective characteristic of high frequency, the response of SAW device contains both propagative and reflective signal at the external impedance. In this paper, we used SAW device as signal conditioner of capacitive sensor. And high precision gap measurement was executed using capacitive load. Reference signal was reflective SAW response and the magnitude at the center frequency of SAW device by the change of impedance was checked. Finally, the attainable gap resolution was determined.

• 한국음향학회지
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• 제14권4호
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• pp.64-73
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• 1995

본 연구에서는 카이저 창함수를 이용하여 이동통신용 표면탄성파 필터를 설계하기 위한 CAD를 제작하였다. 제작된 CAD는 아포다이제이션 형태로서 하중함수가 주어진 빗살변환기와 정규형형태의 빗살변환기, 위드드롤로 형태로서 하중함수가 주어진 빗살 변환기 한쌍으로된 변환기와 아포다이제이션 형태로서 하중함수가 주어진 빗살변화기와 정규형 변환기, 반사기를 설치한 공진기 형태의 필터로서 구성되어 있다. 중심 주파수가 222MHz에서 343MHz 영역내의 표면탄성파 필터를 제작된 CAD로 모의 실험 하였다. 본 연구에서 제작된 CAD는 표면탄성파 필터로써 응용될 뿐만 아니라 디지틀 FIR 필터에도 응용될 수 있다.