• Journal of the Semiconductor & Display Technology
• /
• v.15 no.1
• /
• pp.6-11
• /
• 2016

For high volume manufacturing using extreme ultraviolet (EUV) lithography, mask protection from contamination during lithography process must be solved, and EUV pellicle is the strongest solution. Based on the technical requirements of EUV pellicle, EUV pellicle should have large membrane area ($110{\times}140mm^2$) with film transmittance over 90% and mechanical stability. Even though pellicle that satisfies size standard with high transmittance has been reported, its mechanical stability has not been confirmed, nor is there a standard to evaluate the mechanical stability. In this study, we suggest a rather simple method evaluating mechanical stability of pellicle membrane using spin-coater which can emulate the linear accelerated motion. The test conditions were designed by simulating the acceleration distribution inside pellicle membrane through correlating the linear acceleration and centripetal acceleration, which occurs during linear movement and rotation movement, respectively. By these simulation results, we confirmed the possibility of using spin-coater to evaluate the mechanical stability of EUV pellicle.

• Journal of the Korean Chemical Society
• /
• v.50 no.3
• /
• pp.243-246
• /
• 2006

The LiCoO2 thin films were prepared on the Pt/Ti/SiO2/Si substrate by spin coating using citrate sol. The citrate sol was spin-coated on substrate and dried at 380oC for 15 min. to evaporate the solvents and remove the organic materials. The as-deposited films were annealed at 750oC for 10 min. in air for crystallization. The X-ray diffraction patterns for the film have been indexed hexagonal system with space group R3m. The active area of LiCoO2 films for electrochemical test was about 11cm2. A Li foil and 1M LiClO4 in propylene carbonate(PC) and ethylene carbonate(EC) (1:1)were used as an anode and an electrolyte, respectively. The galvanostatic charge-discharge test was carried out at constant current density ranging from 5 A/cm2 in the voltage window between 4.2 and 3.0 V. The first discharge capacity of the film is 0.35Ah/cm2-m. The cycling behavior of the LiCoO2 film is also reported.

• Journal of the Korean Society for Aeronautical & Space Sciences
• /
• v.39 no.5
• /
• pp.385-390
• /
• 2011

The purpose of this research is to determine the dynamic Magnus effect data of a spinning projectile in wind-tunnel testing. In the present work, the high-speed wind-tunnel tests for the Magnus effect measurements were conducted on a 155-mm spin-stabilized projectile model in the Agency for Defense Development's Tri-Sonic Wind Tunnel at spin rates about 12,000 rpm. The test Mach numbers ranged from 0.7 to 2.0, and the angles of attack ranged from -4 to +10 deg. The validity of the wind-tunnel measurement techniques was evaluated by comparing them with the previous test results on the same configuration. The experimental results show that fair to good agreement is obtained with resonable accuracy.

• Tribology and Lubricants
• /
• v.16 no.6
• /
• pp.415-424
• /
• 2000

The use of magnetoresistive (MR) head requires much tighter control of particle contamination in a drive since loose particles on the disk surface will generate thermal asperities (TA). In this study, a spinoff test was performed to investigate the adhesion and removal capability of a particle to disk surface. Numerical simulation was also performed to investigate dominant factor of particle detachment and to support experimental results. It was shown that particles are detached from the disk surface by the moment derived from the centrifugal force and the drag force and that the centrifugal force and capillary force are the dominant force, which determines spin-off of a particle on the disk surface. Removal of particles smaller than several micrometers, which are the main source of TA generation, is extremely difficult since the adhesion forces exceed the centrifugal force. Lubricant types and manufacturing process also influence the particle removal. Lower bonding ratio and lower viscosity of the lubricant will help to increase the removal rate of the particles from the disk surface.

• Journal of the Korean Society for Aeronautical & Space Sciences
• /
• v.48 no.9
• /
• pp.681-689
• /
• 2020

This paper presents methods and results of both flight test examining roll angle estimation performance of slowly rolling munition forced to spin in the air, and fabricating a replica of guided munition. Guided munition was deployed from multi rotor type UAV mother ship whose altitude and velocity was conveyed to it as initial state. Flight test scenario is composed of a sequence of munition drop(deployment), munition spin, roll angle estimation and stabilization. Munition was deployed from mother ship at around 200m high with horizontal velocity of 15m/s, and was made spun using internal reaction wheel. Performance analysis on roll angle estimation is provided in comparison with commercial aerospace graded GPS/INS. Moreover, several mechanisms that rotates munition using reaction wheel, and actual product that realizes one of them are introduced.

• Journal of the Korea Academia-Industrial cooperation Society
• /
• v.11 no.9
• /
• pp.3135-3140
• /
• 2010

A 5 kWh composite flywheel rotor was designed and manufactured, and its spin test was performed to monitor strain distribution and burst speed. Strain distribution in radial and circumferential directions of the rotor were measured using a wireless telemetry system based on bluetooth technology for real-time strain measurement. The strains was compared with pre-calculated design values to verify the initial rotor design. We noticed the rotor failed at 19,499 rpm in the spin test, 11 % lower than the predicted burst speed of 22,000 rpm. Failure occurred at the hub which connects the shaft and the composite rotor. The performance of the composite rotor was confirmed in a general sense, and the danger of unexpected failure of composite rotor during high-speed spinning was also demonstrated in this paper. Special attention should be paid to not only composite rotor but also hub when designing a flywheel energy storage system. The telemetry system needs to be further developed, especially enduring the high centrifugal forces, and can be used in a real time monitoring system for the flywheel energy storage system.

• Journal of the Korean Society for Aviation and Aeronautics
• /
• v.13 no.3
• /
• pp.97-109
• /
• 2005

A canard type aircraft, which has good wing stall and stall/spin-proof characteristics, is under development. The aircraft prototype has full-depth core sandwich type wing and fixed landing gear, and has been built for test flights. Newly developing aircraft will be equipped with retractable landing gear and conventional foam core sandwich laminate structures and multi-rib wings. In this study, we present the structural test procedure and result for aircraft Firefly.

• Macromolecular Research
• /
• v.10 no.2
• /
• pp.67-74
• /
• 2002

New immunoprotecting membranes were prepared by spin coating the amphiphilic random multiblock copolymers of poly(ethylene glycol) (PEG) and poly(tetramethylene ether glycol) (PTMEG) or poly(dimethyl siloxane) (PDMS) on porous Durapore(R) membrane. The copolymer coating was intended to make a biocompatible, immunoprotecting diffusional barrier and the supporting porous substrate was for mechanical stability and processability. By filling Durapore(R) membrane pores with water, the penetration of coating solution into the pores was minimized during the spin coating process. A single coating process produced a completely covered thin surface layer (~1 ${\mu}{\textrm}{m}$ in thickness) on the porous substrate membrane. The permselectivity of the coated layer was influenced by PEG block length, polymer composition, and thickness of the coating layer. A composite membrane with the coating layer prepared with PEG 2 K/PTMEG 2 K block copolymer showed that its molecular weight cut-of fat any 40 based on dextran was close to the molecular size of IgG (Mw = 150 kDa). However, IgG permeation was detected from protein permeation test, while glucose oxidase (Mw = 186 kDa) was not permeable through the coated membrane.

• Proceedings of the Korean Society for Technology of Plasticity Conference
• /
• 2006.05a
• /
• pp.127-131
• /
• 2006

There are being a lot of studies for achievement of high speed Dehydration, high-strength and Lightweight of washing machine in the latest washing machine business. It is essential that Press-joining Strength of Spin Drum Seaming division is improved .to attain that target. Generally, we are using Mechanical press-joining by Seaming and T.I.G (Tungsten Inert Gas) welding among part joint method. Mechanical press-joining method that is mainly using for Stainless Steel (STS430) Drum have lots of merit that consumption of energy is low more than welding and production costs cut down and generation of the corrosion is solved by removing weld zone defect and materials having different properties are enable to join without special equipment. But, it is difficult to realize joint strength required at high speed operation because joint strength of mechanical press-joining method is low remarkably in comparison with welding. Also, there are a lot of analysis difficulties and very limited research is under way due to the dynamic factor such as multistage plastic working, elastic recovery, residual stress etc. The results of this study show optimal joining condition for mechanical press-joining by performing lots of tensile joining strength test with various specimen under multi-change of important design factor such as seaming width, bead area and bead depth etc.

• Journal of the Korea Institute of Military Science and Technology
• /
• v.18 no.6
• /
• pp.728-735
• /
• 2015

A gas gun system to replicate the flight motions of large caliber spin-stabilized ammunition has been investigated experimentally and numerically. The system is specially designed to study aerodynamic characteristics and dynamics of a flight body ejected from a cargo shell or a subsonic projectile itself at up to 2,000 rpm and 100 m/s. Raynolds-averaged Navier-Stokes equations with a overset mesh technique and 6-DOF dynamics were solved to decide the chamber pressure according to the muzzle velocity input by users. The predicted velocity values show less than 6 % of discrepancies compared to experimental data. The system has successfully been tested for the simulation of deployment of a parafoil for a 155 mm gun-launched projectile.