• Transactions of the Korean Society of Mechanical Engineers A
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• v.26 no.6
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• pp.1178-1186
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• 2002

Clean stockers are being used by semiconductor and TFT-LCD manufacturers to store and buffer work in process. The only way to keep the stored product clean is to provide constant clean airflow the product and through stocker. Up to now, stockers typically have been configured to receive their laminar airflow from fan filter units that are located on the side of the stocker. This type of stocker may have such problems as complexity of structure, increment of temperature, mechanical vibration, initial investment and running cost. In this study, in order to solve the above mentioned problems, new air control system in stocker is proposed, which is to control open ratios of exits that are located on the side of the stocker without fan filter units. In this study, static pressure regain was used for the analysis of the open ratios of exits theoretically and experiment was also conducted using actual clean stocker for TFT-LCD manufacturers and CFDesign, was used for simulating airflow in stocker. As a result, open ratios of exits can be obtained by the analysis of static pressure regain and was verified by experiment and simulation results. Therefore, new air control system in stocker can be used by the semiconductor and TFT-LCD manufacturers.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.26 no.1
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• pp.121-130
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• 2002

Clean stockers are being used by semiconductor and TFT-LCD manufacturers to store and buffer work in process. Since an important function of a stocker is to keep the contained material clean. The only way to keep the stored product clean is to provide constant clean airflow the product and through stocker, The airflow across the product prevent contamination from settling on the product. Up to now, stocker typically have been configured to receive their laminar airflow from fan filter units that are located on the side of the stocker This type of stocker may have such problems as complexity of structure, increment of temperature, mechanical vibration, initial investment and running cost. In this study, In order to solve the above mentioned problems, new air control system in stocker is proposed, which is to control open ratios of exits that are located on the side of the stocker without fan filter units. Open ratios of exits need to be optimized for the same quantities of airflow in each exit. In this study, static pressure regain was used for the analysis of the open ratios of exits theoretically and Blue Ridge Numerics FEM software, CFDesign, was used fur simulating airflow in stocker. As a result, Open ratios of exits important to provide constant clean airflow can be obtained by the analysis of static pressure regain and was verified by simulation results. Therefore, new air control system in stocker can be used by the semiconductor and TFT-LCD manufacturers.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.10a
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• pp.261-261
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• 2003

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.10a
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• pp.110-110
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• 2003

• IE interfaces
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• v.10 no.1
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• pp.57-65
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• 1997

Less researches on AGV(Automated Guided Vehicle) path configurations have been conducted so far while more studies have been placed in determining AGV guide path directions and pick-up/drop-off station locations, and routing/dispatching/scheduling strategies. In practice plenty of concerns fall in preventing deadlock and simplifying AGV system control through an appropriate AGV path configuration. In order to meet those requirements, a new AGV path configuration, inter-loop stocker type is introduced here. The stocker serves as relaying material between loops as well as stocking material. Automated material handling systems using AGVs play an important role in semiconductor industry including TFT LCD and memory/non-memory chip. A practical example of implementing the inter-loop stocker concept successfully in the TFT LCD fab is presented in this paper.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.418-421
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• 2004

This research is that analysis multi-body system that have flexibility. We composed system consisted of crane, part of traveling and robot. And we analyzed the aspect of vibration when this system runs using ADAMS. Through this research we can analyze vibration and displacement of end-effect part of the large size robot. And this research can became reference that is going to analyze resemblant dynamic system.

• 제어로봇시스템학회:학술대회논문집
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• 2005.06a
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• pp.604-609
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• 2005

This paper presents an experimental study for optimizing the acceleration of AC servomotor using finite jerk (the first derivative of acceleration). The acceleration optimization with finite jerk aims at generating the smooth velocity profile of AC servomotor by experimentally minimizing vibration resulted from the initial friction of servomotor. The stick-slip motion of AC servomotor induced by initial friction can result in the positional errors that are not good for high-precision devices such as the assembly robot arms to be used in a 300mm wafer or a LCD (Liquid Crystal Display) stocker system. In this paper, experiments were made by using a PM (Permanent Magnet) type AC servomotor with MMC(R) (Multi Motion Controller) programmed in Visual C++(R). The experiments have been performed for finding the optimal duration time of finite jerk in terms of the minimization of vibration displacements when both the magnitude of velocity and the allowable acceleration are given. We have compared the proposed control with the conventional control with trapezoidal velocity profile by measuring vibration displacements. The effectiveness of the proposed control has been verified in that the experimental results showed the decrease of vibration displacement by about 24%.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.10 no.5
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• pp.1074-1081
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• 2009

The importance of improving semiconductor fab layout has been increased with the necessity of a large-scale capital investment and the increase of manufacturing complexity of the system. For the present, most semiconductor fab takes the form of a bay type layout where the same types of machines has been laid at the same bay. The bay type layout has many disadvantages in respect of material flow control even though it has merits of flexibility. To overcome the drawbacks of the bay type layout, a new room type semiconductor layout which integrates bays without a center spine and maintains the flexibilities of the bay type has been presented and compared with existing layouts. The results of test show that the room type layout is superior to the existing layouts from standpoints of transportation number and time, foot-print, number of stocker being passed and material flow time.