• Title/Summary/Keyword: Specular Surface

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Development of Elimination Method of Measurement noise to Improve accuracy for White Light Interferometry (백색광 간섭계의 정밀도 향상을 위한 노이즈 제거 방법)

  • Ko, Kuk-Won;Cho, Soo-Yong;Kim, Min-Young
    • Journal of Institute of Control, Robotics and Systems
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    • v.14 no.6
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    • pp.519-522
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    • 2008
  • As industry of a semiconductor and LCD industry have been rapidly growing, precision technologies of machining such as etching and 3D measurement are required. Stylus has been important measuring method in traditional manufacturing process. However, its disadvantages are low measuring speed and damage possibility at contacting point. To overcome mentioned disadvantage, non-contacting measurement method is needed such as PMP(Phase Measuring Profilometry), WSI(white scanning interferometer) and Confocal Profilometry. Among above 3 well-known methods, WSI started to be applied to FPD(flat panel display) manufacturing process. Even though it overcomes 21t ambiguity of PMP method and can measure objects which has specular surface, the measuring speed and vibration coming from manufacturing machine are one of main issue to apply full automatic total inspection. In this study, We develop high speed WSI system and algorithm to reduce unknown noise. The developing WSI and algorithm are implemented to measure 3D surface of wafer. Experimental results revealed that the proposed system and algorithm are able to measure 3D surface profile of wafer with a good precision and high speed.

Mega Irises: Per-Pixel Projection Illumination Compensation for the moving participant in projector-based visual system (Mega Irises: 프로젝터 기반의 영상 시스템상에서 이동하는 체험자를 위한 화소 단위의 스크린 투사 밝기 보정)

  • Jin, Jong-Wook;Wohn, Kwang-Yun
    • Journal of the Korea Computer Graphics Society
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    • v.17 no.4
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    • pp.31-40
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    • 2011
  • Projector-based visual systems are widely used for VR and experience display applications. But the illumination irregularity on the screen surface due to the screen material and its light reflection properties sometimes deteriorates the user experience. This phenomenon is particularly troublesome when the participants of the head tracking VR system such as CAVE or the motion generation experience system continually move around the system. One of reason to illumination irregularity is projector-screen specular reflection component to participant's eye's position and it's analysis needs high computation complexity. Similar to calculate specular lighting term using GPU's programmable shader, Our research adjusts every pixel's brightness in runtime with given 3D screen space model to reduce illumination irregularity. For doing that, Angle-based brightness compensate function are considered for specific screen installation and modified it for GPU-friendly compute and access. Two aspects are implemented, One is function access transformation from angular form to product and the other is piecewise linear interpolate approximation.

A Study of Reflectance Variations of Solar Concentrators (태양열 집광판의 반사율 변화 연구)

  • Lee, Hyun-Jin;Kim, Jong-Kyu;Lee, Sang-Nam;Kang, Yong-Heack;Lee, Seong-Uk;Park, Moon-Hee
    • Journal of the Korean Solar Energy Society
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    • v.30 no.5
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    • pp.107-114
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    • 2010
  • Understanding of reflectance of solar concentrators is important for assessing concentration performance. However inaccurate data about refractive indices of constituent materials and dust accumulation on the surface often prevent figuring out reflectance variations. The current study proposes an approach calculating concentrator reflectance based on the refractive index of glass obtained from reflectance and transmittance measurements. This approach improved accuracy of solar-averaged reflectance from 2.9% to 0.4% compared to the use of existing reference data. Reflectance variations with incidence angles are negligible up to $60^{\circ}C$ at various glass thicknesses. When concentrators are contaminated with dust during 2 months specular reflectance loss of vertically exposed concentrators is less than 7%. However for horizontally exposed concentrators the loss significantly increases up to 40% while dependence of reflectance on incidence angles becomes strong. Measurements of hemispherical reflectance indicate that 80 percentage of the loss comes from scattering rather than absorption by dust. Data of refractive index and reflectance provided in the current study will help estimate or model the concentrated solar flux.

3D Shape Reconstruction of Non-Lambertian Surface (Non-Lambertian면의 형상복원)

  • 김태은;이말례
    • Journal of Korea Multimedia Society
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    • v.1 no.1
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    • pp.26-36
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    • 1998
  • It is very important study field in computer vision 'How we obtain 3D information from 2D image'. For this purpose, we must know position of camera, direction of light source, and surface reflectance property before we take the image, which are intrinsic information of the object in the scene. Among them, surface reflectance property presents very important clues. Most previous researches assume that objects have only Lambertian reflectance, but many real world objects have Non-Lambertian reflectance property. In this paper the new method for analyzing the properties of surface reflectance and reconstructing the shape of object through estimation of reflectance parameters is proposed. We have interest in Non-Lambertian reflectance surface that has specular reflection and diffuse reflection which can be explained by Torrance-Sparrow model. Photometric matching method proposed in this paper is robust method because it match reference image and object image considering the neighbor brightness distribution. Also in this thesis, the neural network based shaped reconstruction method is proposed, which can be performed in the absence of reflectance information. When brightness obtained by each light is inputted, neural network is trained by surface normal and can determine the surface shape of object.

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Development of a Sensor Calibration to Enhance the Performance of a Non-contact Laser Optical Sensor Unit (비접촉 레이저 광센서의 성능 향상을 위한 센서보정에 관한 연구)

  • Seo, Pyeong-Won;Ryu, Young-Kee;Oh, Choon-Suk;Byun, Jong-Hwan
    • Proceedings of the KIEE Conference
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    • 2006.10c
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    • pp.579-581
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    • 2006
  • Flat panel image display devices such as TFT LCD and PDP have required more large area and high quality control components. To control the qualities of the components, measurements of the flatness of a plate glass has been required. In order to measure the shape of the specular objects, Non-Contact Optical Sensor using Hologram laser unit was proposed. The sensor has a optical system that is composed of a Hologram laser and objective lens. The temperature of the sensor body is controlled by TEC(Thermoelectric Cooler) to maintain the same wavelength of the diode laser. In this research, we proposed the calibration scheme to make sensor real time measuring sensor. From the experimental results we see that the proposed sensor unit can measure the position of the glass surface in rial time.

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Impact Ionization Characteristics Near the Drain of Silicon MOSFET's at 77 and 300 K Using Monte Carlo Method (몬데 칼로 방법을 이용한 실리콘 MOSFET의 드레인영역에서 77 K와 300 K의 Impact Ionization 특성)

  • Rhee, Jun-Koo;Park, Young-June;Han, Min-Koo
    • Proceedings of the KIEE Conference
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    • 1989.11a
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    • pp.131-135
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    • 1989
  • Hot electron simulation of silicon using Monte Carlo method was carried out to investigate impact ionization characteristics near the drain of MOSFET's at 77 and 300K. We successfully characterized drift velocity and impact ionization at 77 and 300K employing a simplified energy band structure and phonon scattering mechanisms. Woods' soft energy threshold model was introduced to the Monte Carlo simulation of impact ionization, and good agreement with reported experimental results was resulted by employing threshold energy of 1.7 eV. It is suggested that the choice of the critical angle between specular reflection and diffusive scattering of surface roughness scattering may be important in determining the impact ionization charateristics of Monte Carlo simulation near the drain of MOSFET's.

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The Characteristics of Aluminum Thin Films using DC Magnetron Sputtering (DC Magnetron Sputtering에 의해 증착된 알루미늄 박막의 특성)

  • Pyo, Jae-Hwack;Yeon, Chung-Kyu;Whang, Ki-Woong
    • Proceedings of the KIEE Conference
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    • 1993.11a
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    • pp.258-260
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    • 1993
  • Aluminum thin films were deposited on glass substrate using DC Magnetron Sputtering. Deposition rate, specular reflectance, and resistivity were investigated as a function of the input power, pressure, substrate temperature, and deposition time. Reflectance was reduced with increasing power, also with prolonging deposition time. Topography of the surface, which influences the properties such as electromigration, was observed from scanning electron microscope (SEM) and there was a close relation between the topography and measured reflectance.

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Shape Recognition of Hybrid Reflectition Object (혼합반사 물체의 형상인식)

  • 김태은
    • Proceedings of the Korea Multimedia Society Conference
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    • 2000.11a
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    • pp.224-227
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    • 2000
  • 본 논문에서는 기준 영상으로부터 면의 반사특성을 검출하고, 구해진 반사특성을 임의의 물체에 적용하여 3매의 명암영상을 얻는다. 이 영상을 측광입체시법(photometric stereo method)에 적용하여 3차원 형상인식하는 방법을 제시한다. 본 연구에서 목적으로 하는 물체의 반사특성은 난반사(diffuse reflection)성분과 전반사(specular reflection)성분이 혼합된 혼합 반사면(hybrid reflectance surface)을 그 대상으로 하며, 이러한 면의 반사특성은 Torrance-sparrow모델로 가정하여 문제를 해결해 나간다. 본 연구에서 목적으로 하는 대상 물체는 동일한 재질로 이루어졌다는 가정 하에서 몇개의 표본점들을 취해 반복수치 계산하기 때문에 계산속도가 빠르며, 각 표본점들로부터 계산된 면특성 파라메터들의 평균값을 취해서 다시 Torrance-sparrow모델에 적용함으로써 측광입체시법의 해석을 가능토록 한다. 즉, 3차원 형상인식 과정시 계산된 면특성 파라메터를 사용해 생성한 참조표와 명암영상과의 비교에 의해 빠른 면방향 복구를 행할 수 있다.

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레이저 표면 거칠기 측정에서 가중 함수에 의한 반사광 성분의 블렌딩

  • 서영호;안중환
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2004.05a
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    • pp.171-171
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    • 2004
  • 반사광은 표면에 대한 다양한 정보를 포함하고 있다. 반사광 속에서 표면의 거칠기 정보를 알아내 기 위한 노력이 계속되었고, 이를 통해 여러 표면 거칠기 측정법 중에서도 인프로세스 측정에 큰 장 점이 있는 것으로 밝혀졌다. 알려진 바로는 하나의 반사광을 정반사 성분와 난반사 성분으로 구분할 수 있으며 정반사 성분은 광 강도가, 난반사 성분은 광 분포가 중요하다. 매끈한 면에서는 정반사 성분이 지배적이며, 거친 면에서는 난반사 성분이 지배적이고, 그 중간 단계의 면에서는 두 성분이 합해져서 동시에 나타난다.(중략)

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3-Dimensional Shape Inspection for Micro BGA by LED Reflection Image (LED 반사영상을 이용한 마이크로 BGA 3차원형상검사)

  • Kim, Jee Hong
    • Journal of the Microelectronics and Packaging Society
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    • v.24 no.2
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    • pp.55-59
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    • 2017
  • An optical method to inspect the 3-D shape of surface of Micro BGA is proposed, where spatially arranged LED light sources and specular reflection are considered. The reflected image captured by a vision system was analyzed to calculate the relative displacements of LED's in the image. Also, the statistics for all BGA's contained in a captured image are used together to find out the criteria for the detection of existing defects, and the usefulness of the proposed method is shown via experiments.