• Journal of the Korean Society for Precision Engineering
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• v.11 no.6
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• pp.168-178
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• 1994

This paper presents an optical surface roughness sensor developed for intermediate- process measurement on the machine. The light scattering method is adopted for the sensor, which is designed conpact and flexible enough to apply to 'on the machine' measurement of surface roughness. The developed sensor has special features such that it makes use, as the measurement parameter, of the ratio between fluxes of the incident light, and the specularly and partly diffusely reflected light, and that it can adjust the incident light angle. The experimental investigation reveals not only the sensor has good performance as a surface roughness sensor but the sensor is very robust so as to be useful in in-process measurement.