• Journal of the Korean Society for Precision Engineering
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• v.24 no.3 s.192
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• pp.117-123
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• 2007

This paper describes a three-probe system that can be used to measure the parallelism and straightness of a pair of rails simultaneously. The parallelism is measured using a modified reversal method, while the straightness is measured using a sequential two-point method. The measurement algorithms were analyzed numerically using a pair of functionally defined rails to validate the three-probe system. Tests were also performed on a pair of straightedge rails with a length of 250 mm and a maximum straightness deviation of $0.05{\mu}m$, as certified by the supplier. The experimental results demonstrated that the parallelism-measurement algorithm had a cancellation effect on the probe stage motion error. They also confirmed that the proposed system could measure the slope of a pair of rails about $0.06{\mu}rad$. Therefore, by combining this technique with a sequential differential method to measure the straightness of the rails simultaneously, the surface profiles could be determined accurately and eliminate the stage error. The measured straightness deviation of each straight edge was less than $0.05{\mu}m$, consistent with the certified value.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2013.05a
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• pp.551-552
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• 2013

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.203-206
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• 2001

This paper presents a straightness measurement system for flat and long workpieces. The measurement system consists of a laser optical unit, a CCD camera and processing system, and a carrier system with a stylus. The carrier system accompanies the stylus, which displaces a retroreflector along the surface profile. The optical unit is used to optically amplify the displacement of retroreflector. The CCD camera and processing system finally identifies the vertical displacement of the stylus unit. The developed system is applied to two surfaces: ground surface and LM guide surface. The experimental results show that the developed system can measure the straightness of flat surfaces within sub-micron error.

• Journal of the Korean Society for Precision Engineering
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• v.16 no.8
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• pp.130-137
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• 1999

The criteria for determining the elements are the minimum zone method(MZM) and the least squares method(LSM). The LSM is deterministic and simple but is limited at the measurements whose errors are significant compared with form errors. For the precise condition, minimum zone method(MZM) has been selected to determine the elements. It is not deterministic and nonlinear so that a optimizing procedure is needed. The Straightness is the fundamental problem in the evaluating form error. In this paper, a new approach adapting the genius education concept is proposed to obtain an accurate results for the minimum zone problem of the straightness. Its computational algorithm is studied on a set of randomly generated data. To be of almost no account of the specification(the number and the standard devistion etc.) of the sample data, the results shows excellent reliability and high accuracy in estimating the straightness.

• Journal of the Microelectronics and Packaging Society
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• v.26 no.1
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• pp.17-21
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• 2019

In this paper, a high precision straightness measurement system has been developed at low cost using a visible laser and CMOS image sensor. CMOS image sensor detected optical image and the variation of straightness was calculated by image processing. We have observed that the error of the developed straightness measurement system was 0.9% when a distance of 3m between laser and image sensor. And it can be applied to 3D printer and any other areas.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.05a
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• pp.125-126
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• 2010

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.283-286
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• 2002

This paper presents the straightness compensation system which is a device for improving the machining accuracy of ultra-precision machines by synchronizing the position of diamond tool tip with machine error motion. Sine it is actuated by piezoelectric actuator with highly nonlinear hysteresis characteristics, the feedback control schemes such as Proportional Integral(PI), are required and realized by measuring the displacements of diamond tool tip. for the better tracking performance, the controller was implemented using TMS320C32 32bit floating-point DSP which is fast so that the real-time control is possible. In addition, stand alone type DSP board was chosen fur the easy assembly into the ultra-precision machines. The experimental results show good command tracking performance and the motion error of the machine is satisfactorily compensated during the machining process.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.1380-1383
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• 2004

The scanning type XY stage is frequently used these days as precision positioning system in equipment for semiconductor or display element. It is requested higher velocity and more precise accuracy for higher productivity and measuring performance. The position accuracy of general stage is primarily affected by the geometric errors caused by parasitic motion of stage, misalignments such as perpendicular error, and thermal expansion of structure. In the case of scanning type stage, H type frame is usually used as base stage which is driven by two actuators such as linear motor. In the point view of scanning process, the stage is used in moving motion. Therefore, dynamic variation is added as significant position error source with other parasitic motion error. Because the scanning axis is driven by two actuators with two position detectors, 2 dimensional position errors have different characteristic compared to general tacked type XY stage. In this study 2D position error of scanning stage is analyzed by 1D heterodyne interferometer calibrator, which can measure 1D linear position error, straightness error, yaw error and pitch error, and perpendicular error. The 2D position error is evaluated by diagonal measurement (ISO230-6). The yaw error and perpendicular error are compensated on the base stage of scanning axis. And, the horizontal straightness error is compensated by cross axis compensation. And, dynamic motion error in scanning motion is analyzed.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.24 no.10 s.181
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• pp.2451-2460
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• 2000

In order to minimize straightness error of deflected shaft, a geometric adaptive straightness controller system is studied. A multi-step straightening and a three-point bending process have been developed for the geometric adaptive straightness controller. Load-deflection relationship, on-line identification of variations of material properties, on-line springback prediction, and real-time hydraulic control methodology are studied for the three-point bending process. By deflection pattern analysis and fuzzy self-learning method in the multi-step straightening process, a straightening point and direction, desired permanent deflection and supporting condition are determined. An automatic straightening machine has been fabricated for rack bars by using the developed ideas. Validity of the proposed system is verified through experiments.

• Proceedings of the Korean Society for Agricultural Machinery Conference
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• 2000.11b
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• pp.170-177
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• 2000

Sorting cut roses according to quality is very essential to increase the value of the product. Many factors are involved in determining the grade of cut roses: length, thickness, and straightness of stem, color and maturity of bud, and extra. Among these factors, the stem straightness and bud maturity are considered to be difficult to set proper classification criteria. In this study, a prototype machine and an analysis procedure were developed to grade cut roses according to stem straightness and bud maturity by utilizing color image processing and neural network. The test results indicated 15.8% classification error for stem straightness and 10.0% for bud maturity.