• Title/Summary/Keyword: Spacing rate

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Experimental Study of Reactive Ion Etching of Tungsten Films Using $SF_6$ Plasma ($SF_6$플라즈마를 이용한 텅스텐 박막의 반응성이온식각에 관한 실험적 연구)

  • 박상규;서성우;이시우
    • Journal of the Korean Institute of Telematics and Electronics A
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    • v.30A no.7
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    • pp.60-74
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    • 1993
  • Experiments of RIE of tungsten films using SF$_{6}$ plasma were conducted to investigate the effect of process parameters on etch rate, uniformity, anisotropy, and selectivity. As power increased, the etch rate increased. Maximum etch rate was obtained at 200mtorr As interelectrode spacing increased the etch rate increased for P < 200mtorr while it decreased for P> 200mtorr. Etch rate was maximum at 20 sccm gas flow rate. As substrate temperature increased, the etch rate increased and activation energy was 0.046 eV. In addition, maximum etch rate was acquired at 20% $O_{2}$ addition. The etch rate slightly increased when Ar was added up to 20% while it continuously decreased when N$_{2}$ was added. Uniformity got improved as pressure decreased and was less than 4% for P <100mtorr. Mass spectrometer was utilized to analyze gas composition and S and F peaks were observed from XPS analysis with increasing power. The anisotropy was better for smaller power and spacing, and lower pressure and temperature. It improved when CH$_{4}$ was added and anisotropic etch profile was obtained when about 10% $O_{2}$ was added. The selectjvity was better for smaller power larger pressure and spacing, and lower temperature. Especially. low temperature processing was proposed as a novel method to improve the anisotropy and selectivity.

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Effect of Group Spacing of Energy Piles on Thermal Analysis (말뚝 간격에 따른 에너지 파일의 열적 거동분석)

  • Min, Hye-Sun;Yun, Tae-Sup;Jeong, Sang-Seom
    • Journal of the Korean Geotechnical Society
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    • v.27 no.8
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    • pp.39-50
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    • 2011
  • This study was conducted to analyze the thermal behavior of a PHC energy pi1e system in saturated soil conditions, various seasonal and flow-speed conditions during 100 hours of operation through numerical analysis. The examination was a1so conducted with a single pile as well as with group pils. For the operation of 100 hours, the average heat exchange rate appeared 55 W/m, 47 W/m during winter and summer respectively. An increase in flow-speed was associated with a rise in the heat exchange rate. And thermal behavior analysis results during winter season show that thermal efficiency has increased when there are more free thermal planes. For the operation in group pile as 3D and 5D pile spacing (D: pile diameter), average heat exchange rate increased as pile spacing grows. Compared with the heat exchange rate of single pile, thermal exchange efficiency of group pile decreased by 89% (for 3D spacing) and 93% (for 5D spacing).

Tribological Behavior of Boundary Lubricated Sliding Surfaces Using Three Different Spacing of Surface Profiles

  • Oh, Se-Doo;Lee, Young-Ze
    • Journal of Mechanical Science and Technology
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    • v.16 no.11
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    • pp.1428-1434
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    • 2002
  • The ball-on-disk type sliding tests with boundary lubricated steels were carried out to verify the effect of initial spacing in surface profiles on wear and scuffing. Three kinds of surface spacing, which are closely related with initial surface micro-cracks on sliding surfaces, were produced on AISI 1045 steel surfaces using different grinding and polishing processes. Frictional forces and time to scuffing were measured, and the shape and amount of wear particles were analyzed to compare the with original surface profiles. From the tests, it was confirmed that the size of wear particles are related closely to the original spacing of the surface profile. The time to failure and amount of wear were sensitive to the surface spacing. The wider surface spacing shows much longer sliding life and smaller amount of wear than the others. Time to scuffing was increased with increasing surface pro(lie spacing. The size of wear particles increased while the wear and wear rate K were decreased with an increase in surface spacing. After the sliding tests, surface cracks of inner parts of the wear track formed due to scuffing were observed and compared among the specimens having the different surface spacing.

Evaluation of Bond Strength of Deformed Bars in Pull-out Specimens Depending on Stirrups Spacing, Rebar diameter and Corrosion Rate (스터럽간격, 철근직경 및 부식률에 따른 인발 실험체의 부착강도 평가)

  • Seong-Woo Ji;Hoseong Jeong;Cha-Young Yoon;Jae-Yeon Lee;Kang Su Kim
    • Journal of the Korea institute for structural maintenance and inspection
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    • v.27 no.3
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    • pp.47-57
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    • 2023
  • In this study, pull-out tests were performed to investigate the effects of stirrup spacing, rebar diameter, and corrosion rate on bond strength of deformed bars in reinforced concrete. Twelve pull-out specimens with different stirrup spacing, rebar diameter, and corrosion rate were prepared following the RILEM RC6 guidelines. The test results showed that the bond strength of specimens with stirrups increased when the corrosion rate was less than 3%, whereas it decreased when the corrosion rate was more than 3%. On the other hand, the bond strength of specimens without stirrups decreased as the corrosion rate increased. The effect of rebar diameter was less significant compared to those of stirrup spacing and corrosion rate. A bond strength model for pull-out specimens was proposed considering stirrup ratio and corrosion rate, and the model showed the lowest error among the previous models.

The Effects of the Distribution Aspect of Precipitate on the Corrosion Behavior of As-Cast Magnesium Alloys

  • 이충도
    • Transactions of Materials Processing
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    • v.8 no.3
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    • pp.295-295
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    • 1999
  • In the present study, the corrosion behavior of AZ91D as-cast alloy was investigated form the viewpoint of the distribution aspect of precipitate ($Mg_{17}Al_{12}$) and the variation of Al concentration in the Mg-rich matrix. The dendrite arm spacing (DAS) of an as-cast specimen was measured as a function of degree which describes the distribution aspect of the precipitate, and the salt spray test was conducted for various grain-sired specimens fur 20 days. The dendrite arm spacing increased as the grain size increased to about 150㎛, but a constant value is indicated when the grain size exceeds that range. Although the relationship between the corrosion rate and grain size is of a nonlinear type, the linear trend between the corrosion rate and the dendrite arm spacing is maintained for the overall range of dendrite arm spacing. Since the precipitate in the as-cast alloy is discontinuously distributed, this linear relationship means that the variation of Al-solute concentration in the Mg-rich matrix has a more potent effect than the protective action of the precipitate on the corrosion behavior of an as-cast alloy.

Rebar Spacing Fixing Technology using Laser Scanning and HoloLens

  • Lee, Yeongjoo;Kim, Jeongseop;Lee, Jin Gang;Kim, Minkoo
    • Korean Journal of Construction Engineering and Management
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    • v.25 no.2
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    • pp.69-80
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    • 2024
  • Currently rebar spacing inspection is carried out by human inspectors who heavily rely on their individual experience, lacking a guarantee of objectivity and accuracy in the inspection process. In addition, if incorrectly placed rebars are identified, the inspector need to correct them. Recently, laser scanning and AR technologies have been widely used because of their merits of measurement accuracy and visualization. This study proposes a technology for rebar spacing inspection and fixing by combining laser scanning and AR technology. First, scan data acquisition of rebar layers is performed and the raw scan data is processed. Second, AR-based visualization and fixing are performed by comparing the design model with the model generated from the scan data. To verify the developed technique, performance comparison test is conducted by comparing with existing drawing-based method in terms of inspection time, error detection rate, cognitive load, and situational awareness ability. It is found from the result of the experiment that the AR-based rebar inspection and fixing technology is faster than the drawing-based method, but there was no significant difference between the two groups in error identification rate, cognitive load, and situational awareness ability. Based on the experimental results, the proposed AR-based rebar spacing inspection and fixing technology is expected to be highly useful throughout the construction industry.

The Friction and Wear of Boundary Lubricated Sliding Surfaces Using Three Different Surface Profile Spacing (경계윤활에서 표면의 스페이싱에 따른 마찰 및 마멸 특성)

  • 오세두;이영제
    • Tribology and Lubricants
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    • v.17 no.5
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    • pp.399-405
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    • 2001
  • In this paper the ball-on-disk type sliding tests with boundary lubricated steels were carried out to verify the relation between surface profiles and wear as well as scuffing. Three kinds of surface roughness and asperity radius were produced on AISI 1045 steels using the different processes of grinding and polishing. Frictional forces and time to scuffing were measured. Also, the shape and amount of wear particles were analyzed to compare with original profiles. From the tests, it was confirmed that the size of wear particles are very related to original surface profile. The time to failures and wear amounts were sensitive to the surface spacing. The large surface spacing shows much longer sliding life and smaller wear amount than the others. Time to scuffing was increased with increasing surface profile spacing. The sire of wear particles was increased and the amount was decreased with increasing surface profile spacing. Wear volume and wear rate K were decreased with increasing surface profile spacing. And after sliding tests, surface cracks of inner parts of the wear track occurred scuffing were observed and compared the differences about each specimen having the different surface profile spacing.

Effects of Planting Density and Fertilizer Level on the Growth, Yield, Quality and Nitrogenous Compounds of Burley Tobacco (재식밀도 및 시비량이 버어리종 잎담배의 생육, 수량, 품질 및 질소화합물에 미치는 영향)

  • Kim, Sang-Beom;Han, Chul-Soo;Ryu, Ik-Sang
    • KOREAN JOURNAL OF CROP SCIENCE
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    • v.32 no.1
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    • pp.40-47
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    • 1987
  • Under the different conditions of planting density and compound fertilizer level, some agronomic and chemical characteristics of burley tobacco were investigated from 1982 to 1984. Leaf area and dry leaf weight per plant, crop growth rate, relative growth rate and net assimilation rate for 40-60 days after transplanting were higher with increasing plant spacing and fertilizer, but leaf area index was lower with increasing plant spacing. At topping stage, the leaf size was increased with increasing plant spacing and amount of fertilizer applied and the stem diameter was increased by increasing plant spacing. Leaf area, leaf weight per plant and weight per unit leaf area of harvested leaf were higher when plant spacing and fertilizer increased. It was estimated that the optimum plant spacing was 105cm x 34cm and level of com-pound fertilizer (N-P$_2$ O$\sub$5/ -K$_2$O =10-10-20) was 263kg/l0a for high yield. There were trends toward increase the contents of total alkaloid and total nitrogen with increasing plant spacing and fertilizer application. There was significant positive correlation between plant spacing and total nitrogen, and between fertilizer application and total nitrogen. The plant spacing of 105cm x 35 to 40cm and 227.5kg/l0a of fertilizer level may be profitable for farm economy and the low nitrogenous leaf.

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Flow and Combustion Characteristic in an Array of Multiple Pre-Mixed Methane/Air Flame Jets (메탄/공기 다중 제트 예혼합 화염에서의 유동과 연소특성)

  • Kim, Young-Su;Lee, Dae-Rae;Ha, Man-Yeong;Chang, Young-June;Jeon, Chung-Hwan;Cho, Seung-Wan;Kang, Kil-Young;Yu, Jae-Hyun
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.31 no.6 s.261
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    • pp.547-557
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    • 2007
  • This study was conducted to investigate the flow and combustion characteristic of the experimental burner which was manufactured for the reflection of the oven and broil burner features. As slot shape, spacing between slots, and slot arrangement of the exit area which emits the mixing gas are different in case of oven burners and broil turners, the purpose of this study is to know the affection of the flame interaction and combustion characteristic according to the change of shape factors such as slot shape, slot arrangement, and slot-to-slot spacing. With no relation of the slot shape, as the spacing between slots became narrow, the occurrence of a lift-flame was delayed. So the combustion was possible in the leaner region, but the appearance of yellow-tip became a little fast. Slit slot port had the broadest operating range among the other slot shapes. Specially, from the side of lift-flame, as the jet that spreads downstream in the longitudinal slot was nearly circular just a few slot lengths away from the orifice, slot-to-slot spacing of the Slit port was closer than the other ports. These results could be expected through the computer numerical method and had a good agreement. As the spacing between slots increased, in case of Slit and Mix port, NOx emission rate was constant or decreased, but the NOx emission of Hole port was increased. CO emission rate of Slit and Hole port was increased as the slot-to-slot spacing was broadened.

The effect of surface profile on wear and scuffing of bounda lubricated sliding surfaces (재료의 표면파괴와 마멸특성에 대한 표면 형상의 영향)

  • 오세두;이영제
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 2001.06a
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    • pp.64-71
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    • 2001
  • In this paper the ball-on-disk type sliding tests with boundary lubricated steels were carried out to verify the relation between surface profiles and wear as well as scuffing. Three kinds of surface roughness and asperity radius were produced on AISI 1045 steels using the different processes of grinding and polishing. Frictional forces and time to scuffing were measured. Also, the shape and amount of wear particles were analyzed to compare with original profiles. From the tests, it was confirmed that the size of wear particles are very related to original surface profile. The time to failures and wear amounts were sensitive to the surface spacing. The large surface spacing shows much longer sliding life and smaller wear amount than the others. Time to scuffing was increased with increasing surface profile spacing. The size of wear particles was increased and the amount was decreased with increasing surface profile spacing. Wear volume and wear rate K were decreased with increasing surface profile spacing. And after sliding tests, surface cracks of inner parts of the wear track occurred scuffing were observed and compared the differences about each specimen having the different surface profile spacing.

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