• 제목/요약/키워드: Spacing rate

검색결과 349건 처리시간 0.027초

$SF_6$플라즈마를 이용한 텅스텐 박막의 반응성이온식각에 관한 실험적 연구 (Experimental Study of Reactive Ion Etching of Tungsten Films Using $SF_6$ Plasma)

  • 박상규;서성우;이시우
    • 전자공학회논문지A
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    • 제30A권7호
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    • pp.60-74
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    • 1993
  • Experiments of RIE of tungsten films using SF$_{6}$ plasma were conducted to investigate the effect of process parameters on etch rate, uniformity, anisotropy, and selectivity. As power increased, the etch rate increased. Maximum etch rate was obtained at 200mtorr As interelectrode spacing increased the etch rate increased for P < 200mtorr while it decreased for P> 200mtorr. Etch rate was maximum at 20 sccm gas flow rate. As substrate temperature increased, the etch rate increased and activation energy was 0.046 eV. In addition, maximum etch rate was acquired at 20% $O_{2}$ addition. The etch rate slightly increased when Ar was added up to 20% while it continuously decreased when N$_{2}$ was added. Uniformity got improved as pressure decreased and was less than 4% for P <100mtorr. Mass spectrometer was utilized to analyze gas composition and S and F peaks were observed from XPS analysis with increasing power. The anisotropy was better for smaller power and spacing, and lower pressure and temperature. It improved when CH$_{4}$ was added and anisotropic etch profile was obtained when about 10% $O_{2}$ was added. The selectjvity was better for smaller power larger pressure and spacing, and lower temperature. Especially. low temperature processing was proposed as a novel method to improve the anisotropy and selectivity.

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말뚝 간격에 따른 에너지 파일의 열적 거동분석 (Effect of Group Spacing of Energy Piles on Thermal Analysis)

  • 민혜선;윤태섭;정상섬
    • 한국지반공학회논문집
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    • 제27권8호
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    • pp.39-50
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    • 2011
  • 본 논문에서는 지열을 이용한 PHC 말뚝형 에너지 파일의 계절별 유속변화에 따른 열교환율과 단독말뚝의 열교환율을 100시간 운용 시 포화지반 조건에 한정하여 수치해석을 수행하였다. 해석결과 동절기 및 하절기일 때 100시간 운용 시 평균 열교환율은 약 55 W/m, 47 W/m로 나타났으며, 순환수 유속이 증가할수록 전체적인 열교환율이 상승하였다. 동절기에 말뚝간격 3D 및 5D(D:말뚝직경) 배치 시 0.6m/s의 순환수 유속에 따른 열적거동을 분석결과 지반과의 열적 자유면이 많은 외곽부일수록 열효율이 증가하였다. 또한, 3D 및 5D 간격의 평균 열교환율은 약 48.5 W/m, 51 W/m로 말뚝간격이 증가할수록 열교환율이 향상되는 것으로 나타났으며, 단독말뚝의 열교환율 대비 상대적으로 3D 및 5D 간격의 군말뚝은 각각 89% 및 93%보 떨어지는 것을 알 수 있었다.

Tribological Behavior of Boundary Lubricated Sliding Surfaces Using Three Different Spacing of Surface Profiles

  • Oh, Se-Doo;Lee, Young-Ze
    • Journal of Mechanical Science and Technology
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    • 제16권11호
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    • pp.1428-1434
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    • 2002
  • The ball-on-disk type sliding tests with boundary lubricated steels were carried out to verify the effect of initial spacing in surface profiles on wear and scuffing. Three kinds of surface spacing, which are closely related with initial surface micro-cracks on sliding surfaces, were produced on AISI 1045 steel surfaces using different grinding and polishing processes. Frictional forces and time to scuffing were measured, and the shape and amount of wear particles were analyzed to compare the with original surface profiles. From the tests, it was confirmed that the size of wear particles are related closely to the original spacing of the surface profile. The time to failure and amount of wear were sensitive to the surface spacing. The wider surface spacing shows much longer sliding life and smaller amount of wear than the others. Time to scuffing was increased with increasing surface pro(lie spacing. The size of wear particles increased while the wear and wear rate K were decreased with an increase in surface spacing. After the sliding tests, surface cracks of inner parts of the wear track formed due to scuffing were observed and compared among the specimens having the different surface spacing.

스터럽간격, 철근직경 및 부식률에 따른 인발 실험체의 부착강도 평가 (Evaluation of Bond Strength of Deformed Bars in Pull-out Specimens Depending on Stirrups Spacing, Rebar diameter and Corrosion Rate)

  • 지성우;정호성;윤차영;이재연;김강수
    • 한국구조물진단유지관리공학회 논문집
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    • 제27권3호
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    • pp.47-57
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    • 2023
  • 본 연구에서는 스터럽 간격, 철근 직경 및 부식률이 이형철근의 부착강도에 미치는 영향을 파악하고자 인발실험이 수행되었다. 스터럽 간격, 철근 직경 및 부식률이 상이한 12개의 인발 실험체를 RILEM RC 6 기준에 따라 제작하였다. 스터럽이 보강된 실험체에 대하여, 부식률이 3% 미만인 경우에는 부착강도가 증가하였으나, 부식률이 3%를 초과한 경우에는 부착강도가 감소하였다. 반면, 스터럽이 보강되지 않은 실험체에 대해서는, 부식률이 증가함에 따라 부착강도가 감소하였다. 스터럽 간격 및 부식률 대비, 철근 직경이 부착강도에 미치는 영향은 적은 것으로 나타났다. 이에 따라 스터럽 비율 및 부식률을 변수로 사용하는 인발실험체의 부착강도 회귀모형이 제시되었으며, 제안모델은 선행 모델들에 비해 낮은 오차를 나타내었다.

The Effects of the Distribution Aspect of Precipitate on the Corrosion Behavior of As-Cast Magnesium Alloys

  • 이충도
    • 소성∙가공
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    • 제8권3호
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    • pp.295-295
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    • 1999
  • In the present study, the corrosion behavior of AZ91D as-cast alloy was investigated form the viewpoint of the distribution aspect of precipitate ($Mg_{17}Al_{12}$) and the variation of Al concentration in the Mg-rich matrix. The dendrite arm spacing (DAS) of an as-cast specimen was measured as a function of degree which describes the distribution aspect of the precipitate, and the salt spray test was conducted for various grain-sired specimens fur 20 days. The dendrite arm spacing increased as the grain size increased to about 150㎛, but a constant value is indicated when the grain size exceeds that range. Although the relationship between the corrosion rate and grain size is of a nonlinear type, the linear trend between the corrosion rate and the dendrite arm spacing is maintained for the overall range of dendrite arm spacing. Since the precipitate in the as-cast alloy is discontinuously distributed, this linear relationship means that the variation of Al-solute concentration in the Mg-rich matrix has a more potent effect than the protective action of the precipitate on the corrosion behavior of an as-cast alloy.

Rebar Spacing Fixing Technology using Laser Scanning and HoloLens

  • Lee, Yeongjoo;Kim, Jeongseop;Lee, Jin Gang;Kim, Minkoo
    • 한국건설관리학회논문집
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    • 제25권2호
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    • pp.69-80
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    • 2024
  • Currently rebar spacing inspection is carried out by human inspectors who heavily rely on their individual experience, lacking a guarantee of objectivity and accuracy in the inspection process. In addition, if incorrectly placed rebars are identified, the inspector need to correct them. Recently, laser scanning and AR technologies have been widely used because of their merits of measurement accuracy and visualization. This study proposes a technology for rebar spacing inspection and fixing by combining laser scanning and AR technology. First, scan data acquisition of rebar layers is performed and the raw scan data is processed. Second, AR-based visualization and fixing are performed by comparing the design model with the model generated from the scan data. To verify the developed technique, performance comparison test is conducted by comparing with existing drawing-based method in terms of inspection time, error detection rate, cognitive load, and situational awareness ability. It is found from the result of the experiment that the AR-based rebar inspection and fixing technology is faster than the drawing-based method, but there was no significant difference between the two groups in error identification rate, cognitive load, and situational awareness ability. Based on the experimental results, the proposed AR-based rebar spacing inspection and fixing technology is expected to be highly useful throughout the construction industry.

경계윤활에서 표면의 스페이싱에 따른 마찰 및 마멸 특성 (The Friction and Wear of Boundary Lubricated Sliding Surfaces Using Three Different Surface Profile Spacing)

  • 오세두;이영제
    • Tribology and Lubricants
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    • 제17권5호
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    • pp.399-405
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    • 2001
  • In this paper the ball-on-disk type sliding tests with boundary lubricated steels were carried out to verify the relation between surface profiles and wear as well as scuffing. Three kinds of surface roughness and asperity radius were produced on AISI 1045 steels using the different processes of grinding and polishing. Frictional forces and time to scuffing were measured. Also, the shape and amount of wear particles were analyzed to compare with original profiles. From the tests, it was confirmed that the size of wear particles are very related to original surface profile. The time to failures and wear amounts were sensitive to the surface spacing. The large surface spacing shows much longer sliding life and smaller wear amount than the others. Time to scuffing was increased with increasing surface profile spacing. The sire of wear particles was increased and the amount was decreased with increasing surface profile spacing. Wear volume and wear rate K were decreased with increasing surface profile spacing. And after sliding tests, surface cracks of inner parts of the wear track occurred scuffing were observed and compared the differences about each specimen having the different surface profile spacing.

재식밀도 및 시비량이 버어리종 잎담배의 생육, 수량, 품질 및 질소화합물에 미치는 영향 (Effects of Planting Density and Fertilizer Level on the Growth, Yield, Quality and Nitrogenous Compounds of Burley Tobacco)

  • 김상범;한철수;유익상
    • 한국작물학회지
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    • 제32권1호
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    • pp.40-47
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    • 1987
  • 재식밀도 및 시비량이 버어리종 잎담배의 몇 가지 농경학적, 화학적 형질에 미치는 영향을 3개년 (1982∼84)에 걸쳐 조사 분석하였다. 1. 이식후 40∼60일의 주당엽면적과 엽중, 군낙생장율, 상대생장율, 순동비율은 소식, 증비함에 따라 높아졌으나, 엽면적지수는 소식에 의하여 낮아졌다. 적심기의 잎크기는 소식, 증비수록 커졌고, 탁경은 소식에 의하여 커졌다. 2. 수확엽의 엽면적과 엽면적과 단위엽면적중은 소식, 증비구에서 유의성 있게 높았다. 그러나, 회선곡선상에서 수량제고를 위한 적정재식거리는 105cmx34cm, 복합비료시용량은 263kg/10a로 확정되었다. 3 전알칼로이드 및 전질소함량은 소식, 증비구에서 높은 경향이었으며, 재식거리와 전질소함량, 시비량과 전질소함량간에는 정의 상관이 인정되었다. 4. 농가경제와 질소화합량이 낮은 잎담배 생산을 위하여는 재식거리는 105cmx(35∼40)cm, 시비량은 227.5kg/10a이 유리하였다.

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메탄/공기 다중 제트 예혼합 화염에서의 유동과 연소특성 (Flow and Combustion Characteristic in an Array of Multiple Pre-Mixed Methane/Air Flame Jets)

  • 김영수;이대래;하만영;장영준;전충환;조승완;강길영;유재현
    • 대한기계학회논문집B
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    • 제31권6호
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    • pp.547-557
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    • 2007
  • This study was conducted to investigate the flow and combustion characteristic of the experimental burner which was manufactured for the reflection of the oven and broil burner features. As slot shape, spacing between slots, and slot arrangement of the exit area which emits the mixing gas are different in case of oven burners and broil turners, the purpose of this study is to know the affection of the flame interaction and combustion characteristic according to the change of shape factors such as slot shape, slot arrangement, and slot-to-slot spacing. With no relation of the slot shape, as the spacing between slots became narrow, the occurrence of a lift-flame was delayed. So the combustion was possible in the leaner region, but the appearance of yellow-tip became a little fast. Slit slot port had the broadest operating range among the other slot shapes. Specially, from the side of lift-flame, as the jet that spreads downstream in the longitudinal slot was nearly circular just a few slot lengths away from the orifice, slot-to-slot spacing of the Slit port was closer than the other ports. These results could be expected through the computer numerical method and had a good agreement. As the spacing between slots increased, in case of Slit and Mix port, NOx emission rate was constant or decreased, but the NOx emission of Hole port was increased. CO emission rate of Slit and Hole port was increased as the slot-to-slot spacing was broadened.

재료의 표면파괴와 마멸특성에 대한 표면 형상의 영향 (The effect of surface profile on wear and scuffing of bounda lubricated sliding surfaces)

  • 오세두;이영제
    • 한국윤활학회:학술대회논문집
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    • 한국윤활학회 2001년도 제33회 춘계학술대회 개최
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    • pp.64-71
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    • 2001
  • In this paper the ball-on-disk type sliding tests with boundary lubricated steels were carried out to verify the relation between surface profiles and wear as well as scuffing. Three kinds of surface roughness and asperity radius were produced on AISI 1045 steels using the different processes of grinding and polishing. Frictional forces and time to scuffing were measured. Also, the shape and amount of wear particles were analyzed to compare with original profiles. From the tests, it was confirmed that the size of wear particles are very related to original surface profile. The time to failures and wear amounts were sensitive to the surface spacing. The large surface spacing shows much longer sliding life and smaller wear amount than the others. Time to scuffing was increased with increasing surface profile spacing. The size of wear particles was increased and the amount was decreased with increasing surface profile spacing. Wear volume and wear rate K were decreased with increasing surface profile spacing. And after sliding tests, surface cracks of inner parts of the wear track occurred scuffing were observed and compared the differences about each specimen having the different surface profile spacing.

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