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Decomposition Characteristics of PFCs for Various Plasma Discharge Methods in Dielectric Barrier Discharge (DBD 반응기에서 플라즈마 방전형태에 따른 PFCs 가스의 분해 특성)

  • Kim, Kwan-Tae;Kim, Yong-Ho;Cha, Min-Suk;Song, Young-Hoon;Kim, Seock-Joon;Ryu, Jeong-In
    • Journal of Korean Society for Atmospheric Environment
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    • v.20 no.5
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    • pp.625-632
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    • 2004
  • Perfluorocompounds ($PFC_s$), such as tetrafluoromethane ($CF_4$) and hexafluoroethane ($C_2F_6$), have been widely used as plasma etching and chemical vapor deposition (CVD) gases for semiconductor manufacturing processes. Since these $PFC_s$ are known to cause a greenhouse effect intensively, there has been a growing interest in reducing $PFC_s$ emissions. Among various $CF_4$ decomposing techniques, a dielectric barrier discharge (DBD) is considered as one of a promising candidate because it has been successfully used for generating ozone ($O_3$) and decomposing nitrogen oxide (NO). Firstly, optimal concentration of oxygen for $CF_4$ decomposition was found to figure out how many primary and secondary reactions are associated with DBD process. Secondary, to find effective discharge method for $CF_4$ decomposition, a streamer and a glow mode in DBD are experimentally compared, which includes (i) coaxialcylinder DBD, (ii) DBD reactor packed with glass beads. and (iii) a glow mode operation with a helium gas. The test results showed that optimal concentration of oxygen was ranged 500 ppm~1% for treating 500 ppm of $CF_4$ and helium glow discharge was the most efficient one to decompose $CF_4$.

Seeking magnetic separatrices on the solar surface using EUV waves

  • Jang, Soojeong;Kwon, Ryun-Young;Kim, Rok-Soon;Lee, Jae-Ok
    • The Bulletin of The Korean Astronomical Society
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    • v.44 no.1
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    • pp.50.3-50.3
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    • 2019
  • The EUV wave is a disturbance that has been believed to be the fast-mode (shock) wave, which can propagate passing through magnetic field lines. After the passage of EUV waves, coronal streamers start to show kink-mode oscillations, and the footpoints, i.e., magnetic separatrices, of the oscillating streamers are observed as the so-called stationary front. We compare the stationary front observed by EUV imagers and coronal streamers observed in coronagraphic images. We analyze the successive events occurred in September 2011. We find that the stationary fronts are consistent with the coronal streamer boundaries, and they are located along the boundaries of coronal holes and active regions. Our results confirm that EUV waves are in fact fast-mode waves and demonstrate that the stationary front is a promising tool to probe into the source of slow solar wind that is the boundary of coronal streamers on the solar surface.

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Development of Autonomous Bio-Mimetic Ornamental Aquarium Fish Robotic (생체 모방형의 아쿠아리움 관상어 로봇 개발)

  • Shin, Kyoo Jae
    • KIPS Transactions on Software and Data Engineering
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    • v.4 no.5
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    • pp.219-224
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    • 2015
  • In this paper, the designed fish robots DOMI ver1.0 is researched and development for aquarium underwater robot. The presented fish robot consists of the head, 1'st stage body, 2nd stage body and tail, which is connected two point driving joints. The model of the robot fish is analysis to maximize the momentum of the robot fish and the body of the robot is designed through the analysis of the biological fish swimming. Also, Lighthill was applied to the kinematics analysis of robot fish swimming algorithms, we are applied to the approximate method of the streamer model that utilizes techniques mimic the biological fish. The swimming robot has two operating mode such as manual and autonomous operation modes. In manual mode the fish robot is operated to using the RF transceiver, and in autonomous mode the robot is controlled by microprocessor board that is consist PSD sensor for the object recognition and avoidance. In order to the submerged and emerged, the robot has the bladder device in a head portion. The robot gravity center weight is transferred to a one-axis sliding and it is possible to the submerged and emerged of DOMI robot by the breath unit. It was verified by the performance test of this design robot DOMI ver1.0. It was confirmed that excellent performance, such as driving force, durability and water resistance through the underwater field test.