• 청정기술
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• 제13권4호
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• pp.257-265
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• 2007

반도체 공정에서 배출되는 폐 포토레지스트 스트리퍼(photoresist stripper)의 주성분인 NMP (N-methy-pyrrolodione)와 BDG (Butyldiglyrcol)를 회수하여 재활용할 목적으로 나선형 스핀밴드시스템(spinning band stem)이 장착되어 있는 진공증류장치를 이용하여 실험실적 규모의 증류실험을 수행하였다. 정제된 NMP와 BDG의 순도는 포토레지스트 스트리퍼용 용제 기준 물성치인 순도 99.5% 이상이었고, 수분 1000 ppm 이하, 색도(APHA) 50 이하, 나트륨 성분을 제외한 대부분의 금속성분은 1 ppb 이하로 반도체용 스트리퍼 용액 제조에 재활용할 수 있는 수준임을 확인하였다. NMP와 BDG의 회수을은 PR스트리퍼 폐액 A 타입의 경우 NMP 96%, BDG 53%, B 타입의 경우 NMP 93%, BDG 57%이었다.

• Archives of Pharmacal Research
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• 제9권4호
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• pp.237-242
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• 1986

The Synthesis of E, E, E-12-fluorofarnesol and E, Z-6-fluorofarnesol which are key intermediates for the study of biosynthesis of some sesquiterpenes, is described. E, E-Farnesyl acetate is treated with selenium dioxide to give E, E, E-12-hydroxy farnesyl acetate, whih is transformed by DAST into E, E, E-12-hydroxy farnesyl acetate, which is transformed by DAST into E, E, E,-12-fluorofarnesylacetate. The latter compound is hydrolyzed to E, E, E,-12-fluorofarnesol. The reformatsky reaction of 6-methyl-5-hepten-2-one with ethyl bromofluoroacetate affords ethyl 2-fluoro-3-hydroxy-3, 7 dimethyl-6-octanoate. This ester is acetylated and eliminated to give ethyl (Z)-2-fluoro-3, 7-dimethylocta-2, 6-dienoate, which is transformed to allyl bromide via allylic alcohol. The allyl bromide is treated with dianion of methyl acetate to give-keto ester. The $\beta$-keto ester is converted to diethyl phosphoryloxy compound. The conjugate addition of lithium dimethylcuprate to the latter compound gives fluoro ester, which is treated with DIBAL to afford E, Z-6-fluorofarnesol.