• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2009.11a
• /
• pp.184-184
• /
• 2009

This paper introduces the characteristics of SnO2 inorganic film deposited by radio-frequency magnetron sputtering as an alternative alignment layer for liquid crystal display (LCD) applications. The pretilt angle of the SnO2 layer was shown to be a function of the ion beam(IB) incident angle, a planer alignment of nematic liquid crystal was achieved. The about $1.8^{\circ}$ of stable pretilt angle was achieved at the range from 1500 ~ 2500eV of incident energy. To characterize the film shows atomic force microscopy (AFM) on the IB irradiated SnO2 surfaceand the X-ray phtoelectron spectroscopy analysis showed that the liquid crystal(LC) alignment on the IB irradiated $SnO_2$ surface was due to the reformation of Sn-O bonds. Also, Figure 1 shows that The alignment capability of the IB irradiated SnO2 layers is maintained until annealing temperature of $200^{\circ}C$. Comparable electro-optical characteristics to rubbed polyimide were also achieved.

• Korean Journal of Materials Research
• /
• v.15 no.6
• /
• pp.361-369
• /
• 2005

InP(100) crystal surface was irradiated by ion beams with low energy $(180\~225\;eV)$ and high flux $(\~10^{15}/cm^2/s)$, Self-organization process induced by ion beam was investigated by examining nano structures formed during ion beam sputtering. As an ion source, an electrostatic closed electron Hall drift thruster with a broad beam size was used. While the incident angle $(\theta)$, ion flux (J), and ion fluence $(\phi)$ were changed and InP crystal was rotated, cone-like, ripple, and anistropic nanostrucuture formed on the surface were analyzed by an atomic force microscope. The wavelength of the ripple is about 40 nm smaller than ever reported values and depends on the ion flux as $\lambda{\propto}J^{-1/2}$, which is coincident with the B-H model. As the incident angle is varied, the root mean square of the surface roughness slightly increases up to the critical angle but suddenly decreases due to the decrease of sputtering yield. By the rotation of the sample, the formation of nano dots with the size of $95\~260\;nm$ is clearly observed.

• Journal of the Korean institute of surface engineering
• /
• v.31 no.4
• /
• pp.217-222
• /
• 1998

The Facing Targets Sputtering(FTS) system has several advantages for preparing films over a wide range of working gas pressure on plasma-free substrates. Co-Cr thin films seem to be one of the most promising media for perpendicular magnetic recording system. In this study, the capabillities of the system fordepositing C0-Cr films have been investigated. Under various Ar gas pressure, films with morphologically dense microstructure and good c-axis orientation were deposited, even when the incident angle $\psi_x$ of sputtered part icles to the film plane was below abount $50^{\circ}C$. this may imply that the shadowing effect by obique incidence of particle can be compensated by rapid surface diffusion owing to the high kinetic energy of particles arriving at the growing film. It has been confirmed that the FTS system is very useful for perparing Co-Cr thin films recorging media.

• Korean Journal of Materials Research
• /
• v.8 no.3
• /
• pp.195-199
• /
• 1998

Magnetic and Magneto-Optical properties of Co-based MnSbPt thin films prepared by R.F Sputtering were investigated. In this study, the optimum heat treatment condition was found to be $300^{\circ}C$-4hours under a $5\times10^{-6}$ Torr, but perpendicularly magnetized thin films could not be obtained. Coercive force showed maximum value of about 5000e at $250\AA$ Co thickness but the value is not enough for practical use of the thin film. Heat treated Co-based MnSbPt thin film shows 0.78 degree of Kerr rotation angle for 700nm of incident wavelength.

• Journal of the Korean Magnetics Society
• /
• v.6 no.2
• /
• pp.93-97
• /
• 1996

The effects of annealing after deposition on the magnetic and magneto-optical properties of MnSbPt thin films prepared by rf sputtering were investigated. The MnSbPt alloy thin films were annealed in a vacuum with $10^{-5}$ Torr and the air, respectively, as a function of temperature and time. The films annealed at $300^{\circ}C$ for 4 hours was found to have the highest value of the saturation magnetization. The films annealed in the air did not show any thermal degradations, which indicates their chemical stability for the magneto-optical recording process. It was revealed that the $Mn_{43}Sb_{46}Pt_{11}$ films annealed at $300^{\circ}C$ for 4hours in a vacuum with $10^{-5}$ Torr exhibit high Kerr rotation angle of $0.8^{\circ}$ for the incident wavelength of 550nm, which is ascribed to the increase of the volume ratio of Clb phase. However, similar to the PtMnSb alloy thin films, these films are still horizontally magnetized and have the coercive field less than 400 Oe.

• 한국정보디스플레이학회:학술대회논문집
• /
• 2005.07a
• /
• pp.328-329
• /
• 2005

Inorganic alignment layer (IAL) was deposited on an indium-tin-oxide (ITO) by using reactive sputtering deposition method. After deposited, IAL was irradiated by $Ar^+$ ion beam (IB) for liquid crystal (LC) alignment. IAL treated by various conditions such as IB energy, IB incident angle, and IB irradiation time had excellent alignment property and electro-optical property the same as that of PI. We investigated into the stability of ion beam treated IAL after a lapse of long time. However IAL irradiated IB did not occur degradation of electro-optical property. The results implied that IAL irradiated IB was adopted as LC alignment layer instead of rubbed polyimide.

• Journal of the Korean Magnetics Society
• /
• v.8 no.3
• /
• pp.156-160
• /
• 1998

Crystal structures and magneto-optical properties of $(Mn_{0.5-Z}Sb_{0.5+Z})_{100-y}Pt_y$ (0$(Mn_{0.5-Z}Sb_{0.5+Z})_{100-y}Ag_y$ (0$^{\circ}C$ are C1b-type with fcc and NiAs-type with hcp, respectively. The MnSbAg films have a texture which the c-axis orientation is perpendicular to the film plane by annealing at 300 $^{\circ}C$ for less than 3 hours. The perpendicular anisotropy constants of the $Mn_{47.4}Sb_{47.5}Ag_{5.1}$ film annealed at 300 $^{\circ}C$ for 3 hours are $K_1=6.6{\times}10^5 \; erg/cm^3\;and\;K_2=1.9{\times}10^5\; erg/cm^3$. The Kerr rotation angle of MnSbPt films increases but that of MnSbAg film decreases by decreasing incident wavelength within the range of 700$\leq$ λ$\leq$1000 nm. High polar Kerr angles of 1.7$^{\circ}$ (λ =700 nm) and 0.6$^{\circ}$ (λ =1000 nm), 0.2$^{\circ}$ (λ =700 nm) and 0.97$^{\circ}$ (λ =1000 nm) have been obtained from $Mn_{41.1}Sb_{44,9}Pt_{14.0}$ and $Mn_{47.4}Sb_{47.5}Ag_{5.1}$ alloy films, respectively.