• 제목/요약/키워드: Softlithography

검색결과 4건 처리시간 0.017초

마이크로컨택 프린팅을 이용한 나노와이어 패터닝 기술 개발 (Development of Nanowire Patterning Process Using Microcontact Printing)

  • 조성진
    • 한국전기전자재료학회논문지
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    • 제29권9호
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    • pp.571-575
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    • 2016
  • Recently, there has been much focus on the controlled alignment and patterning process of nanowires for nanoelectronic devices. A simple and effective method for patterning of highly aligned nanowires using a microcontact printing technique is demonstrated. In this method, nanowires are first directionally aligned by contact printing, following which line and space micropatterns of nanowire arrays are accomplished by microcontact printing with a micro patterned NOA mold.

생명공학과 의학을 위한 마이크로 기술 (Microtechnology for Biotechnology and Medicine)

  • 이상훈
    • 대한의용생체공학회:의공학회지
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    • 제29권1호
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    • pp.1-7
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    • 2008
  • Recent a few decades, the microtechnology has been progressed so rapidly and applied in diverse areas. Especially, this technology was focused on the field of biotechnology and medicine because of its size and simple fabrication process. In this paper, the current status of microtechnology is briefly introduced from the aspect of material, process and device and the application of this technology in biotechnology and medicine is also described. The microtechnology will be more broadly applied in future in the biotechnology and medicine area and the biomedical engineer should have continuous interests in this technology.

PDMS stamp 제조시 패턴의 전사 정확도 연구 (Investigation on Transcription Accuracy of PDMS Stamps to Mold Patterns)

  • 이은지;김경섭;김남훈;노용한
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2007년도 추계학술대회 논문집
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    • pp.99-100
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    • 2007
  • Transferring patterns from mold to PDMS stamp is very useful technology in micro-fabrication, complex and three-dimensional structures. First experimentation, mold's patterns wens transferred to PDMS stamp. Comparing with PDMS stamp and Mold, patterns were transferred about 97.9%. Second experimentation, PDMS stamps were made several times by only one mold, scale and distance of transferred patterns were uniform about 89.3%. We proved that transferring patterns from mold to PDMS stamp is accurate. The uniformity of stamps is the same after mold was used several times. Transferring patterns from mold to PDMS stamp has uniformity and accuracy, it will be useful technology.

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