• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.890-893
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• 2004

The ultra precision machining in industrial field are increased day by day. The diamond turning has been used generally, but now is faced with limitation of use, because of higher requirement of production field. The electron beam lithography is alternative in machining area as semiconductor production. For EB lithography, 5 axis vacuum stage is required to duplicate small and large patterns on wafer. The stage is composed of 2 rotational axis and 3 translational axis with 5 DC servo motors. The positioning repeatability and resolution of Z axis feed unit are 3.21$\mu$m and 0.5 $\mu$m/step enough to apply to lithography.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.383-383
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• 2011

Generally, field emitters can be categorized into two types according to the emitter shape, one is a planar field emitter and the other is a point emitter. The planar field emitter is used for displays, flat lamps and signage boards. On the other hands, the point field emitter is expected to play a significant role in x-ray sources and electron beam sources. Such applications of the point field emitters, especially, need large emission current and high emission stability with a small electron beam size. A few reports announced point emitters made by carbon nanotubes (CNTs). However, they still have suffered from poor reproducibility and low emission current. Here, we demonstrated high performance CNT point emitters by attaching CNTs onto graphite rod. Graphite rod exhibited good electrical conductivity and chemical stability. In this method, the shape of the point emitter could be easily controlled by changing the length and diameter of the graphite rod. The CNT point emitter showed emission current over 1 mA at an applied electric field of 1.4 V/${\mu}m$. We consider that the stable emission performance is attributed to the stable contact between CNTs and graphite rod.

• Journal of radiological science and technology
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• v.35 no.3
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• pp.265-273
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• 2012

Aquisition of accurate beam data is very important to calculate a reliable dose distribution of the treatment planning system for small radiation fields in intensity-modulated radiation therapy(IMRT) and stereotactic radiosurgery(SRS). For the measurement of small fields, the choice of a suitable detector is important due to the shape gradient in profile penumbra, the lack of lateral electronic equilibrium, and the effect of effective detector volume. Therefore, this study was to analyze the dosimetric characteristics of various detectors in measurement of beam data for small fields of linear accelerator. 0.01cc and 0.13cc ion chambers (CC01 and CC13) and a stereotactic diode detector(SFD) were used for measurement of small fields. The beam data, including the percent depth dose, output factor, and beam profile were acquired under 6 MV and 15 MV photon beams. Measurements were performed with the field size ranging from $2{\times}2cm^2$ to $5{\times}5cm^2$. For $2{\times}2cm^2$ field size, the differences of the ratios of $PDD_{20}$ and $PDD_{10}$ measured by CC01 and SFD detectors were 1.02% and 0.12% for 6 MV and 15 MV photon beams, respectively. For field sizes larger than $3{\times}3cm^2$, the differences of values of $PDD_{20}/PDD_{10}$ obtained from each detector were 1.15% and 0.71% for 6 MV and 15 MV photon beams, respectively. The output factors obtained from CC01 and SFD for $2{\times}2cm^2$ field size were within 0.5% and 1.5% for 6 MV and 15 MV, respectively. The differences in output factor of three detectors for $3{\times}3cm^2$ to $5{\times}5cm^2$ field sizes were within 0.5%. Profile penumbras measured by the SFD, CC01, and CC13 detectors at three depths were average 2.7 mm and 3.5 mm, 3.4 mm and 4.3 mm, and 5.2 mm and 6.1 mm for 6 MV and 15 MV photon beams, respectively. In conclusion, it could be possible to use of the CC01 and SFD detectors for the measurement of percent depth dose and output factor for $2{\times}2cm^2$ field size, and to use of three detectors for $3{\times}3cm^2$ to $5{\times}5cm^2$ field sizes. CC01 and SFD detectors, consider ably smaller than the radiation field, should be used in order to accurately measure the profile penumbra for small field sizes.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2003.05a
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• pp.1165-1169
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• 2003

This paper presents an approach to optimally design the air-bearing surface (ABS) of the optical flying head for near-field recording technology (NFR). NFR is an optical recording technology using very small beam spot size by overcoming the limit of beam diffraction. One of the most Important problems in NFR is a head disk interface (HDI) issue over the recording band during the operation. A multi-criteria optimization problem is formulated to enhance the flying performances over the entire recording band during the steady state. The optimal solution of the slider, whose target flying height is 50 nm, is automatically obtained. The flying height during the steady state operation becomes closer to the target values than those fur the initial one. The pitch and roll angles are also kept within suitable ranges over the recording band. Especially, all of the air-bearing stiffness are drastically increased by the optimized geometry of the air bearing surface.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.1017-1020
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• 2004

It is not efficient and scarcely out of the question to use commercial expensive electron beam lithography system widely used for semiconductor fabrication process for the manufacturing application field of various devices in the small business scope. Then scanning electron microscope based electron beam machining system is maybe regarded as a powerful model can be used for it simply. To get a complete suite of thus proper system, column unit build up with several electo-magnetic lens is necessarily required more than anything else to modify scanning electron microscope. In this study, various components included several electro-magnetic lens and main body which are essentially constructed for column unit are designed and manufactured. And this established column unit will be used for next connected study in the development step of scanning electron microscope based electron beam machining system.

• Structural Engineering and Mechanics
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• v.51 no.4
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• pp.601-625
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• 2014

Based on continuum mechanics and the principle of virtual displacements, incremental total Lagrangian formulation (T.L.) and incremental updated Lagrangian formulation (U.L.) were presented. Both T.L. and U.L. considered the large displacement stiffness matrix, which was modified to be symmetrical matrix. According to the incremental updated Lagrangian formulation, small strain, large displacement, finite rotation of three dimensional Timoshenko fiber beam element tangent stiffness matrix was developed. Considering large displacement and finite rotation, a new type of tangent stiffness matrix of the beam element was developed. According to the basic assumption of plane section, the displacement field of an arbitrary fiber was presented in terms of nodal displacement of centroid of cross-area. In addition, shear deformation effect was taken account. Furthermore, a nonlinear finite element method program has been developed and several examples were tested to demonstrate the accuracy and generality of the three dimensional beam element.

• The Journal of Korean Society for Radiation Therapy
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• v.14 no.1
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• pp.175-186
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• 2002

The purpose of this study is directly measure and evaluate about absorbed dose change according to nominal energy and electron cone or medical accelerator on isodose curve, percentage depth dose, contaminated X-ray, inhomogeneous tissue, oblique surface and irradiation on intracavitary that electron beam with high energy distributed in tissue, and it settled standard data of hish energy electron beam treatment, and offer to exactly data for new dote distribution modeling study based on experimental resuls and theory. Electron beam with hish energy of $6{\sim}20$ MeV is used that generated from medical linear accelerator (Clinac 2100C/D, Varian) for the experiment, andwater phantom and Farmer chamber md Markus chamber und for absorbe d dose measurement of electron beam, and standard absorbed dose is calculated by standard measurements of International Atomic Energy Agency(IAEA) TRS 277. Dose analyzer (700i dose distribution analyzer, Wellhofer), film (X-OmatV, Kodak), external cone, intracavitary cone, cork, animal compact bone and air were used for don distribution measurement. As the results of absorbed dose ratio increased while irradiation field was increased, it appeared maximum at some irradiation field size and decreased though irradiation field size was more increased, and it decreased greatly while energy of electron beam was increased, and scattered dose on wall of electron cone was the cause. In percentage depth dose curve of electron beam, Effective depth dose(R80) for nominal energy of 6, 9, 12, 16 and 20 MeV are 1.85, 2.93, 4.07, 5.37 and 6.53 cm respectively, which seems to be one third of electron beam energy (MeV). Contaminated X-ray was generated from interaction between electron beam with high energy and material, and it was about $0.3{\sim}2.3\%$ of maximum dose and increased with increasing energy. Change of depth dose ratio of electron beam was compared with theory by Monte Carlo simulation, and calculation and measured value by Pencil beam model reciprocally, and percentage depth dose and measured value by Pencil beam were agreed almost, however, there were a little lack on build up area and error increased in pendulum and multi treatment since there was no contaminated X-ray part. Percentage depth dose calculated by Monte Carlo simulation appeared to be less from all part except maximum dose area from the curve. The change of percentage depth dose by inhomogeneous tissue, maximum range after penetration the 1 cm bone was moved 1 cm toward to surface then polystyrene phantom. In case of 1 cm and 2 cm cork, it was moved 0.5 cm and 1 cm toward to depth, respectively. In case of air, practical range was extended toward depth without energy loss. Irradiation on intracavitary is using straight and beveled type cones of 2.5, 3.0, 3.5 $cm{\phi}$, and maximum and effective $80\%$ dose depth increases while electron beam energy and size of electron cone increase. In case of contaminated X-ray, as the energy increase, straight type cones were more highly appeared then beveled type. The output factor of intracavitary small field electron cone was $15{\sim}86\%$ of standard external electron cone($15{\times}15cm^2$) and straight type was slightly higher then beveled type.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.24 no.12
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• pp.1198-1204
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• 2013

As a microwave near field probe for near field scanning optical microscope(NSOM) system, H-shaped(ridge type) small aperture is proposed and its performances from the viewpoints of the transmission efficiency(transmission cross section) and spatial confinement(beam spot size) are compared with those of the previous narrow rectangular aperture type. While the transmission efficiencies are comparable to each other for the two structures, the transmitted beam spot size for the proposed H-shaped aperture is much smaller than that for the previous rectangular aperture. This strong point of the H-shaped aperture is expected to significantly improve near-field optical applications such as optical data storage, nanolithography and nanomicroscopy. It is also observed that the transmission efficiency can be improved if the coupling aperture is implemented in the type of the transmission cavity.

• The Journal of Korean Society for Radiation Therapy
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• v.10 no.1
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• pp.60-68
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• 1998

Treatment of a large diseased area with electron often requires the use of two or more adjoining fields. In such cases, not only electron beam divergence and lateral scattering but also fields overlapping and separation may lead to significant dose inhomogeneities(${\pm}20\%$) at the field junction area. In this study, we made Acrylic Electron Wedges to improve dose homogeneities(${\pm}5\%$) in these junction areas and considered application it to clinical practices. All measurements were made using 6, 9, 12, 16, 20MeV Electron beams from a linear accelerator for a $10{\times}10cm$ field at 100cm SSD. Adding a 1 mm sheet of acryl gradually from 1 mm to 15 mm, We acquired central axis depth dose beam profile and isodose curves in water phantom. As a result, for all energies, the practical range was reduced by approximately the same distance as the thickness of the acryl insert, e.g. a 1 mm thick acryl insert reduce the practical range by approximately 1 mm. For every mm thickness of acryl inserted, the beam energy was reduced by approximately 0.2MeV. These effects were almost independent of beam energy and field size. The use of Acrylic Electron Wedges produced a small increase $(less\;than\;3\%)\;in\;the\;surface\;dose\;and\;a\;small\;Increase(less\;than\;1\%)$ in X-ray contamination. For acryl inserts, thickness of 3 mm or greater, the penumbra width increased nearly linear for all energies and isodose curves near the beam edge were nearly parallel with the incident beam direction, and penumbra width was $35\;mm{\sim}40\;mm$. We decide heel thickness and angle of the wedge at this point. These data provide the information necessary to design Acrylic Electron Wedge which can be use to improve dose uniformity at electron field junctions and it will be effectively applicated in clinical practices.

• Journal of The Korean Astronomical Society
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• v.25 no.2
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• pp.111-128
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• 1992

Infrared emissions from spherical dust, clouds are calculated using quasi-diffusion method. We have employed graphite-silicate mixture with power-law size distribution for the dust model. The grains are assumed to be heated and cooled by radiative processes only. The primary heating source is diffuse interstellar radiation field. hut the cases with an embedded source are also considered. Since graphite grains have higher temperature than silicate grains, the observed IR emission is mainly due to graphite grains, unless the fraction of graphite grains is negligibly small. The color temperature of Bok globules obtained from IRAS 60 and $100{\mu}m$ data are found to be consistent with the dust cloud with graphite-silicate mixture exposed to average interstellar radiation field. The color temperature is sensitive to the external radiation field, but rather insensitive to the size distribution of the grains. We found that the density distribution can be recovered outside the beam size using the inversion technique that assumes negligible optical depth. However, the information within the beam size is lost for if beam convolved intensity distributions are used in deriving density profile.