• Fire Science and Engineering
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• v.18 no.4
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• pp.22-26
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• 2004

The static eliminator is used for prevention of disasters by static discharge, improvement of production efficiency, protection of a sensitive electronic element on the discharge of static, and it is handled for elimination of static in the painting plant, the film manufacturing plant, the producing semi-conductor factory. This study described on the explosion appearance by discharge phenomena on the voltage input type eliminator's ion generation bar of inflammable gas through an experimental tests. It was used Hydrogen, Ethylene, Propane, Methane gas with the inflammable gas and it was studied on the ignition phenomena by the length of ion-generation static bar, the number of ion-generation electrode and the variation of input voltage to the ion-generation electrode. As a result of this study it was confirmed that the shorter of the bar's length, the greater of explosion danger. And it is considered that there will not ignite at general using inflammable gas, in case of more than 900 mm bar and one electrode.

• Journal of the Korean Society of Safety
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• v.24 no.6
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• pp.50-54
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• 2009

Ionizer is used for improving manufacturing process and reducing inferior goods in the clean room. As a general rule, neutralization of the electrostatic charge is most important to make TFT-LCD, PDP and OLED. Pulse AC-static eliminator with output voltage of about 10.5kV has been used these days as neutralization device. But this device has a problem with lower performance which was caused by particles-adhesion on the electrode when it has been used for a long time. So we studied to solve the problem with lower performance using high Frequency(72kHz) static eliminator which was produced by Piezo transformer device, and compared Pulse-AC type with Piezo-electronic device such as decay time and ion balance for 10 weeks periods. As a result of this study, we found that Piezo transformer device has been maintained normal condition for 10 weeks. Also, we made the rule by this study, normally Piezo transformer device has to clean the electrode during every 11th weeks.

• Journal of the Korean Institute of Gas
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• v.8 no.4 s.25
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• pp.62-69
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• 2004

It is necessary to eliminate the electric static for the prevention of disasters by electric static discharge, the improvement of production efficiency, the protection of a sensitive electronic devices in the variable manufacturing processes. Then it is handled for elimination of electric static in the painting plant, the film manufacturing plant, the producing semi-conductor factory. This study described on the ideal condition of electric static elimination efficiency by changing of the length of voltage input type eliminator's bar, the length of copper pipe and the gap of electrode and the existence of explosion by inflammable gas with that conditions. As the result, the electric static elimination efficiency has the most ideal value at the 8-11(mm) gap of the earth electrode and needle type electrode each elimination bar and there is not explode at the explosive experiment of inflammable gas with the ideal elimination bar. We can consider that there are some data which are needed for elimination efficiency and it will be able to protect the occurrence of explosion accident inflammable nas in the industrial fields.

• Journal of the Korean Society of Safety
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• v.31 no.3
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• pp.42-46
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• 2016

In LCD Display or semiconductor manufacturing processes, the anti-static technology of glass substrates and wafers becomes one of the most difficult issues which influence the yield of the semiconductor manufacturing. In order to overcome the problems of wafer surface contamination various issues such as ionization in decompressed vacuum and inactive gas(i.e. $N_2$ gas, Ar gas, etc.) environment should be considered. Soft X ray radiation is adequate in air and $O_2$ gas at atmospheric pressure while UV radiation is effective in $N_2$ gas Ar gas and at reduced pressure. At this point of view, the "vacuum ultraviolet ray ionization" is one of the most suitable methods for static elimination. The vacuum ultraviolet can be categorized according to a short wavelength whose value is from 100nm to 200nm. this is also called as an Extreme Ultraviolet. Most of these vacuum ultraviolet is absorbed in various substances including the air in the atmosphere. It is absorbed substances become to transit or expose the electrons, then the ionization is initially activated. In this study, static eliminator based on the vacuum ultraviolet ray under the above mentioned environment was tested and the results show how the ionization performance based on vacuum ultraviolet ray can be optimized. These vacuum ultraviolet ray performs better in extreme atmosphere than an ordinary atmospheric environment. Neutralization capability, therefore, shows its maximum value at $10^{-1}{\sim}10^{-3}$ Torr pressure level, and than starts degrading as pressure is gradually reduced. Neutralization capability at this peak point is higher than that at reduced pressure about $10^4$ times on the atmospheric pressure and by about $10^3$ times on the inactive gas. The introductions of these technology make it possible to perfectly overcome problems caused by static electricity and to manufacture ULSI devices and LCD with high reliability.